JPS63232953A - 研磨工具 - Google Patents

研磨工具

Info

Publication number
JPS63232953A
JPS63232953A JP6480787A JP6480787A JPS63232953A JP S63232953 A JPS63232953 A JP S63232953A JP 6480787 A JP6480787 A JP 6480787A JP 6480787 A JP6480787 A JP 6480787A JP S63232953 A JPS63232953 A JP S63232953A
Authority
JP
Japan
Prior art keywords
polishing
abrasive
holder
elastic support
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6480787A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0549428B2 (enrdf_load_stackoverflow
Inventor
Matsuo Muneda
宗田　松夫
Takehiro Kawai
川井　武洋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP6480787A priority Critical patent/JPS63232953A/ja
Publication of JPS63232953A publication Critical patent/JPS63232953A/ja
Publication of JPH0549428B2 publication Critical patent/JPH0549428B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
JP6480787A 1987-03-19 1987-03-19 研磨工具 Granted JPS63232953A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6480787A JPS63232953A (ja) 1987-03-19 1987-03-19 研磨工具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6480787A JPS63232953A (ja) 1987-03-19 1987-03-19 研磨工具

Publications (2)

Publication Number Publication Date
JPS63232953A true JPS63232953A (ja) 1988-09-28
JPH0549428B2 JPH0549428B2 (enrdf_load_stackoverflow) 1993-07-26

Family

ID=13268883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6480787A Granted JPS63232953A (ja) 1987-03-19 1987-03-19 研磨工具

Country Status (1)

Country Link
JP (1) JPS63232953A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04111766A (ja) * 1990-08-31 1992-04-13 Canon Inc 研磨工具
US5766058A (en) * 1995-02-10 1998-06-16 Advanced Micro Devices, Inc. Chemical-mechanical polishing using curved carriers
WO2013130290A1 (en) * 2012-02-28 2013-09-06 United Technologies Corporation Component blending tool assembly

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4842494A (enrdf_load_stackoverflow) * 1971-10-02 1973-06-20
JPS5646952A (en) * 1979-09-26 1981-04-28 Hitachi Ltd Dehumidifier*air conditioner

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4842494A (enrdf_load_stackoverflow) * 1971-10-02 1973-06-20
JPS5646952A (en) * 1979-09-26 1981-04-28 Hitachi Ltd Dehumidifier*air conditioner

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04111766A (ja) * 1990-08-31 1992-04-13 Canon Inc 研磨工具
US5766058A (en) * 1995-02-10 1998-06-16 Advanced Micro Devices, Inc. Chemical-mechanical polishing using curved carriers
WO2013130290A1 (en) * 2012-02-28 2013-09-06 United Technologies Corporation Component blending tool assembly

Also Published As

Publication number Publication date
JPH0549428B2 (enrdf_load_stackoverflow) 1993-07-26

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