JPS63254740A - 半導体のオ−プナ−装置 - Google Patents

半導体のオ−プナ−装置

Info

Publication number
JPS63254740A
JPS63254740A JP8891687A JP8891687A JPS63254740A JP S63254740 A JPS63254740 A JP S63254740A JP 8891687 A JP8891687 A JP 8891687A JP 8891687 A JP8891687 A JP 8891687A JP S63254740 A JPS63254740 A JP S63254740A
Authority
JP
Japan
Prior art keywords
opening
chip
package
semiconductor
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8891687A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0458182B2 (US07223432-20070529-C00017.png
Inventor
Masatoshi Tsuchiya
正年 土屋
Mitsuharu Wakasugi
若杉 充治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamato Scientific Co Ltd
Original Assignee
Yamato Scientific Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamato Scientific Co Ltd filed Critical Yamato Scientific Co Ltd
Priority to JP8891687A priority Critical patent/JPS63254740A/ja
Publication of JPS63254740A publication Critical patent/JPS63254740A/ja
Publication of JPH0458182B2 publication Critical patent/JPH0458182B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
JP8891687A 1987-04-13 1987-04-13 半導体のオ−プナ−装置 Granted JPS63254740A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8891687A JPS63254740A (ja) 1987-04-13 1987-04-13 半導体のオ−プナ−装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8891687A JPS63254740A (ja) 1987-04-13 1987-04-13 半導体のオ−プナ−装置

Publications (2)

Publication Number Publication Date
JPS63254740A true JPS63254740A (ja) 1988-10-21
JPH0458182B2 JPH0458182B2 (US07223432-20070529-C00017.png) 1992-09-16

Family

ID=13956248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8891687A Granted JPS63254740A (ja) 1987-04-13 1987-04-13 半導体のオ−プナ−装置

Country Status (1)

Country Link
JP (1) JPS63254740A (US07223432-20070529-C00017.png)

Also Published As

Publication number Publication date
JPH0458182B2 (US07223432-20070529-C00017.png) 1992-09-16

Similar Documents

Publication Publication Date Title
KR100452542B1 (ko) 세정물 건조장치 및 건조방법
US4886012A (en) Spin coating apparatus
US20170018423A1 (en) Apparatus and Method for Processing the Surface of a Workpiece Comprised of Sensitive Materials with an Ozone and Carbon Dioxide Treating Fluid
JPS63254740A (ja) 半導体のオ−プナ−装置
JPS63254739A (ja) 半導体のオ−プナ−装置
JPH0439225B2 (US07223432-20070529-C00017.png)
JPH0543411B2 (US07223432-20070529-C00017.png)
JPH0128675Y2 (US07223432-20070529-C00017.png)
KR20080062221A (ko) 기판 처리 장치
JPH0770507B2 (ja) 半導体ウエハ用洗浄装置
JPH0417334A (ja) 基板のウェット処理装置
JPH0416430Y2 (US07223432-20070529-C00017.png)
US3674579A (en) Method of forming electrical conductors
JP2002158208A (ja) 半導体ウエハの表面処理方法
JPH0416429Y2 (US07223432-20070529-C00017.png)
JP3339375B2 (ja) レジスト剥離装置及びレジスト剥離方法
JPS637271B2 (US07223432-20070529-C00017.png)
JPS63247677A (ja) 樹脂封止型半導体装置の開封方法
JPS62275568A (ja) 噴流式はんだ付け装置
JPH04311043A (ja) 半導体集積回路素子の開封装置
JPH0872916A (ja) キャップ及びその製造方法
KR200161167Y1 (ko) 웨이퍼 습식처리장치
JPH0594978A (ja) 半導体基板浸漬処理槽
JP2000173905A (ja) 処理液供給装置
JP2588854B2 (ja) 現像装置