JPS6320472A - シ−ル装置 - Google Patents

シ−ル装置

Info

Publication number
JPS6320472A
JPS6320472A JP16375086A JP16375086A JPS6320472A JP S6320472 A JPS6320472 A JP S6320472A JP 16375086 A JP16375086 A JP 16375086A JP 16375086 A JP16375086 A JP 16375086A JP S6320472 A JPS6320472 A JP S6320472A
Authority
JP
Japan
Prior art keywords
strip
shaped
sealing
shaped material
sealing members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16375086A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0373638B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Junichi Ogata
緒方　順一
Minoru Nemoto
実 根本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Engineering Corp
Original Assignee
NKK Corp
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NKK Corp, Nippon Kokan Ltd filed Critical NKK Corp
Priority to JP16375086A priority Critical patent/JPS6320472A/ja
Publication of JPS6320472A publication Critical patent/JPS6320472A/ja
Publication of JPH0373638B2 publication Critical patent/JPH0373638B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP16375086A 1986-07-14 1986-07-14 シ−ル装置 Granted JPS6320472A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16375086A JPS6320472A (ja) 1986-07-14 1986-07-14 シ−ル装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16375086A JPS6320472A (ja) 1986-07-14 1986-07-14 シ−ル装置

Publications (2)

Publication Number Publication Date
JPS6320472A true JPS6320472A (ja) 1988-01-28
JPH0373638B2 JPH0373638B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-11-22

Family

ID=15779982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16375086A Granted JPS6320472A (ja) 1986-07-14 1986-07-14 シ−ル装置

Country Status (1)

Country Link
JP (1) JPS6320472A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0373638B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-11-22

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