JPS63229571A - ２次元パタ−ン検査装置 - Google Patents

２次元パタ−ン検査装置

Info

Publication number
JPS63229571A
JPS63229571A JP62062469A JP6246987A JPS63229571A JP S63229571 A JPS63229571 A JP S63229571A JP 62062469 A JP62062469 A JP 62062469A JP 6246987 A JP6246987 A JP 6246987A JP S63229571 A JPS63229571 A JP S63229571A
Authority
JP
Japan
Prior art keywords
length measurement
measurement value
length
pattern
radial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62062469A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0552988B2 (OSRAM
Inventor
Sadao Takano
鷹野　定郎
Satoshi Iwata
敏 岩田
Moritoshi Ando
護俊 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62062469A priority Critical patent/JPS63229571A/ja
Publication of JPS63229571A publication Critical patent/JPS63229571A/ja
Publication of JPH0552988B2 publication Critical patent/JPH0552988B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP62062469A 1987-03-19 1987-03-19 ２次元パタ−ン検査装置 Granted JPS63229571A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62062469A JPS63229571A (ja) 1987-03-19 1987-03-19 ２次元パタ−ン検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62062469A JPS63229571A (ja) 1987-03-19 1987-03-19 ２次元パタ−ン検査装置

Publications (2)

Publication Number Publication Date
JPS63229571A true JPS63229571A (ja) 1988-09-26
JPH0552988B2 JPH0552988B2 (OSRAM) 1993-08-06

Family

ID=13201091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62062469A Granted JPS63229571A (ja) 1987-03-19 1987-03-19 ２次元パタ−ン検査装置

Country Status (1)

Country Link
JP (1) JPS63229571A (OSRAM)

Also Published As

Publication number Publication date
JPH0552988B2 (OSRAM) 1993-08-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term