JPS6321560U - - Google Patents

Info

Publication number
JPS6321560U
JPS6321560U JP1986112718U JP11271886U JPS6321560U JP S6321560 U JPS6321560 U JP S6321560U JP 1986112718 U JP1986112718 U JP 1986112718U JP 11271886 U JP11271886 U JP 11271886U JP S6321560 U JPS6321560 U JP S6321560U
Authority
JP
Japan
Prior art keywords
polishing
polished
surface plate
polishing pad
cooling water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986112718U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986112718U priority Critical patent/JPS6321560U/ja
Publication of JPS6321560U publication Critical patent/JPS6321560U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP1986112718U 1986-07-24 1986-07-24 Pending JPS6321560U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986112718U JPS6321560U (enrdf_load_stackoverflow) 1986-07-24 1986-07-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986112718U JPS6321560U (enrdf_load_stackoverflow) 1986-07-24 1986-07-24

Publications (1)

Publication Number Publication Date
JPS6321560U true JPS6321560U (enrdf_load_stackoverflow) 1988-02-12

Family

ID=30993851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986112718U Pending JPS6321560U (enrdf_load_stackoverflow) 1986-07-24 1986-07-24

Country Status (1)

Country Link
JP (1) JPS6321560U (enrdf_load_stackoverflow)

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