JPS63185077U - - Google Patents
Info
- Publication number
- JPS63185077U JPS63185077U JP7599387U JP7599387U JPS63185077U JP S63185077 U JPS63185077 U JP S63185077U JP 7599387 U JP7599387 U JP 7599387U JP 7599387 U JP7599387 U JP 7599387U JP S63185077 U JPS63185077 U JP S63185077U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- liquid
- vacuum processing
- vacuum
- cooling mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001073 sample cooling Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims 3
- 238000001816 cooling Methods 0.000 claims 1
- 238000009834 vaporization Methods 0.000 claims 1
- 230000008016 vaporization Effects 0.000 claims 1
- 239000000110 cooling liquid Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7599387U JPS63185077U (enExample) | 1987-05-22 | 1987-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7599387U JPS63185077U (enExample) | 1987-05-22 | 1987-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63185077U true JPS63185077U (enExample) | 1988-11-28 |
Family
ID=30922658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7599387U Pending JPS63185077U (enExample) | 1987-05-22 | 1987-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63185077U (enExample) |
-
1987
- 1987-05-22 JP JP7599387U patent/JPS63185077U/ja active Pending