JPS6321748Y2 - - Google Patents
Info
- Publication number
- JPS6321748Y2 JPS6321748Y2 JP12550383U JP12550383U JPS6321748Y2 JP S6321748 Y2 JPS6321748 Y2 JP S6321748Y2 JP 12550383 U JP12550383 U JP 12550383U JP 12550383 U JP12550383 U JP 12550383U JP S6321748 Y2 JPS6321748 Y2 JP S6321748Y2
- Authority
- JP
- Japan
- Prior art keywords
- cryopanel
- steady rest
- cryopump
- supported
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012212 insulator Substances 0.000 claims description 8
- 230000008602 contraction Effects 0.000 claims description 2
- 239000002184 metal Substances 0.000 description 11
- 238000003466 welding Methods 0.000 description 5
- 238000007689 inspection Methods 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12550383U JPS6034577U (ja) | 1983-08-15 | 1983-08-15 | クライオポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12550383U JPS6034577U (ja) | 1983-08-15 | 1983-08-15 | クライオポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6034577U JPS6034577U (ja) | 1985-03-09 |
| JPS6321748Y2 true JPS6321748Y2 (no) | 1988-06-15 |
Family
ID=30285708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12550383U Granted JPS6034577U (ja) | 1983-08-15 | 1983-08-15 | クライオポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6034577U (no) |
-
1983
- 1983-08-15 JP JP12550383U patent/JPS6034577U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6034577U (ja) | 1985-03-09 |
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