JPS63207616A - インゴツト切断装置 - Google Patents
インゴツト切断装置Info
- Publication number
- JPS63207616A JPS63207616A JP62040766A JP4076687A JPS63207616A JP S63207616 A JPS63207616 A JP S63207616A JP 62040766 A JP62040766 A JP 62040766A JP 4076687 A JP4076687 A JP 4076687A JP S63207616 A JPS63207616 A JP S63207616A
- Authority
- JP
- Japan
- Prior art keywords
- ingot
- cutting
- holder device
- main body
- cut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005520 cutting process Methods 0.000 claims description 34
- 235000012431 wafers Nutrition 0.000 description 19
- 239000000463 material Substances 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 210000001015 abdomen Anatomy 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000002173 cutting fluid Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62040766A JPS63207616A (ja) | 1987-02-24 | 1987-02-24 | インゴツト切断装置 |
| US07/156,748 US4903681A (en) | 1987-02-24 | 1988-02-18 | Method and apparatus for cutting a cylindrical material |
| DE88102589T DE3883804T2 (de) | 1987-02-24 | 1988-02-22 | Verfahren und Vorrichtung für das Schneiden eines zylindrischen Materials. |
| EP19880102589 EP0280245B1 (en) | 1987-02-24 | 1988-02-22 | Method and apparatus for cutting a cylindrical material |
| KR1019880001932A KR930005466B1 (ko) | 1987-02-24 | 1988-02-24 | 원통형재료의 절단방법 및 장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62040766A JPS63207616A (ja) | 1987-02-24 | 1987-02-24 | インゴツト切断装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63207616A true JPS63207616A (ja) | 1988-08-29 |
| JPH0469530B2 JPH0469530B2 (enrdf_load_stackoverflow) | 1992-11-06 |
Family
ID=12589748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62040766A Granted JPS63207616A (ja) | 1987-02-24 | 1987-02-24 | インゴツト切断装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63207616A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012096318A (ja) * | 2010-11-02 | 2012-05-24 | Bbs Kinmei Co Ltd | チャック装置 |
| JP2024107432A (ja) * | 2020-05-22 | 2024-08-08 | Thk株式会社 | ワーク保持装置 |
-
1987
- 1987-02-24 JP JP62040766A patent/JPS63207616A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012096318A (ja) * | 2010-11-02 | 2012-05-24 | Bbs Kinmei Co Ltd | チャック装置 |
| JP2024107432A (ja) * | 2020-05-22 | 2024-08-08 | Thk株式会社 | ワーク保持装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0469530B2 (enrdf_load_stackoverflow) | 1992-11-06 |
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