JPS63210269A - 蒸着用コバルト基合金 - Google Patents
蒸着用コバルト基合金Info
- Publication number
- JPS63210269A JPS63210269A JP4210887A JP4210887A JPS63210269A JP S63210269 A JPS63210269 A JP S63210269A JP 4210887 A JP4210887 A JP 4210887A JP 4210887 A JP4210887 A JP 4210887A JP S63210269 A JPS63210269 A JP S63210269A
- Authority
- JP
- Japan
- Prior art keywords
- alloy
- vapor deposition
- magnetic
- group
- cobalt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007740 vapor deposition Methods 0.000 title claims abstract description 29
- 239000000956 alloy Substances 0.000 title abstract description 37
- 229910045601 alloy Inorganic materials 0.000 title abstract description 36
- 229910000531 Co alloy Inorganic materials 0.000 claims description 23
- 239000010409 thin film Substances 0.000 abstract description 26
- 230000005291 magnetic effect Effects 0.000 abstract description 24
- 239000000463 material Substances 0.000 abstract description 17
- 238000004544 sputter deposition Methods 0.000 abstract description 15
- 239000012535 impurity Substances 0.000 abstract description 9
- 239000000758 substrate Substances 0.000 abstract description 9
- 238000000151 deposition Methods 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 239000010408 film Substances 0.000 abstract description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 4
- 229910001004 magnetic alloy Inorganic materials 0.000 abstract description 4
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 4
- 229910052760 oxygen Inorganic materials 0.000 abstract description 4
- 229910052726 zirconium Inorganic materials 0.000 abstract description 4
- 229910052735 hafnium Inorganic materials 0.000 abstract description 3
- 229910052719 titanium Inorganic materials 0.000 abstract description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 2
- 238000005247 gettering Methods 0.000 abstract description 2
- 229910052758 niobium Inorganic materials 0.000 abstract description 2
- 239000001301 oxygen Substances 0.000 abstract description 2
- 229910052715 tantalum Inorganic materials 0.000 abstract description 2
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 20
- 239000000292 calcium oxide Substances 0.000 description 20
- 235000012255 calcium oxide Nutrition 0.000 description 20
- 239000002184 metal Substances 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 14
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 10
- 230000000694 effects Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 230000008021 deposition Effects 0.000 description 7
- 230000008018 melting Effects 0.000 description 7
- 238000002844 melting Methods 0.000 description 7
- 239000011819 refractory material Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 230000035699 permeability Effects 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 239000006104 solid solution Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000004663 powder metallurgy Methods 0.000 description 3
- 238000005275 alloying Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- -1 etc. Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- JHLNERQLKQQLRZ-UHFFFAOYSA-N calcium silicate Chemical compound [Ca+2].[Ca+2].[O-][Si]([O-])([O-])[O-] JHLNERQLKQQLRZ-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910000514 dolomite Inorganic materials 0.000 description 1
- 239000010459 dolomite Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4210887A JPS63210269A (ja) | 1987-02-25 | 1987-02-25 | 蒸着用コバルト基合金 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4210887A JPS63210269A (ja) | 1987-02-25 | 1987-02-25 | 蒸着用コバルト基合金 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63210269A true JPS63210269A (ja) | 1988-08-31 |
| JPH049855B2 JPH049855B2 (enrdf_load_stackoverflow) | 1992-02-21 |
Family
ID=12626764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4210887A Granted JPS63210269A (ja) | 1987-02-25 | 1987-02-25 | 蒸着用コバルト基合金 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63210269A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02301531A (ja) * | 1989-05-15 | 1990-12-13 | Sanyo Electric Co Ltd | 水素吸蔵合金の製造方法 |
-
1987
- 1987-02-25 JP JP4210887A patent/JPS63210269A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02301531A (ja) * | 1989-05-15 | 1990-12-13 | Sanyo Electric Co Ltd | 水素吸蔵合金の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH049855B2 (enrdf_load_stackoverflow) | 1992-02-21 |