JPS6325277A - 窒化ケイ素焼結体の製造方法 - Google Patents
窒化ケイ素焼結体の製造方法Info
- Publication number
- JPS6325277A JPS6325277A JP61168599A JP16859986A JPS6325277A JP S6325277 A JPS6325277 A JP S6325277A JP 61168599 A JP61168599 A JP 61168599A JP 16859986 A JP16859986 A JP 16859986A JP S6325277 A JPS6325277 A JP S6325277A
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- oxide
- silicon
- silicon nitride
- nitriding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61168599A JPS6325277A (ja) | 1986-07-17 | 1986-07-17 | 窒化ケイ素焼結体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61168599A JPS6325277A (ja) | 1986-07-17 | 1986-07-17 | 窒化ケイ素焼結体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6325277A true JPS6325277A (ja) | 1988-02-02 |
| JPH0569791B2 JPH0569791B2 (enExample) | 1993-10-01 |
Family
ID=15871040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61168599A Granted JPS6325277A (ja) | 1986-07-17 | 1986-07-17 | 窒化ケイ素焼結体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6325277A (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5411114A (en) * | 1977-06-29 | 1979-01-27 | Ngk Insulators Ltd | Method of making siliconnnitride sintered body |
| JPS5860676A (ja) * | 1981-09-30 | 1983-04-11 | 日本特殊陶業株式会社 | 窒化珪素焼結体及びその製造方法 |
-
1986
- 1986-07-17 JP JP61168599A patent/JPS6325277A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5411114A (en) * | 1977-06-29 | 1979-01-27 | Ngk Insulators Ltd | Method of making siliconnnitride sintered body |
| JPS5860676A (ja) * | 1981-09-30 | 1983-04-11 | 日本特殊陶業株式会社 | 窒化珪素焼結体及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0569791B2 (enExample) | 1993-10-01 |
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