JPS6322743B2 - - Google Patents

Info

Publication number
JPS6322743B2
JPS6322743B2 JP20322482A JP20322482A JPS6322743B2 JP S6322743 B2 JPS6322743 B2 JP S6322743B2 JP 20322482 A JP20322482 A JP 20322482A JP 20322482 A JP20322482 A JP 20322482A JP S6322743 B2 JPS6322743 B2 JP S6322743B2
Authority
JP
Japan
Prior art keywords
signal
satellite
station
transmission power
earth station
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20322482A
Other languages
Japanese (ja)
Other versions
JPS5992635A (en
Inventor
Kazuo Yano
Katsushi Yoshihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP20322482A priority Critical patent/JPS5992635A/en
Publication of JPS5992635A publication Critical patent/JPS5992635A/en
Publication of JPS6322743B2 publication Critical patent/JPS6322743B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04WWIRELESS COMMUNICATION NETWORKS
    • H04W52/00Power management, e.g. TPC [Transmission Power Control], power saving or power classes
    • H04W52/04TPC

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Signal Processing (AREA)
  • Cable Transmission Systems, Equalization Of Radio And Reduction Of Echo (AREA)
  • Transmitters (AREA)
  • Radio Relay Systems (AREA)

Description

【発明の詳細な説明】 〔発明の属する技術分野〕 本発明は、衛星通信地球局の送信電力制御装置
に関し、特に、衛星出力の実効等方放射電力を一
定にする制御手段を備えた特定地球局と同一の通
信網に組込まれ、この特定地球局以外の地球局に
適用される送信電力制御装置に関するものであ
る。
[Detailed description of the invention] [Technical field to which the invention pertains] The present invention relates to a transmission power control device for a satellite communications earth station, and in particular, to a transmission power control device for a satellite communication earth station, and in particular, to This invention relates to a transmission power control device that is incorporated into the same communication network as a station and is applied to earth stations other than this specific earth station.

〔従来技術の説明〕[Description of prior art]

衛星通信、特に準ミリ波帯等の高い周波数の用
いる衛星通信では降雨による電波の減衰が大き
く、それに対する適当な対策が必要である。衛星
から地球局へ向うダウンリンクに対する対策とし
ては、地球局受信装置に減衰を補うだけのマージ
ンを持たせるか、あるいはサイトダイバーシテイ
方式を用いて降雨による影響を除去するなどの方
法が適切である。一方、地球局から衛星に向うア
ツプリンクに対しては、サイトダイバーシテイ方
式をとる場合は別として、降雨減衰に対してあら
かじめ定めた特定のマージンを持つ送信電力を用
いることは、晴天時に衛星の送信電力をその分だ
け不必要に消費することとなり、衛星送信電力の
有効利用の観点から非常に不利である。そこで、
アツプリンクの降雨減衰に応じて地球局からの送
信電力を制御する方式が考えられ、これを一般に
地球局の送信電力制御方式と呼んでいる。
In satellite communications, particularly in satellite communications that use high frequencies such as sub-millimeter wave bands, radio waves are attenuated significantly by rainfall, and appropriate countermeasures are required to deal with this. Appropriate countermeasures for downlinks from satellites to earth stations include providing the earth station receiving equipment with a margin to compensate for attenuation, or using a site diversity method to eliminate the effects of rain. . On the other hand, for the uplink from the earth station to the satellite, apart from using the site diversity method, it is not possible to use a transmission power with a certain predetermined margin against rain attenuation. This results in unnecessary consumption of transmission power, which is very disadvantageous from the viewpoint of effective use of satellite transmission power. Therefore,
A method of controlling the transmission power from the earth station according to the rainfall attenuation of the uplink has been considered, and this is generally called the earth station transmission power control method.

この送信電力制御方式では、複数の地球局のう
ちの少なくとも一つの特定地球局が、通信用周波
数帯域内のパイロツト信号や通信用信号の衛星に
おける実効等方放射電力(EIRP)を降雨減衰に
かかわらず一定とする制御手段を備えている。
(参考文献参照)。
In this transmission power control method, at least one specific earth station among a plurality of earth stations controls the effective isotropically radiated power (EIRP) of the pilot signal or communication signal within the communication frequency band on the satellite, regardless of rainfall attenuation. A control means is provided to keep the temperature constant.
(See references).

従来、この方式に関しては、 衛星の実効等方放射電力が一定となるように
制御されたパイロツト信号または通信用信号を
受信し、この信号のレベル変動または搬送波対
雑音電力比(以下「C/N比」という。)の変
動から、アツプリンクの降雨減衰を推定換算し
てこれを補償するように送信電力を制御する方
式(参考文献参照)。
Conventionally, with this method, a pilot signal or communication signal that is controlled so that the effective isotropic radiation power of the satellite is constant is received, and the level fluctuation of this signal or the carrier-to-noise power ratio (hereinafter referred to as "C/N A method of controlling transmission power to compensate for the uplink rain attenuation by estimating the uplink rain attenuation based on fluctuations in the ratio (referred to as "ratio") (see references).

自局から送信し衛星で折り返された通信用信
号のうちの一つまたは通信用回線に送出された
試験用信号と、前記衛星において一定となるよ
うに制御されたパイロツト信号または通信用信
号とを受信し、両者のレベルまたはC/N比を
比較して前記地球局の送信電力を制御する方式
(参考文献参照)。
One of the communication signals transmitted from the own station and returned by the satellite or the test signal sent to the communication line, and the pilot signal or communication signal controlled to be constant at the satellite. A method of controlling the transmission power of the earth station by comparing the levels or C/N ratios of the earth stations (see references).

等が、提案されている。etc. have been proposed.

上記の方法の場合には、設備規模が簡単とな
る反面、自局の地球局送信系や衛星中継器での利
得変動を検出する手段を全く備えていないため、
基準受信信号の変動から送信系の利得変動を推定
制御するのみでは、衛星でのEIRPが一定になつ
ている保証がなく、また確認することもできない
欠点がある。
In the case of the above method, although the scale of the equipment is simple, it does not have any means to detect gain fluctuations in the own earth station transmission system or satellite repeater.
Simply estimating and controlling the gain fluctuations of the transmission system from fluctuations in the reference received signal has the disadvantage that there is no guarantee that the EIRP on the satellite is constant, and it cannot be confirmed.

一方、上記の方法の場合には、制御精度とし
ては満足できる程度であるが、各局が自局折返し
の信号を常時必要とし、衛星での使用電力が多く
なつたり、地球局での設備が大きくなる等の欠点
がある。
On the other hand, in the case of the above method, although the control accuracy is satisfactory, each station constantly needs a return signal to its own station, which increases the power consumption of the satellite and requires large equipment at the earth station. There are drawbacks such as:

〔発明の目的〕[Purpose of the invention]

本発明は前述した従来技術の欠点を解決したも
のであり、衛星での消費電力を増大させることな
く十分な制御精度を得れるようにした、実用的な
意味で有効な衛星通信地球局の送信電力制御装置
を提供することを目的とする。
The present invention solves the above-mentioned drawbacks of the prior art, and provides a practically effective satellite communication earth station transmission system that allows sufficient control accuracy to be obtained without increasing the power consumption of the satellite. The purpose of the present invention is to provide a power control device.

〔発明の要点〕[Key points of the invention]

特定地球局を含む複数の地球局が衛星を介して
通信を行い、上記特定地球局には通信用周波数帯
域内のパイロツト信号または通信用信号の少なく
とも一方の上記衛星における実効等方放射電力を
降雨減衰にかかわらず一定にする制御手段を備え
た衛星通信地球局において、上記特定地球局を除
く全部または一部の地球局には、上記衛星での実
効等方放射電力が一定となるように制御されたパ
イロツト信号または通信用信号を受信し、その信
号のレベル変動または搬送波対雑音電力比の変動
を検出する第1検出手段と、自局から送信された
信号の衛星折返し信号を受信・検出する第2検出
手段と、制御モードを適当な時間間隔で推定モー
ドと較正モードとに切り替える切替え手段とを備
え、上記制御モードの場合には上記第1、第2検
出手段のレベルまたは搬送波対雑音電力比を比較
して上記地球局の送信電力を制御し、上記推定モ
ードの場合には上記信号のうちの特定地球局から
送信されている方の信号のレベル変動または搬送
波対雑音電力比の変動からアツプリンクの降雨減
衰を推定換算して上記地球局の送信電力を制御で
きるように構成されたことを特徴とする。
A plurality of earth stations including a specific earth station communicate via a satellite, and the specific earth station receives effective isotropic radiated power from the satellite, which is at least one of a pilot signal or a communication signal within the communication frequency band. In a satellite communication earth station equipped with a control means to keep it constant regardless of attenuation, all or some of the earth stations except the above-mentioned specified earth station are controlled so that the effective isotropically radiated power at the above-mentioned satellite is constant. a first detecting means for receiving a pilot signal or a communication signal transmitted from the station and detecting a level variation of the signal or a variation in a carrier-to-noise power ratio; and a first detecting means for receiving and detecting a satellite return signal of the signal transmitted from the own station. a second detection means, and a switching means for switching the control mode between an estimation mode and a calibration mode at appropriate time intervals; in the case of the control mode, the level or the carrier-to-noise power of the first and second detection means; The transmission power of the earth station is controlled by comparing the ratio, and in the case of the estimation mode, the transmission power of the earth station is controlled based on the level fluctuation of the signal transmitted from the specific earth station among the signals or the fluctuation of the carrier-to-noise power ratio. The present invention is characterized in that the transmission power of the earth station can be controlled by estimating and converting uplink rain attenuation.

なお、較正モードへの切替えは、実用上、1日
数回程度で十分である。較正モードの時間は較正
に必要な時間であり、1分以内で十分である。
Note that, in practice, it is sufficient to switch to the calibration mode several times a day. The calibration mode time is the time required for calibration, and one minute or less is sufficient.

〔実施例による説明〕[Explanation based on examples]

以下、本発明を図面に基づいて説明する。 Hereinafter, the present invention will be explained based on the drawings.

図は本発明実施例装置のブロツク構成図であ
り、シングル・チヤネル・パー・キヤリア
(SCPC)方式を用いた場合を示している。
The figure is a block diagram of an apparatus according to an embodiment of the present invention, and shows a case where a single channel per carrier (SCPC) system is used.

図において、受信系は、送受共用の空中線1、
低雑音増幅器10、高周波の受信信号を中間周波
数に変換する受信周波数変換器11、この変換器
11の出力を増幅しAGC(自動利得制御)動作を
する中間周波増幅器12、そこで共通増幅された
信号を電力分配する分配器13、およびこの分配
器13の出力に接続されパイロツト信号を検出し
てAFC(自動周波数制御)信号、AGC信号および
TPC(送信電力制御)用の信号を出力するパイロ
ツト受信器14、同じく分配器13に接続され相
手局からの通信用信号を受信復調してチヤネル受
信出力(RX OUT)を送出する受信チヤネルユ
ニツト群151〜15nを含み構成される。
In the figure, the receiving system includes an antenna 1 for both transmitting and receiving;
A low noise amplifier 10, a reception frequency converter 11 that converts a high frequency reception signal to an intermediate frequency, an intermediate frequency amplifier 12 that amplifies the output of this converter 11 and performs AGC (automatic gain control) operation, and a common amplified signal therein. A divider 13 is connected to the output of the divider 13 to detect the pilot signal and output the AFC (automatic frequency control) signal, AGC signal and
A pilot receiver 14 that outputs a signal for TPC (transmission power control), and a group of receiving channel units that are also connected to the distributor 13 and that receive and demodulate communication signals from the other station and send out channel reception outputs (RX OUT). 15 1 to 15 n .

一方送信系は、チヤネル送信入力(TX IN)
を変調し、各チヤネル周波数に対応した中間周波
信号を発生する送信チヤネルユニツト群201
20n、これらユニツト群201〜20mの出力を
電力合成する合成器22、制御信号により利得が
制御される送信用中間周波増幅器23、増幅され
た中間周波数信号を送信用の高周波信号に変換す
る送信周波数変換器24、およびこの変換器24
の出力を必要な送信電力にまで増幅する送信電力
増幅器25を含み構成され、これら受信系と送信
系とで主な伝送路を構成している。
On the other hand, for the transmission system, the channel transmission input (TX IN)
A transmission channel unit group 20 1 to
20 n , a combiner 22 that combines the power of the outputs of these unit groups 20 1 to 20 m, a transmission intermediate frequency amplifier 23 whose gain is controlled by a control signal, and a transmitting intermediate frequency amplifier 23 that converts the amplified intermediate frequency signal into a high frequency signal for transmission. a transmitting frequency converter 24 and this converter 24;
The receiving system and the transmitting system constitute a main transmission path.

さらに送信電力制御系は、パイロツト受信器1
4の出力レベルもしくはC/N比を検出する検出
器30と、受信チヤネルユニツト群151〜15n
のうちの一つのユニツトのモニター点(チヤネル
帯域幅に帯域制限された復調器直前の点を指す)
から得られた信号の出力レベルもしくはC/N比
を検出する検出器31との二つの検出器を備え、
検出器31の出力を外部制御信号により通過もし
くは保持状態に切り替える保持器32、さらに検
出器30,31の検波出力の差分を取り出す比較
器33、その比較器33の出力を中間周波増幅器
23の制御信号として適当となるように信号処理
を行う送信電力制御用のTPC制御器34、およ
び制御モードの切替え等を行う論理器35により
構成される。
Furthermore, the transmission power control system is controlled by the pilot receiver 1.
a detector 30 for detecting the output level or C/N ratio of 4, and a group of receiving channel units 15 1 to 15 n
Monitor point of one of the units (refers to the point just before the demodulator that is band-limited to the channel bandwidth)
and a detector 31 for detecting the output level or C/N ratio of the signal obtained from the
A holder 32 that switches the output of the detector 31 to pass or hold state by an external control signal, a comparator 33 that extracts the difference between the detected outputs of the detectors 30 and 31, and an intermediate frequency amplifier 23 that controls the output of the comparator 33. It is comprised of a TPC controller 34 for controlling transmission power that performs signal processing so that the signal is appropriate, and a logic device 35 that performs switching of control modes and the like.

次に制御動作について説明する。本方式の制御
モードには推定モードと較正モードの二つがあ
る。推定モードの場合には、論理器35の制御に
よつて、保持器32が保持状態となり、検出器3
1の信号が切り離されるため、検出器30の信号
のみが比較器33とTPC制御器34を経由する
こととなり、動作としては受信信号の情報から送
信利得を制御する推定制御を行う。しかしこの場
合には、従来技術で述べたように制御誤差の精度
に問題があるため、あまり長期にわたつて推定モ
ードで制御することは好ましくない。そこで、適
当な時間間隔で制御モードを推定モードから較正
モードに切り替える。この較正モードでは論理器
35があらかじめ設定された適当な時間間隔で送
信チヤネル・ユニツト群201〜20nの一つのユ
ニツト制御して搬送波を送出するようにするとと
もに、保持器32を通過状態に制御することによ
り、先の送出された搬送波に同調されている受信
チヤネルユニツトの出力が検出器31と保持器3
2とを経由して比較器33に入力される。この状
態では、衛星出力のEIEPが一定に制御されたパ
イロツト信号を基準とした閉ループ制御の動作と
なるため、地球局送信系の利得変動等で生じる誤
差を十分な制御精度で補償できることになる。そ
の後再び制御モードを推定モードに戻すようにす
る。二つのモード切替えは手動操作によつてもあ
るいはタイマによる自動制御によつてもよい。そ
の周期は、通信の影響のない範囲で、かつ装置の
性能に照らして定められる。較正モードの場合に
は送信、受信ともに通信用信号に使われるチヤネ
ル・ユニツトを使用することができ、またその較
正モードの間隔としては1日当り数回程度、1回
当りの時間は1分以下で十分と考えられるため、
地球局設備や衛星での電力使用に対する影響はほ
とんど無視できる程度に小さい。
Next, the control operation will be explained. There are two control modes in this method: estimation mode and calibration mode. In the estimation mode, the holder 32 enters the holding state under the control of the logic unit 35, and the detector 3
Since the signal of 1 is separated, only the signal of the detector 30 passes through the comparator 33 and the TPC controller 34, and the operation is to perform estimation control to control the transmission gain from the information of the received signal. However, in this case, as described in the prior art, there is a problem with the accuracy of the control error, so it is not preferable to control in the estimation mode for too long. Therefore, the control mode is switched from estimation mode to calibration mode at appropriate time intervals. In this calibration mode, the logic unit 35 controls one of the transmission channel units 20 1 to 20 n at preset appropriate time intervals to transmit a carrier wave, and also puts the holder 32 in the passing state. By controlling the output of the receiving channel unit tuned to the previously transmitted carrier wave, the output of the receiving channel unit is transmitted to the detector 31 and the holder 3.
The signal is input to the comparator 33 via 2 and 2. In this state, the EIEP of the satellite output is controlled to be constant and the closed-loop control operation is based on the pilot signal, so errors caused by gain fluctuations in the earth station transmission system can be compensated with sufficient control accuracy. Thereafter, the control mode is returned to the estimation mode. Switching between the two modes may be performed manually or automatically controlled by a timer. The period is determined within a range that does not affect communication and in light of the performance of the device. In the case of calibration mode, the channel unit used for communication signals can be used for both transmission and reception, and the interval of calibration mode is several times a day, and the time per time is less than 1 minute. Since it is considered sufficient,
The impact on power usage by earth station equipment and satellites is almost negligible.

以上の説明は、各チヤネルの周波数があらかじ
め定まつているプリ・アサインの場合について行
つたが、デマンド・アサインのシステムの場合に
は、デマンド・アサイメント・マルチプル・アク
セス(DAMA)装置に論理器35の機能を組み
込むことにより、較正モードの場合に通常の呼処
理と同様に任意の周波数を指定したり、あるいは
システムに参加している全地球局が特定周波数を
共有して時分割に較正モードを処理するように制
御することも可能であり、これによつて本方式の
有効性がさらに高められる。
The above explanation was based on the case of pre-assignment in which the frequency of each channel is predetermined, but in the case of a demand-assignment system, a logic circuit is used in the demand-assignment multiple access (DAMA) device. By incorporating 35 functions, you can specify any frequency in the calibration mode as in normal call processing, or all the earth stations participating in the system can share a specific frequency and perform the calibration mode in a time-sharing manner. It is also possible to control the process to process the data, thereby further increasing the effectiveness of the present method.

また較正モード時に通信用信号の送・受信チヤ
ネル・ユニツトの代わりに専用の搬送波発生器や
受信器を用意して制御を行い、通常の呼処理に対
して何らの影響がないように構成しても、以上の
説明と本質的に変わりがないことは明らかであ
る。
In addition, in the calibration mode, a dedicated carrier wave generator and receiver are prepared and controlled in place of the communication signal transmission/reception channel unit, and the configuration is configured so that there is no effect on normal call processing. It is clear that this is essentially the same as the above explanation.

〔発明の効果〕〔Effect of the invention〕

以上述べたように、本発明は、推定モードと較
正モードとを適当な周期で繰り返して送信電力制
御を行うものであるから、簡単な設備の追加で衛
星での消費電力の増大を招くことなく十分な制御
精度を得ることができ、実用上の効果が極めて大
きい。
As described above, the present invention performs transmission power control by repeating the estimation mode and the calibration mode at appropriate intervals, so it can be done without increasing the power consumption of the satellite by adding simple equipment. Sufficient control accuracy can be obtained, and the practical effect is extremely large.

【図面の簡単な説明】[Brief explanation of drawings]

図は本発明の実施例装置のブロツク構成図。 1……空中線、10……低雑音増幅器、11…
…受信周波数変換器、12……中間周波増幅器、
13……分配器、14……パイロツト受信器、1
1〜15n……受信チヤネル・ユニツト群、20
〜20n……送信チヤネル・ユニツト群、22…
…合成器、23……中間周波増幅器、24……送
信周波数変換器、25……送信電力増幅器。
The figure is a block diagram of a device according to an embodiment of the present invention. 1...Antenna, 10...Low noise amplifier, 11...
...Receiving frequency converter, 12...Intermediate frequency amplifier,
13...Distributor, 14...Pilot receiver, 1
5 1 to 15 n ...Reception channel unit group, 20
1 to 20 n ...Transmission channel unit group, 22...
...Synthesizer, 23...Intermediate frequency amplifier, 24...Transmission frequency converter, 25...Transmission power amplifier.

Claims (1)

【特許請求の範囲】 1 特定地球局を含む複数の地球局が衛星を介し
て通信を行い、上記特定地球局には上記衛星の送
信信号の実効等方放射電力を降雨減衰にかかわら
ず一定とする制御手段を備えた衛星通信方式の地
球局において、 上記特定地球局を除く地球局には、 上記実効等方放射電力が一定に制御された衛星
からの送信信号を受信してその信号のレベルまた
は搬送波対雑音比を検出する第1検出手段と、 自局から送信された信号の衛星折返し信号を受
信しその信号のレベルまたは搬送波対雑音電力比
を検出する第2検出手段と、 制御モードを適当な時間間隔で較正モードと推
定モードとに切り替える切替え手段と、 上記較正モード時には上記第1検出手段と第2
検出手段との出力を比較してその比較結果により
自局の送信電力を制御する手段と、 上記推定モード時には上記第1検出手段により
検出されたレベルまたは搬送波対雑音電力比の変
動からアツプリンクの降雨減衰を推定換算して自
局の送信電力を制御する手段と を備えたことを特徴とする衛星通信地球局の送
信電力制御装置。
[Scope of Claims] 1. A plurality of earth stations including a specific earth station communicate via a satellite, and the specific earth station is provided with an effective isotropic radiation power of the transmitted signal of the satellite that is constant regardless of rainfall attenuation. In a satellite communication earth station equipped with a control means to or a first detection means for detecting the carrier-to-noise ratio; a second detection means for receiving the satellite return signal of the signal transmitted from the own station and detecting the level or carrier-to-noise power ratio of the signal; and a control mode. switching means for switching between the calibration mode and the estimation mode at appropriate time intervals; and in the calibration mode, the first detection means and the second detection means
means for comparing the output with the detection means and controlling the transmission power of the own station based on the comparison result; and a means for controlling the transmission power of the own station based on the comparison result; A transmission power control device for a satellite communication earth station, comprising means for controlling the transmission power of its own station by estimating rainfall attenuation.
JP20322482A 1982-11-18 1982-11-18 Transmit electric power controller of satellite communication earth station Granted JPS5992635A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20322482A JPS5992635A (en) 1982-11-18 1982-11-18 Transmit electric power controller of satellite communication earth station

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20322482A JPS5992635A (en) 1982-11-18 1982-11-18 Transmit electric power controller of satellite communication earth station

Publications (2)

Publication Number Publication Date
JPS5992635A JPS5992635A (en) 1984-05-28
JPS6322743B2 true JPS6322743B2 (en) 1988-05-13

Family

ID=16470506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20322482A Granted JPS5992635A (en) 1982-11-18 1982-11-18 Transmit electric power controller of satellite communication earth station

Country Status (1)

Country Link
JP (1) JPS5992635A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02130943A (en) * 1988-11-11 1990-05-18 Tel Sagami Ltd Accommodation jig
JPH0332787A (en) * 1989-06-29 1991-02-13 Ibiden Co Ltd Device for cleaning and removing microparticle

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4842883B2 (en) * 2007-04-26 2011-12-21 三菱電機株式会社 Mobile satellite communication system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02130943A (en) * 1988-11-11 1990-05-18 Tel Sagami Ltd Accommodation jig
JPH0332787A (en) * 1989-06-29 1991-02-13 Ibiden Co Ltd Device for cleaning and removing microparticle

Also Published As

Publication number Publication date
JPS5992635A (en) 1984-05-28

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