JPS6324737B2 - - Google Patents

Info

Publication number
JPS6324737B2
JPS6324737B2 JP22624884A JP22624884A JPS6324737B2 JP S6324737 B2 JPS6324737 B2 JP S6324737B2 JP 22624884 A JP22624884 A JP 22624884A JP 22624884 A JP22624884 A JP 22624884A JP S6324737 B2 JPS6324737 B2 JP S6324737B2
Authority
JP
Japan
Prior art keywords
shroud
vacuum chamber
titanium
cooling
cooling plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP22624884A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61103532A (ja
Inventor
Fude Ishimaru
Shojiro Komaki
Masao Myamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP22624884A priority Critical patent/JPS61103532A/ja
Publication of JPS61103532A publication Critical patent/JPS61103532A/ja
Publication of JPS6324737B2 publication Critical patent/JPS6324737B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP22624884A 1984-10-26 1984-10-26 真空チエンバ− Granted JPS61103532A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22624884A JPS61103532A (ja) 1984-10-26 1984-10-26 真空チエンバ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22624884A JPS61103532A (ja) 1984-10-26 1984-10-26 真空チエンバ−

Publications (2)

Publication Number Publication Date
JPS61103532A JPS61103532A (ja) 1986-05-22
JPS6324737B2 true JPS6324737B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-05-23

Family

ID=16842212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22624884A Granted JPS61103532A (ja) 1984-10-26 1984-10-26 真空チエンバ−

Country Status (1)

Country Link
JP (1) JPS61103532A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61120629A (ja) * 1984-11-19 1986-06-07 Seiko Instr & Electronics Ltd 脱着可能な真空用冷却トラツプ
JPS63264131A (ja) * 1987-04-21 1988-11-01 Showa Alum Corp 真空チヤンバ
JPS63270536A (ja) * 1987-04-30 1988-11-08 Showa Alum Corp 真空チヤンバの製造方法

Also Published As

Publication number Publication date
JPS61103532A (ja) 1986-05-22

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