JPS6320438U - - Google Patents
Info
- Publication number
- JPS6320438U JPS6320438U JP11415886U JP11415886U JPS6320438U JP S6320438 U JPS6320438 U JP S6320438U JP 11415886 U JP11415886 U JP 11415886U JP 11415886 U JP11415886 U JP 11415886U JP S6320438 U JPS6320438 U JP S6320438U
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- semiconductor pellets
- semiconductor
- monitor
- pellets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000008188 pellet Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims 2
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の実施例の半導体ペレツトのレ
テイクル平面図である。 １……半導体ペレツト、２ａ〜２ｉ……モニタ
、３……マスク。
テイクル平面図である。 １……半導体ペレツト、２ａ〜２ｉ……モニタ
、３……マスク。
Claims (1)
- 複数の半導体ペレツトと、この半導体ペレツト
製造および製造後の情報を得るためのモニタで構
成された半導体装置において、各々の前記半導体
ペレツトに異なる前記モニタを配設したことを特
徴とする半導体装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11415886U JPS6320438U (ja) | 1986-07-25 | 1986-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11415886U JPS6320438U (ja) | 1986-07-25 | 1986-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6320438U true JPS6320438U (ja) | 1988-02-10 |
Family
ID=30996637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11415886U Pending JPS6320438U (ja) | 1986-07-25 | 1986-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6320438U (ja) |
-
1986
- 1986-07-25 JP JP11415886U patent/JPS6320438U/ja active Pending