JPS6322732U - - Google Patents
Info
- Publication number
- JPS6322732U JPS6322732U JP11629986U JP11629986U JPS6322732U JP S6322732 U JPS6322732 U JP S6322732U JP 11629986 U JP11629986 U JP 11629986U JP 11629986 U JP11629986 U JP 11629986U JP S6322732 U JPS6322732 U JP S6322732U
- Authority
- JP
- Japan
- Prior art keywords
- container
- end opening
- opening
- semiconductor wafers
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000011084 recovery Methods 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000011295 pitch Substances 0.000 claims 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11629986U JPH0128677Y2 (no) | 1986-07-29 | 1986-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11629986U JPH0128677Y2 (no) | 1986-07-29 | 1986-07-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6322732U true JPS6322732U (no) | 1988-02-15 |
| JPH0128677Y2 JPH0128677Y2 (no) | 1989-08-31 |
Family
ID=31000758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11629986U Expired JPH0128677Y2 (no) | 1986-07-29 | 1986-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0128677Y2 (no) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013051267A (ja) * | 2011-08-30 | 2013-03-14 | Dainippon Screen Mfg Co Ltd | 槽キャリア及び基板処理装置 |
-
1986
- 1986-07-29 JP JP11629986U patent/JPH0128677Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013051267A (ja) * | 2011-08-30 | 2013-03-14 | Dainippon Screen Mfg Co Ltd | 槽キャリア及び基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0128677Y2 (no) | 1989-08-31 |
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