JPS6321577Y2 - - Google Patents

Info

Publication number
JPS6321577Y2
JPS6321577Y2 JP1983063187U JP6318783U JPS6321577Y2 JP S6321577 Y2 JPS6321577 Y2 JP S6321577Y2 JP 1983063187 U JP1983063187 U JP 1983063187U JP 6318783 U JP6318783 U JP 6318783U JP S6321577 Y2 JPS6321577 Y2 JP S6321577Y2
Authority
JP
Japan
Prior art keywords
substrate holder
substrate
ring
holding ring
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983063187U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59169370U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6318783U priority Critical patent/JPS59169370U/ja
Publication of JPS59169370U publication Critical patent/JPS59169370U/ja
Application granted granted Critical
Publication of JPS6321577Y2 publication Critical patent/JPS6321577Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP6318783U 1983-04-27 1983-04-27 液相エピタキシヤル膜成長用基板ホルダ Granted JPS59169370U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6318783U JPS59169370U (ja) 1983-04-27 1983-04-27 液相エピタキシヤル膜成長用基板ホルダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6318783U JPS59169370U (ja) 1983-04-27 1983-04-27 液相エピタキシヤル膜成長用基板ホルダ

Publications (2)

Publication Number Publication Date
JPS59169370U JPS59169370U (ja) 1984-11-13
JPS6321577Y2 true JPS6321577Y2 (cs) 1988-06-14

Family

ID=30193379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6318783U Granted JPS59169370U (ja) 1983-04-27 1983-04-27 液相エピタキシヤル膜成長用基板ホルダ

Country Status (1)

Country Link
JP (1) JPS59169370U (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015198213A (ja) * 2014-04-03 2015-11-09 新日鐵住金株式会社 エピタキシャル炭化珪素ウェハの製造方法及びそれに用いる炭化珪素単結晶基板のホルダー

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5114051U (cs) * 1974-07-18 1976-02-02

Also Published As

Publication number Publication date
JPS59169370U (ja) 1984-11-13

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