JPS6320353U - - Google Patents
Info
- Publication number
- JPS6320353U JPS6320353U JP11409086U JP11409086U JPS6320353U JP S6320353 U JPS6320353 U JP S6320353U JP 11409086 U JP11409086 U JP 11409086U JP 11409086 U JP11409086 U JP 11409086U JP S6320353 U JPS6320353 U JP S6320353U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- sample holder
- cooling means
- holder
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012212 insulator Substances 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims 6
- 238000010894 electron beam technology Methods 0.000 claims 2
- 239000003507 refrigerant Substances 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986114090U JPH0323652Y2 (enExample) | 1986-07-25 | 1986-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986114090U JPH0323652Y2 (enExample) | 1986-07-25 | 1986-07-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6320353U true JPS6320353U (enExample) | 1988-02-10 |
| JPH0323652Y2 JPH0323652Y2 (enExample) | 1991-05-23 |
Family
ID=30996505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986114090U Expired JPH0323652Y2 (enExample) | 1986-07-25 | 1986-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0323652Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0275548U (enExample) * | 1988-11-26 | 1990-06-08 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50105188A (enExample) * | 1974-01-29 | 1975-08-19 | ||
| JPS5988856U (ja) * | 1982-12-07 | 1984-06-15 | 日本電子株式会社 | 電子線装置等用試料破断装置 |
-
1986
- 1986-07-25 JP JP1986114090U patent/JPH0323652Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50105188A (enExample) * | 1974-01-29 | 1975-08-19 | ||
| JPS5988856U (ja) * | 1982-12-07 | 1984-06-15 | 日本電子株式会社 | 電子線装置等用試料破断装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0275548U (enExample) * | 1988-11-26 | 1990-06-08 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0323652Y2 (enExample) | 1991-05-23 |