JPS63223883A - パタ−ン検査装置 - Google Patents

パタ−ン検査装置

Info

Publication number
JPS63223883A
JPS63223883A JP62055374A JP5537487A JPS63223883A JP S63223883 A JPS63223883 A JP S63223883A JP 62055374 A JP62055374 A JP 62055374A JP 5537487 A JP5537487 A JP 5537487A JP S63223883 A JPS63223883 A JP S63223883A
Authority
JP
Japan
Prior art keywords
pattern
value
inspected
peaks
smoothing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62055374A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0560635B2 (enExample
Inventor
Satoshi Sakurai
聡 桜井
Hiroshige Sakahara
坂原　広重
Yoriaki Shimizu
清水　順紀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62055374A priority Critical patent/JPS63223883A/ja
Publication of JPS63223883A publication Critical patent/JPS63223883A/ja
Publication of JPH0560635B2 publication Critical patent/JPH0560635B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Image Processing (AREA)
  • Image Analysis (AREA)
JP62055374A 1987-03-12 1987-03-12 パタ−ン検査装置 Granted JPS63223883A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62055374A JPS63223883A (ja) 1987-03-12 1987-03-12 パタ−ン検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62055374A JPS63223883A (ja) 1987-03-12 1987-03-12 パタ−ン検査装置

Publications (2)

Publication Number Publication Date
JPS63223883A true JPS63223883A (ja) 1988-09-19
JPH0560635B2 JPH0560635B2 (enExample) 1993-09-02

Family

ID=12996706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62055374A Granted JPS63223883A (ja) 1987-03-12 1987-03-12 パタ−ン検査装置

Country Status (1)

Country Link
JP (1) JPS63223883A (enExample)

Also Published As

Publication number Publication date
JPH0560635B2 (enExample) 1993-09-02

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