JPS6321748Y2 - - Google Patents
Info
- Publication number
- JPS6321748Y2 JPS6321748Y2 JP12550383U JP12550383U JPS6321748Y2 JP S6321748 Y2 JPS6321748 Y2 JP S6321748Y2 JP 12550383 U JP12550383 U JP 12550383U JP 12550383 U JP12550383 U JP 12550383U JP S6321748 Y2 JPS6321748 Y2 JP S6321748Y2
- Authority
- JP
- Japan
- Prior art keywords
- cryopanel
- steady rest
- cryopump
- supported
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012212 insulator Substances 0.000 claims description 8
- 230000008602 contraction Effects 0.000 claims description 2
- 239000002184 metal Substances 0.000 description 11
- 238000003466 welding Methods 0.000 description 5
- 238000007689 inspection Methods 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Description
【考案の詳細な説明】
本考案はクライオポンプに係り、特に中性粒子
入射装置に用いられるクライオポンプに関する。[Detailed Description of the Invention] The present invention relates to a cryopump, and particularly to a cryopump used in a neutral particle injection device.
中性粒子入射装置に用いられるクライオポンプ
は、超真空中の水素を排気する装置である。 A cryopump used in a neutral particle injection device is a device that pumps out hydrogen in an ultra-vacuum.
従来のクライオポンプは第１図乃至第３図に示
す様にクライオパネル１とこれを支持する枠２、
クライオパネル１の断熱用熱シールド板３、及び
断熱と水素の流入口を兼ねたシエブロン型バツフ
ル４から主に構成されている。クライオパネル１
は２枚の薄板を溶接して成り、両端部に液体ヘリ
ウム出入口５を有する薄型の容器であり、この中
に液体ヘリウムを充填補供し4Kまで冷却し水素
ガスを凝着させる能力を持つものである。熱シー
ルド板３、及びシエブロン型バツフル４には液体
窒素の循環パイプ６，７が設けられ70Kまで冷却
されて、周囲部材がクライオパネル１に与える熱
を遮断する。 A conventional cryopump, as shown in FIGS. 1 to 3, has a cryopanel 1, a frame 2 that supports it,
It mainly consists of a heat shield plate 3 for heat insulation of the cryopanel 1, and a Chevron-type baffle 4 that serves both as insulation and as an inlet for hydrogen. Cryopanel 1
is a thin container made by welding two thin plates and has a liquid helium inlet/outlet 5 at both ends, and has the ability to fill liquid helium into the container, cool it to 4K, and condense hydrogen gas. be. The heat shield plate 3 and the Chevron-type baffle 4 are provided with liquid nitrogen circulation pipes 6 and 7, and are cooled to 70K, thereby blocking the heat applied to the cryopanel 1 by surrounding members.
上記クライオパネル１は性能上以下の点を考慮
し設計されている。即ちクライオパネル１から他
物体への熱伝達損失の低減、熱膨張による影響を
なくするための取付構造の工夫等がある。このた
め取付は熱抵抗の大きな吊ロツド８で吊り下げ、
振れ止め部９は最小限の員数及び形状とし且つク
ライオパネル１の熱収縮逃げのための摺動型振れ
止めとしている。 The cryopanel 1 is designed taking into consideration the following points in terms of performance. That is, there are improvements to the mounting structure to reduce the heat transfer loss from the cryopanel 1 to other objects, and to eliminate the effects of thermal expansion. For this reason, the installation is done by suspending it using a hanging rod 8 with high thermal resistance.
The steady rest part 9 has a minimum number and shape, and is a sliding type steady rest for escape of thermal contraction of the cryopanel 1.
その振れ止め部９の詳細は第４図に示す様に、
クライオパネル１に振れ止め金具１０が溶接１ａ
されており、枠２側には接触面積を極力小さくす
るための図の様な支持金具１１が取付けられてい
る。また、振れ止め金具１０と支持金具１１の間
には0.5mm程度のギヤツプを設けクライオパネル
１が冷却され熱収縮する際摺動可能となつてい
る。 The details of the steady rest part 9 are as shown in Fig. 4.
The steady rest fitting 10 is welded to the cryopanel 1 1a
A support fitting 11 as shown in the figure is attached to the frame 2 side in order to minimize the contact area. Further, a gap of about 0.5 mm is provided between the steady rest metal fitting 10 and the support metal fitting 11 to allow sliding when the cryopanel 1 is cooled and thermally contracted.
しかし、従来の振れ止め構造では、クライオパ
ネル１に振れ止め金具１０を溶接する構造となつ
ており、溶接作業管理、検査等面倒であつた。ま
た、振れ止め金具１０と支持金具１１間にギヤツ
プがあるが、片側は金属接触をしており枠２から
の熱が支持金具１１、振れ止め金具１０を通して
クライオパネル１に侵入し、クライオパネル１の
性能を低下させる。 However, in the conventional steady rest structure, the steady rest fitting 10 is welded to the cryopanel 1, and welding work management and inspection are troublesome. Also, although there is a gap between the steady rest metal fittings 10 and the support metal fittings 11, one side is in metal contact, and the heat from the frame 2 enters the cryopanel 1 through the support metal fittings 11 and the steady rest metal fittings 10, and the cryopanel 1 performance.
本考案は上述の点に鑑み成されたもので、その
目的とするところは、作業、検査上の面倒さをな
くし、熱が侵入するようなことをなくし性能向上
を図つたクライオポンプを提供するにある。 The present invention was developed in view of the above points, and its purpose is to provide a cryopump that eliminates troublesome work and inspection, eliminates heat intrusion, and improves performance. It is in.
本考案はクライオパネルに溶接されていた振れ
止め金具をやめ熱絶縁物を介して振れ止めを行な
う事により所期の目的を達成するように成したも
のである。 The present invention achieves the intended purpose by eliminating the steady rest metal fittings that were welded to the cryopanel and providing a steady rest through a thermal insulator.
以下図面の実施例に基づいて本考案を詳細に説
明する。 The present invention will be explained in detail below based on the embodiments shown in the drawings.
第５図及び第６図に本考案の一実施例を示す。
該図において１２は熱絶縁物、１３は熱絶縁物１
２の取付金具である。本実施例では熱絶縁物１２
とクライオパネル１間に摺動可能とならしめるた
めギヤツプを設け、また熱伝達低減のため接触面
積を小さくしている。本実施例によれば、クライ
オパネル１に振れ止め金具を溶接することがない
ので、面倒な溶接作業管理及び検査等省略でき
る。また溶接作業がなくなる事によりクライオパ
ネル１の品質向上にもつながる。それから熱絶縁
物１２を介する事により枠２からの熱侵入を低減
する事ができクライオパネル１の性能が向上す
る。 An embodiment of the present invention is shown in FIGS. 5 and 6.
In the figure, 12 is a thermal insulator, 13 is a thermal insulator 1
This is the second mounting bracket. In this embodiment, the thermal insulator 12
A gap is provided between the cryopanel 1 and the cryopanel 1 to enable sliding, and the contact area is made small to reduce heat transfer. According to this embodiment, since there is no need to weld a steady rest fitting to the cryopanel 1, troublesome welding work management and inspection can be omitted. Furthermore, the elimination of welding work also leads to an improvement in the quality of the cryopanel 1. Furthermore, by using the thermal insulator 12, heat intrusion from the frame 2 can be reduced, and the performance of the cryopanel 1 can be improved.
以上の説明から明らかな様に本考案によれば、
クライオパネルに溶接されていた振れ止め金具を
やめ熱絶縁物を介した振れ止め構造にする事によ
り、面倒な溶接作業管理及び検査が省略でき、ま
たクライオパネルの品質向上及び性能向上の効果
がある。 As is clear from the above explanation, according to the present invention,
By replacing the steady rest metal fittings welded to the cryopanel with a steady rest structure using a thermal insulator, troublesome welding work management and inspection can be omitted, and the quality and performance of the cryopanel can be improved. .
第１図は従来のクライオポンプの平面図、第２
図はその正面図、第３図はその側面図、第４図は
従来のクライオポンプのクライオパネルの振れ止
め部の詳細図、第５図は本考案のクライオパネル
振れ止め部の詳細図、第６図は第５図のＰ方向か
ら見た図である。
１……クライオパネル、２……枠、３……熱シ
ールド板、８……吊ロツド、９……振れ止め部、
１０……振れ止め金具、１１……支持金具、１２
……熱絶縁物、１３……取付金具。
Figure 1 is a plan view of a conventional cryopump, Figure 2
The figure is a front view, FIG. 3 is a side view, FIG. 4 is a detailed view of the steady rest of the cryopanel of a conventional cryopump, and FIG. 5 is a detailed view of the cryopanel steady rest of the present invention. FIG. 6 is a view seen from direction P in FIG. 1... Cryopanel, 2... Frame, 3... Heat shield plate, 8... Hanging rod, 9... Steady rest part,
10... Steady rest metal fitting, 11... Support metal fitting, 12
...Thermal insulator, 13...Mounting bracket.
Claims (1)
熱シールド板、及びシエブロン型バツフルが取囲
んでなるクライオポンプにおいて、前記クライオ
パネルを、前記枠から支持された熱絶縁物で微小
ギヤツプを有する様に、かつ、前記クライオパネ
ルが冷却された時の熱収縮を前記ギヤツプ部で滑
り得る様に支持したことを特徴とするクライポン
プ。 In a cryopump in which a cryopanel located at the center supported by a frame is surrounded by a heat shield plate and a Chevron-type baffle, the cryopanel is supported by a heat insulator supported from the frame so as to have a small gap, The cryopump is further characterized in that the cryopanel is supported by the gap portion so as to be able to slide during thermal contraction when the cryopanel is cooled.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12550383U JPS6034577U (en) | 1983-08-15 | 1983-08-15 | cryopump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12550383U JPS6034577U (en) | 1983-08-15 | 1983-08-15 | cryopump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6034577U JPS6034577U (en) | 1985-03-09 |
| JPS6321748Y2 true JPS6321748Y2 (en) | 1988-06-15 |
Family
ID=30285708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12550383U Granted JPS6034577U (en) | 1983-08-15 | 1983-08-15 | cryopump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6034577U (en) |
-
1983
- 1983-08-15 JP JP12550383U patent/JPS6034577U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6034577U (en) | 1985-03-09 |
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