JPS6325530B2 - - Google Patents
Info
- Publication number
- JPS6325530B2 JPS6325530B2 JP54041815A JP4181579A JPS6325530B2 JP S6325530 B2 JPS6325530 B2 JP S6325530B2 JP 54041815 A JP54041815 A JP 54041815A JP 4181579 A JP4181579 A JP 4181579A JP S6325530 B2 JPS6325530 B2 JP S6325530B2
- Authority
- JP
- Japan
- Prior art keywords
- tuning fork
- soft metal
- thin film
- fork type
- type crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 35
- 229910052751 metal Inorganic materials 0.000 claims description 35
- 239000013078 crystal Substances 0.000 claims description 24
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 229910000510 noble metal Inorganic materials 0.000 claims 1
- 239000002344 surface layer Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 description 16
- 239000010408 film Substances 0.000 description 11
- 239000000853 adhesive Substances 0.000 description 10
- 230000001070 adhesive effect Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 238000005304 joining Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- RZVXOCDCIIFGGH-UHFFFAOYSA-N chromium gold Chemical compound [Cr].[Au] RZVXOCDCIIFGGH-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0504—Holders; Supports for bulk acoustic wave devices
- H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
- H03H9/0519—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps for cantilever
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】
本発明は音叉型水晶振動子の支持構造に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a support structure for a tuning fork type crystal resonator.
最近腕時計用音叉型水晶振動子は特に小型薄型
化の傾向が著しくなつて来た。この音叉型水晶振
動子は第１図に示す如く、１は音叉型水晶片で、
該水晶片１は化学的エツチング加工により形成さ
れているので厚さは0.1mm以下となつており、２
は音叉型水晶片１を支持する金属製リード端子
で、該端子２は半田等軟質金属又は接着剤によつ
て、前記水晶片１と接合され、また３は気密端
子、４は円筒状容器である。このような構成であ
るため支持部の接合部材に接着剤を使用する場
合、接着剤には多量のガスが内蔵されており、気
密封止直前に脱ガスを行つても完全に脱ガスする
ことは困難であり、この為、気密封止後に接着剤
から徐々にガスが放出され容器内の真空度を悪く
し、結果的に水晶振動子のＱ値を低下させること
になつてしまう。一方、ガス発生を抑えるために
接着剤の使用量を少く限定しようとすると、接着
剤そのものの接着強度不足により衝撃等の外乱に
弱くなる欠点を有している。 In recent years, there has been a marked trend toward smaller and thinner tuning fork crystal resonators for wristwatches. As shown in Figure 1, this tuning fork type crystal resonator has a tuning fork type crystal piece 1;
The crystal piece 1 is formed by chemical etching, so its thickness is 0.1 mm or less, and the crystal piece 1 has a thickness of 0.1 mm or less.
1 is a metal lead terminal supporting a tuning fork-shaped crystal piece 1, the terminal 2 is joined to the crystal piece 1 by a soft metal such as solder or an adhesive, 3 is an airtight terminal, and 4 is a cylindrical container. be. Due to this structure, when using adhesive for the joining member of the support part, the adhesive contains a large amount of gas, so even if it is degassed immediately before airtight sealing, it will not be completely degassed. Therefore, after hermetic sealing, gas is gradually released from the adhesive, worsening the degree of vacuum inside the container, and resulting in a decrease in the Q value of the crystal resonator. On the other hand, if an attempt is made to limit the amount of adhesive used to suppress gas generation, there is a drawback that the adhesive itself is insufficient in adhesive strength and becomes susceptible to external disturbances such as impact.
このような接着剤による脱ガス現象を防止する
ため、支持部の接合部材に半田を使用する場合
は、金くわれ現象が避けられず、その対策として
音叉型水晶片の基部の支持部のみ1μm以上の厚い
金メツキ等を施す必要があり、材料コスト的に不
利で又半田付け作業時に音叉型水晶片１又は金属
細棒２に予ビ半田付け作業を何らかの方法で施さ
なければならず、加工時間の面でコスト高は免れ
なかつた。 In order to prevent such degassing phenomenon caused by adhesive, when using solder for the joining member of the support part, the metal cracking phenomenon is unavoidable, and as a countermeasure, only the support part of the base of the tuning fork type crystal piece has a thickness of 1 μm. It is necessary to apply thick gold plating, etc. as described above, which is disadvantageous in terms of material cost.Also, during soldering work, preliminary soldering work must be performed on the tuning fork-shaped crystal piece 1 or thin metal rod 2 by some method, and processing In terms of time, costs were unavoidable.
本発明は上記の欠点をなくしたものでその構成
を詳述する図面第２図イ，ロ，ハは本発明におけ
る音叉型水晶振動子の支持構造を示すもので、イ
図は正面図、ロ図はイ図のAA断面図、ハ図は側
面図であり、１は音叉型水晶片、５は電極用金属
薄膜で通常CrAu（クロム金）が用いられ厚さは
1000〜2000Å（オングストローム）である。６は
電極用金属薄膜５の上に付着形成した軟質金属薄
膜で、本発明ではSn（錫）を用いて厚さは1000〜
100000Åの範囲である。７は更に軟質金属薄膜６
の上に付着形成された軟質金属厚膜で、本発明で
はPb（鉛）を用い厚さは10〜100μmの範囲であ
る。この場合の金よる成る電極用金属薄膜６と錫
より成る軟質金属薄膜６および該軟質金属薄膜６
と鉛より成る軟質金属厚膜７の密着力について
は、前記各膜が蒸着中に互に充分拡散し合うので
リフローしなくても密着強度に不足がないことは
実験的に確認した。なお図イにおいては電極用金
属薄膜５のパターンの図示は省略してある。音叉
型水晶片１と該水晶片１の支持部材であり外部と
の電気的導通をとるために一般に使用されるコバ
ール材より成る金属製リード端子８の接合は、鉛
より成る軟質金属厚膜７の溶融によつて行われ
る。その接合状態は第２図ロに詳しく示してあ
る。第２図ロの７ａ，７ｂは鉛より成る軟質金属
厚膜７が部分的に溶融している範囲を示してお
り、この場合、鉛より成る軟質金属厚膜７の部分
的溶融法は、図示しないが軟質金属厚膜７を一方
の電極としリード端子８を他方の電極としたスポ
ツト溶接を利用すれば非常に容易に出来る。他の
方法として、熱圧着法によりリード端子８にヒー
ターを押し当ててヒーターに電流を流すことによ
り発生する抵抗熱によつても接合は可能である
し、あるいはあらかじめ温度コントロールされた
適当な大きさのヒーターをリード端子８に押し当
てて、熱伝導により軟質金属厚膜７とリード端子
８が接触している付近を部分的に溶融させるので
ある。 The present invention eliminates the above-mentioned drawbacks and details its construction. Figures 2A, 2B, and 2C show the support structure of a tuning fork crystal resonator according to the present invention. The figure is a cross-sectional view of figure A, and figure C is a side view. 1 is a tuning fork-shaped crystal piece, 5 is a thin metal film for electrodes, and CrAu (chromium gold) is usually used, and the thickness is
It is 1000 to 2000 Å (angstrom). Reference numeral 6 denotes a soft metal thin film deposited on the electrode metal thin film 5. In the present invention, Sn (tin) is used and the thickness is 1000~
It is in the range of 100000 Å. 7 is a soft metal thin film 6
In the present invention, Pb (lead) is used and the thickness is in the range of 10 to 100 μm. In this case, the electrode metal thin film 6 made of gold, the soft metal thin film 6 made of tin, and the soft metal thin film 6
Regarding the adhesion of the soft metal thick film 7 made of lead and lead, it was experimentally confirmed that the adhesion strength was not insufficient even without reflow, since the films were sufficiently diffused into each other during vapor deposition. Note that the pattern of the electrode metal thin film 5 is not shown in FIG. The tuning-fork-shaped crystal piece 1 and the metal lead terminal 8 made of Kovar material, which is a supporting member of the crystal piece 1 and is generally used for establishing electrical continuity with the outside, are connected using a soft metal thick film 7 made of lead. This is done by melting. The bonded state is shown in detail in FIG. 2B. 7a and 7b in FIG. 2B show areas where the soft metal thick film 7 made of lead is partially melted. Although this is not possible, it can be done very easily by using spot welding with the soft metal thick film 7 as one electrode and the lead terminal 8 as the other electrode. As another method, it is possible to bond by using resistance heat generated by pressing a heater against the lead terminal 8 and passing an electric current through the heater using thermocompression bonding, or by bonding with an appropriate size whose temperature is controlled in advance. The heater is pressed against the lead terminal 8, and the area where the soft metal thick film 7 and the lead terminal 8 are in contact is partially melted by heat conduction.
本発明によれば、接着剤を使用していないため
脱ガスの心配もないし、電極用薄膜と軟質金属薄
膜との境界面付近までは溶融されないので、電極
用薄膜が金食われ現象を起すことも無い。即ち電
極用薄膜の厚さは水晶振動子の性能上最も好まし
い値に設定することが出来る。更に基部に金等高
価な金属を厚く付着させる場合よりも材料コスト
が安くて済む。又軟質金属の厚さの大部分はPb
（鉛）で占めているが、Pbの蒸気圧は非常に高い
ので厚い膜でも極めて短時間で形成できる。例え
ば100μの厚みでも10分ていどで達成できる。又
音叉型水晶片は、水晶薄板上に100ケ以上整列し
たままの状態で軟質金属の蒸着が出来るので１ケ
ずつの作業と比べて非常に少い加工工数で済む。 According to the present invention, since no adhesive is used, there is no need to worry about outgassing, and since the area near the interface between the electrode thin film and the soft metal thin film is not melted, the electrode thin film will not suffer from gold erosion. There is no. That is, the thickness of the electrode thin film can be set to the most preferable value in terms of the performance of the crystal resonator. Furthermore, the material cost is lower than when thickly depositing an expensive metal such as gold on the base. Also, most of the thickness of the soft metal is Pb.
However, since the vapor pressure of Pb is extremely high, even thick films can be formed in an extremely short time. For example, a thickness of 100μ can be achieved in just 10 minutes. In addition, since soft metal can be deposited on tuning fork-shaped crystal pieces while 100 or more pieces are aligned on a thin crystal plate, the number of processing steps is significantly less than when processing one piece at a time.
なお前述の実施例においては、軟質金属薄膜６
の材料として錫が用いられているが、電極用金属
薄膜５の材料および軟質金属厚膜７の材料に対し
て密着力を有するものであれば、他の材料の使用
も可能である。さらに軟質金属薄膜６の形成は必
ずしも必要ではなく、軟質金属厚膜７のみによつ
ても良好な支持構造が得られることは明らかであ
る。 Note that in the above embodiment, the soft metal thin film 6
Although tin is used as the material, other materials can also be used as long as they have adhesive strength to the material of the electrode metal thin film 5 and the material of the soft metal thick film 7. Furthermore, it is clear that the formation of the soft metal thin film 6 is not necessarily necessary, and that a good support structure can be obtained using only the soft metal thick film 7.
第１図は、従来の音叉型水晶振動子の斜視図、
第２図イ，ロ，ハは、本発明による音叉型水晶振
動子の支持構造を示す正面図、イ図のAA断面
図、側面図である。
１……音叉型水晶片、５……電極用金属薄膜、
６……軟質金属薄膜、７……軟質金属厚膜。
Figure 1 is a perspective view of a conventional tuning fork type crystal resonator.
FIGS. 2A, 2B, and 2C are a front view, a sectional view along AA of FIG. 1... Tuning fork type crystal piece, 5... Metal thin film for electrode,
6... Soft metal thin film, 7... Soft metal thick film.
Claims (1)
振動子を構成する音叉型水晶片の表面に少なくと
も貴金属を表面層とする電極用金属膜を形成し、
該電極用金属膜上に積層させて厚さ10〜100μmの
軟質金属膜を形成するとともに、該軟質金属膜の
溶融部が前記電極用金属膜に達しない程度に部分
加熱することによつて溶融される溶融接合によ
り、リード部材を前記音叉型水晶片に溶融固定し
たことを特徴とする音叉型水晶振動子の支持構
造。1. In a support structure for a tuning fork type crystal resonator, an electrode metal film having at least a noble metal as a surface layer is formed on the surface of a tuning fork type crystal piece constituting the resonator,
A soft metal film having a thickness of 10 to 100 μm is formed by laminating it on the electrode metal film, and is melted by partially heating the soft metal film to such an extent that the melted part does not reach the electrode metal film. 1. A support structure for a tuning fork type crystal resonator, characterized in that a lead member is melted and fixed to the tuning fork type crystal piece by melt bonding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4181579A JPS55134523A (en) | 1979-04-06 | 1979-04-06 | Support structure of tuning fork type crystal vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4181579A JPS55134523A (en) | 1979-04-06 | 1979-04-06 | Support structure of tuning fork type crystal vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55134523A JPS55134523A (en) | 1980-10-20 |
| JPS6325530B2 true JPS6325530B2 (en) | 1988-05-25 |
Family
ID=12618796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4181579A Granted JPS55134523A (en) | 1979-04-06 | 1979-04-06 | Support structure of tuning fork type crystal vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55134523A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0261919U (en) * | 1988-10-20 | 1990-05-09 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS554175A (en) * | 1978-06-27 | 1980-01-12 | Seiko Epson Corp | Holding method for crystal oscillating reed |
-
1979
- 1979-04-06 JP JP4181579A patent/JPS55134523A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS554175A (en) * | 1978-06-27 | 1980-01-12 | Seiko Epson Corp | Holding method for crystal oscillating reed |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0261919U (en) * | 1988-10-20 | 1990-05-09 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55134523A (en) | 1980-10-20 |
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