JPS63227199A - Piezoelectric sounding body - Google Patents

Piezoelectric sounding body

Info

Publication number
JPS63227199A
JPS63227199A JP6174087A JP6174087A JPS63227199A JP S63227199 A JPS63227199 A JP S63227199A JP 6174087 A JP6174087 A JP 6174087A JP 6174087 A JP6174087 A JP 6174087A JP S63227199 A JPS63227199 A JP S63227199A
Authority
JP
Japan
Prior art keywords
piezoelectric
sounding body
diaphragm
fixed
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6174087A
Other languages
Japanese (ja)
Inventor
Teruyuki Ikeda
輝幸 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP6174087A priority Critical patent/JPS63227199A/en
Publication of JPS63227199A publication Critical patent/JPS63227199A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a sounding body high in sound pressure level by disposing a recessed part on the boundary of the fixed support part and the free part of the piezoelectric bimorph type sounding body or a free part adjacent thereto according to a dislocated boring and laminating. CONSTITUTION:Electrodes 13, 14 are respectively drawn to separate three directions on piezoelectric material green sheets 11, 12. A hole with diameter d=2Rpi/division number-gap (g) is opened on the position of a radius R on which a peripheral fixed body 15 is formed with 1/2P dislocated between the sheets 11, 12. On two upper and lower parts, the green sheet 21 having the hole with radius R is formed, laminated, temporarily fixed, a peeling film 31, a spacer 32 are laminated, pressed, integrated with the peripheral fixed body 15 to form the piezoelectric sounding body through removal of binder and burning. According to this constitution, the thickness of the sheet at the boundary part of a diaphragm part and the fixed body part is thinned substantially to one layer, the displacement in the diaphragm is large and the sounding body high in the sound pressure level is obtained.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は圧電発音体、特に圧電ブザーや圧電スピーカー
として利用される圧電発音体に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a piezoelectric sounding body, particularly to a piezoelectric sounding body used as a piezoelectric buzzer or a piezoelectric speaker.

〔従来の技術〕[Conventional technology]

両面に電極を形成した2枚の圧電材料を貼り合わせて得
る圧電発音体は、分極方向に対して互いに逆となるよう
に電極を接続することで、この電極間に交流電圧を印加
すると貼り合わせたそれぞれの圧電材料が互いに逆に伸
び縮みを生じるため貼り合わせ面を中心にして上下方向
へ交互に反りを生じる。このため外周部を固定した円形
状とすれば、この反りによって中心部が上下に変位し、
加えた交流信号の周波数で振動する振動子となるもので
、数kHzの信号を加えれば、この振動が空気の疎密波
を作り出して音を生じる発音体となるものである。
A piezoelectric sounding body is obtained by bonding two pieces of piezoelectric material with electrodes formed on both sides.By connecting the electrodes so that they are opposite to each other with respect to the polarization direction, when an alternating current voltage is applied between the electrodes, the piezoelectric sounding body is bonded together. Since each of the piezoelectric materials expands and contracts oppositely to each other, warping occurs alternately in the vertical direction centering on the bonded surface. For this reason, if the outer periphery is fixed in a circular shape, the center will be displaced up and down due to this warp.
It becomes a vibrator that vibrates at the frequency of the applied alternating current signal, and when a signal of several kHz is applied, this vibration creates air compression waves and becomes a sounding body that produces sound.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上述したような発音体は中心部の変位量が多ければ生じ
る音も大きなものとなり中心部の変位の大きな構造が望
まれる。ところが、圧電材料がセラミックス焼結体であ
る場合には、その素材自体にフレキシビリティ−が無い
ため、周辺が固定されると中心部の動きも押えられてし
まう。この結果、全体をセラミックスで形成した周辺固
定のバイモルフ圧電発音体は音圧レベルの小さな発音体
としかならない。第4図は従来の圧電発音体の一例を示
すバイモルフ型の発音体の一部切欠き斜視図である。第
4図に示すように、圧電発音体は金属板41を中心にし
、その両面に圧電材42及び43を貼り付け、この電極
44の相互間を分極に対して互いに逆となるように接続
したものである。
In the above-described sounding body, if the amount of displacement of the center portion is large, the sound produced will be louder, so a structure with a large displacement of the center portion is desired. However, when the piezoelectric material is a ceramic sintered body, the material itself has no flexibility, so if the periphery is fixed, the movement of the center is also suppressed. As a result, a bimorph piezoelectric sounding element whose entire structure is made of ceramics and whose periphery is fixed becomes a sounding element with a low sound pressure level. FIG. 4 is a partially cutaway perspective view of a bimorph type sounding body, which is an example of a conventional piezoelectric sounding body. As shown in FIG. 4, the piezoelectric sounding body has a metal plate 41 at its center, piezoelectric materials 42 and 43 are pasted on both sides of the metal plate 41, and electrodes 44 are connected to each other so as to be opposite to each other with respect to polarization. It is something.

このようにして金属板41に貼り付けることによって、
この金属板41の部分が周辺固定部分の支持体45との
フレキシビリティ−を確保するため、圧電材42の部分
で生じた反りが全体を変位させるため、これが振動とな
って効率良く音を生じるしかし、このような金属板に貼
り付けた発音体は金属板に圧電材を貼り付ける工程と、
電極を接続する工程とが必要であり、さらに金属板の上
下に位置を完全に合わせて接着しなければならないから
、この位置合わせの工程が容易ではなくコスト増大とな
ってしまう欠点がある、 本発明の目的は、これら従来の欠点を除去せしめて、一
本焼成できる簡単な方法で、がっ、効率の良い圧電発音
体を提供することにある。
By pasting it on the metal plate 41 in this way,
In order to ensure the flexibility of this metal plate 41 part with the support body 45 of the peripheral fixed part, the warpage that occurs in the piezoelectric material 42 part displaces the whole, which becomes vibration and efficiently generates sound. However, such a sounding body attached to a metal plate requires a process of attaching piezoelectric material to the metal plate.
This method requires a process of connecting the electrodes, and also requires adhesion while perfectly aligning the top and bottom of the metal plate, which has the disadvantage that this alignment process is not easy and increases costs. The object of the invention is to eliminate these conventional drawbacks and to provide a highly efficient piezoelectric sounding element using a simple method that allows one piece to be fired.

〔問題点を解決するための手段〕[Means for solving problems]

本発明の圧電発音体は、少なくとも3層の電(]ではさ
まれた2層の圧電体セラミックスでなる積層体の一部を
固定支持することによって得る圧電バイモルフ型の発音
体において、固定支持部と自由状悪となる部分の境界部
分が、これに隣接した自由状態部分に少なくとも1つの
凹型部が形成されており、この凹型部が、一方の層への
穴あけと、その後の積層かまたは上下2層の間で互いに
位置をずらした穴あけと、その後の積層によって得られ
る。
The piezoelectric sounding body of the present invention is a piezoelectric bimorph type sounding body obtained by fixedly supporting a part of a laminate made of two layers of piezoelectric ceramics sandwiched between at least three layers of electrodes. At least one recessed part is formed in the free state part adjacent to the boundary part of the free state part, and this recessed part is used for drilling in one layer and subsequent lamination or upper and lower parts. Obtained by offset drilling between two layers and subsequent lamination.

〔作用〕[Effect]

本発明の圧電発音体は振動部分が電極層を3層形成した
バイモルフ型の積層体であるが、この積層体として積層
する前に、この発音体として成るときの外周固定部分と
なる位置が1層となるように、前記バイモルフ形成部分
の第2層目の電極接続をスルホールによって積層体の第
1層目に接続することによって前記外周固定部分の位置
の厚さが1層分に薄くされた状態となる。この結果、従
来の圧電セラミックス板を積層して周辺固定した場合よ
り周辺部での薄型(ヒが行われ、この薄型化によってセ
ラミックス体であるにもかかわらず振動板としての動き
が容易となる。このため、同し電力を供給しても本発明
の振動板では効率良く変位し、音圧レベルの高い発音体
となる。したがって従来のように、効率の問題から金属
板へ貼り1十けて構成する場合のように圧電板への電極
形成。
The piezoelectric sounding body of the present invention is a bimorph-type laminate in which the vibrating part has three electrode layers. By connecting the electrode connection of the second layer of the bimorph forming part to the first layer of the laminate through a through hole so as to form a layer, the thickness at the position of the outer peripheral fixing part was reduced to one layer. state. As a result, the peripheral portion is thinner than in the case where conventional piezoelectric ceramic plates are laminated and fixed around the periphery, and this thinning makes it easier to move as a diaphragm despite being a ceramic body. Therefore, even if the same amount of power is supplied, the diaphragm of the present invention can be displaced efficiently, resulting in a sounding body with a high sound pressure level. Forming electrodes on a piezoelectric plate as in the case of configuring.

金属板への貼1寸け、ケース支持体への取付け、外部端
子との電極接続などの工程を全く必要とせず、単に積層
して一体で焼成するだけの簡単な工程で圧電発音体が得
られる。
Piezoelectric sounding elements can be obtained through a simple process of simply laminating and firing them together, without requiring any steps such as pasting on a metal plate, attaching to a case support, or connecting electrodes to external terminals. It will be done.

〔実施例〕〔Example〕

次に、本発明の圧電発音体について図面を参照して説明
する。
Next, the piezoelectric sounding body of the present invention will be explained with reference to the drawings.

第1図は本発明の一実施例を示す圧電発音体の一部切欠
き斜視図である。振動板は2層の圧電セラミックス11
及び12に電極13が上下及び内部の全3層に形成され
ており、この電極が外部への取出し電極14によって外
周固定体15の3方向に引き出され、外部電極16に接
続されている。
FIG. 1 is a partially cutaway perspective view of a piezoelectric sounding body showing an embodiment of the present invention. The diaphragm is made of two layers of piezoelectric ceramics 11
and 12, electrodes 13 are formed in all three layers, upper, lower, and inner, and these electrodes are drawn out in three directions of the outer circumferential fixed body 15 by an external extraction electrode 14 and connected to an external electrode 16.

そして本発明の主要部分である溝17が前記2層の圧電
セラミックスの外周固定体15の固定部と振動板との境
界部分の両面にあり、これが上下1/2ピツチだけずら
して形成されている9第2図は本発明の圧電発音体を得
る圧電材グリーンシートに形成するパターン例及び穴あ
け状態例を示す平面図であり、圧電セラミックスとなる
焼結前の第2図(a)に示す圧電材グリーンシート11
及び第2図(b)に示す圧電材グリーンシート12の表
と裏に電極13と取出し電極14が形成され、それぞれ
が別な3方向へ引き出されている。外周固定体が形成さ
れろ半径Rの位置には前記圧電材グリーンシート11及
び12の間で位置をl 、、/ ’)ピッチ(ここでは
1./2ピッチ角)1/2Pだけずらした状態で直径d
が d=2・R・π/分割数−キャップg となる穴をあける。このとき分割数は穴の直径dが1韻
から4龍となる範囲でギャップgを0.5 in〜ll
ll11として設定する。
Grooves 17, which are the main part of the present invention, are located on both sides of the boundary between the fixed part of the two-layered piezoelectric ceramic outer circumferential fixed body 15 and the diaphragm, and these grooves are shifted by 1/2 pitch vertically. 9. FIG. 2 is a plan view showing an example of a pattern formed on a piezoelectric material green sheet to obtain a piezoelectric sounding element of the present invention, and an example of the hole punching state. material green sheet 11
Electrodes 13 and lead-out electrodes 14 are formed on the front and back sides of the piezoelectric green sheet 12 shown in FIG. 2(b), and are drawn out in three different directions. When the outer circumferential fixed body is formed, the piezoelectric green sheets 11 and 12 are shifted by 1/2P between the piezoelectric green sheets 11 and 12 by a pitch (here, 1./2 pitch angle). and diameter d
Drill a hole such that d=2・R・π/number of divisions−cap g. At this time, the number of divisions is such that the hole diameter d ranges from 1 rhyme to 4 rhymes, and the gap g is 0.5 in to ll.
Set as ll11.

このようにして得られた2枚の圧電材グリーンシートを
このまま積層プレスして脱バインダ一工程を経て焼成し
、単なる振動板だけを作り、これ3発音体としての固定
部及びケースに組み込んで使用しても良いが、この2枚
の上下にそれぞれ半径Rの穴を持つグリーンシート21
を形成し、これらを積み重ねて仮止めした後、第3図に
示すように、剥離用フィルム31とスペーサ32を合わ
せて積層プレスすることによって外周固定体と一体の物
が得られ、脱バインダ一工程及び焼成過程を経ることで
一体焼成で得られる圧電発音体となる。なお、第3図は
本発明の圧電発音体を積層するときの構成例を示す側面
図である。
The two piezoelectric green sheets obtained in this way are laminated and pressed as they are, subjected to a binder removal process, and then fired to create a simple diaphragm, which is used by incorporating it into a fixed part and case as a sounding body. However, these two green sheets 21 each have a hole with a radius of R on the top and bottom.
After stacking and temporarily fixing these, as shown in FIG. 3, the peeling film 31 and the spacer 32 are laminated and pressed together to obtain an integral piece with the outer peripheral fixing body, and the binder is removed. Through the process and firing process, it becomes a piezoelectric sounding body obtained by integral firing. Note that FIG. 3 is a side view showing an example of the structure when piezoelectric sounding bodies of the present invention are laminated.

このようにして構成した圧電発音体は周辺固定部がほぼ
グリーンシート1層分の厚さく20μm〜50μm)と
なるため、この部分ではセラミックス焼結体であるにも
かかわらず、フレキシビリティ−が得られ、中心部の電
極形成部分で生じた上下方向のたわみが自由状態に近い
状態で得られるため、周辺固定の影響での効率低下はず
っと少なくなり音圧レベルの高い発音体となる。また、
本発明の圧電発音体はグリーンシートの穴あけ及び印刷
と、この積層及び脱バインダー・焼成だけで得られるた
め、従来のように金属板と圧電材の位置合わせ及び貼付
けや電極の外部への取出しのための配線などが全く不要
となり、通常の積層セラミックコンデンサの製造プロセ
スがそのまま利用できるので、容易にコスト低減効果が
得られる。
The piezoelectric sounding element constructed in this way has a peripheral fixed part with a thickness equivalent to one layer of green sheet (20 μm to 50 μm), so this part has flexibility even though it is a ceramic sintered body. Since the vertical deflection caused by the central electrode-forming portion can be obtained in a state close to a free state, the decrease in efficiency due to the influence of peripheral fixation is much smaller, resulting in a sounding body with a high sound pressure level. Also,
Since the piezoelectric sounding body of the present invention can be obtained by simply drilling and printing green sheets, laminating them, removing the binder, and firing, there is no need to align and attach the metal plate and piezoelectric material, or take out the electrodes to the outside, as in the past. Since there is no need for any wiring or the like, and the manufacturing process for ordinary multilayer ceramic capacitors can be used as is, cost reduction effects can be easily obtained.

ここで用いた圧電材グリーンシートは、マグネシウム・
ニオブ酸鉛Pb(Mg、、、、  ・Nb、・、)03
を主成分とする電歪材料の粉末を有機バインダーとと°
もに溶媒中に分散しスラリー状とする。
The piezoelectric green sheet used here is magnesium
Lead niobate Pb (Mg,..., ・Nb,...)03
An electrostrictive material powder mainly composed of an organic binder and °
The mixture is dispersed in a solvent to form a slurry.

これをドクターブレードを用いたスリップキャスティン
グ法によって、厚さ20μm〜200μmの均一な厚み
のセラミック生シートとする。
This is made into a ceramic raw sheet having a uniform thickness of 20 μm to 200 μm by slip casting using a doctor blade.

このセラミック生シートを規定の大きさに打ち抜き、溝
形成のための穴をパンチ及びダイによって形成する。次
に、この穴あけを含む加工された圧電材グリーンシート
にスクリーン印刷機を用いて電極ペーストを印刷する。
This ceramic raw sheet is punched out to a specified size, and holes for forming grooves are formed using a punch and a die. Next, an electrode paste is printed on the processed piezoelectric green sheet including the holes using a screen printer.

このようにして得た穴あけ及び電極パターンを有するグ
リーンシートを積み重ね100℃前後の温度で加熱し2
50kg、/cm2程度の圧力で圧着して積層体を得る
。次にこの積層体を必要に応じて所定の寸法に切断した
後、まず空洞パターンやセラミ・・ツクグリーンシート
中に存在する有機物を脱バインダ一工程において酸化雰
囲気中でゆっくりと加熱し、分解・消失させる。通常こ
れらの有機物は500°C〜600°Cまでには完全に
分解・酸化するが、急激に温度を分解温度まで上げると
積層体が破損するため、25℃/時間あるいは、これよ
りもゆっくりした温度上昇速度で温度を上げ、500°
C〜600°Cの状態に充分長い時間保持することで有
機物を完全に消失させる。
The green sheets with holes and electrode patterns obtained in this way were stacked and heated at a temperature of around 100℃.
A laminate is obtained by pressing at a pressure of about 50 kg/cm2. Next, after cutting this laminate into predetermined dimensions as necessary, first the organic matter present in the cavity pattern and ceramic green sheet is slowly heated in an oxidizing atmosphere in the first debinding step to decompose and decompose it. make it disappear Normally, these organic substances are completely decomposed and oxidized by 500°C to 600°C, but if the temperature is suddenly raised to the decomposition temperature, the laminate will be damaged, so it should be heated at 25°C/hour or slower. Raise the temperature at the temperature increase rate to 500°
By maintaining the temperature at C to 600°C for a sufficiently long time, the organic matter is completely eliminated.

コノ後、温度900°C〜1200°C″c焼成するこ
とで、上述した圧電発音体が得られる。
After this, the piezoelectric sounding body described above is obtained by firing at a temperature of 900° C. to 1200° C″c.

本実施例では溝の形成を上下となる圧電材グリーンシー
トの間で位置をずらせた穴あけで得たが、これを片側だ
けの圧電材グリーンシートに2倍のピッチで穴をあけて
も積層した後に得られる固定部分の厚みは、はぼ圧電材
グリーンシート1層分の厚みだけとなり、振動板として
の動きを押さえるようなことが少なく、一体で形成でき
る効率の良い発音体となる。要は振動板として変位する
自由状態部分とこれを支持固定する固定体部分の境界部
分に溝が形成され、この溝によって薄型化効果を得るも
のである。例えば、長方形のバイモルフ振動板では両端
部を支持部として構成するが、この両端の固定部とその
内側の振動板との境界部分に溝を形成すれば良く、この
ときも積層前の圧電材グリーンシートのとき前記同様の
穴を形成しておけば良い。
In this example, the grooves were formed by drilling holes at different positions between the upper and lower piezoelectric green sheets, but this could also be done by drilling holes at twice the pitch in the piezoelectric green sheets on only one side. The thickness of the fixed portion obtained later is only the thickness of one layer of the Habo piezoelectric material green sheet, so it does not restrict the movement of the diaphragm, and it becomes an efficient sounding body that can be formed in one piece. The point is that a groove is formed at the boundary between the free state portion that is displaced as a diaphragm and the fixed body portion that supports and fixes it, and this groove provides a thinning effect. For example, in a rectangular bimorph diaphragm, both ends are configured as supporting parts, but grooves may be formed at the boundary between the fixed parts at both ends and the diaphragm inside. In the case of a sheet, holes similar to those described above may be formed.

〔発明の効果〕〔Effect of the invention〕

以上の説明で明らかなように本発明の圧電発音体は、振
動板として変位する自由状態部分と振動板を支持する固
定体部分との境界において積層する1層のシートに穴を
形成することで溝を作り、この境界部分での厚さが、は
ぼ1層分となる薄型1ヒが行え、振動板から固定体まで
が一体で得られるセラミック焼結体であるにもかかわら
ず、振動板で生じる変位が自由状態に近くなった分だけ
振動板の変位が大きく得られ音圧レベルの高い発音体が
得られる効果がある9
As is clear from the above description, the piezoelectric sounding body of the present invention is produced by forming holes in a single layer of sheets laminated at the boundary between the free state portion that is displaced as a diaphragm and the fixed body portion that supports the diaphragm. Even though the diaphragm is a ceramic sintered body that can be made into a thin one-layer structure with grooves formed and the thickness at this boundary part is approximately one layer, the diaphragm and the fixed body are integrated. The displacement of the diaphragm becomes closer to the free state, and the displacement of the diaphragm becomes larger, which has the effect of producing a sounding body with a high sound pressure level9.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す圧電発音体の一部切欠
き斜視図、第2図は本発明の圧電発音体を得る圧電材グ
リーンシートに形成するパターン例及び穴あけ状態を示
す平面図、第3図は本発明の圧電発音体を積層するとき
の構成例を示す側面図、第4図は従来の圧電発音体の一
例を示すバイモルフ型の発音体の一部切欠き斜視図であ
る。 11.12・・・圧電セラミックス(圧電材グリーンシ
ート)、13.44・・・電極、14・・・取出し電極
、15・・・外周固定体、16・・・外部電極、17・
・・渦、d・・・溝形成のための穴径、R・・・固定体
となる位置の半径、P・・・溝形成のピンチ(ピッチ角
)、g・・・溝と溝のギャップ、21・・・グリーンシ
ート、31・・・剥離用フィルム、32・・・スペーサ
、41・・・金属板、42.43・・・圧電材、45・
・・支持体。 第7図 ゲイ万導」セラミックス
FIG. 1 is a partially cutaway perspective view of a piezoelectric sounding body showing an embodiment of the present invention, and FIG. 2 is a plan view showing an example of a pattern formed on a piezoelectric green sheet to obtain a piezoelectric sounding body of the present invention and the state of drilling holes. 3 is a side view showing an example of a structure when piezoelectric sounding bodies of the present invention are laminated, and FIG. 4 is a partially cutaway perspective view of a bimorph type sounding body showing an example of a conventional piezoelectric sounding body. be. 11.12... Piezoelectric ceramics (piezoelectric green sheet), 13.44... Electrode, 14... Extracting electrode, 15... Outer periphery fixing body, 16... External electrode, 17...
... Vortex, d... Hole diameter for groove formation, R... Radius at the position of the fixed body, P... Pinch (pitch angle) for groove formation, g... Gap between grooves , 21...Green sheet, 31...Peeling film, 32...Spacer, 41...Metal plate, 42.43...Piezoelectric material, 45...
...Support. Figure 7 “Gay Mando” Ceramics

Claims (2)

【特許請求の範囲】[Claims] (1)少なくとも3層の電極ではさまれた2層の圧電体
セラミックスでなる積層体の一部を固定支持することに
よって得る圧電バイモルフ型の発音体において、固定支
持部と自由状態となる部分の境界部分か、これに隣接し
た自由状態部分に少なくとも1つの凹型部が形成されて
いることを特徴とする圧電発音体。
(1) In a piezoelectric bimorph type sounding body obtained by fixedly supporting a part of a laminate consisting of two layers of piezoelectric ceramics sandwiched between at least three layers of electrodes, the fixed support part and the free part are separated. A piezoelectric sounding body characterized in that at least one concave portion is formed at a boundary portion or a free state portion adjacent thereto.
(2)凹型部が、一方の層への穴あけと、その後の積層
かまたは上下2層の間で互いに位置をずらした穴あけと
、その後の積層によつて得られることを特徴とする特許
請求の範囲第(1)項記載の圧電発音体。
(2) A patent claim characterized in that the concave portion is obtained by drilling a hole in one layer and then laminating the layer, or by punching a hole at a mutually shifted position between the upper and lower layers and then laminating the layer. A piezoelectric sounding body according to range (1).
JP6174087A 1987-03-16 1987-03-16 Piezoelectric sounding body Pending JPS63227199A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6174087A JPS63227199A (en) 1987-03-16 1987-03-16 Piezoelectric sounding body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6174087A JPS63227199A (en) 1987-03-16 1987-03-16 Piezoelectric sounding body

Publications (1)

Publication Number Publication Date
JPS63227199A true JPS63227199A (en) 1988-09-21

Family

ID=13179887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6174087A Pending JPS63227199A (en) 1987-03-16 1987-03-16 Piezoelectric sounding body

Country Status (1)

Country Link
JP (1) JPS63227199A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH039596U (en) * 1989-06-10 1991-01-29
US5856956A (en) * 1996-05-02 1999-01-05 Nec Corporation Piezoelectric acoustic transducer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH039596U (en) * 1989-06-10 1991-01-29
US5856956A (en) * 1996-05-02 1999-01-05 Nec Corporation Piezoelectric acoustic transducer

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