JPS63201574A - Inspection jig for ultra-high frequency band circuit element - Google Patents

Inspection jig for ultra-high frequency band circuit element

Info

Publication number
JPS63201574A
JPS63201574A JP62034783A JP3478387A JPS63201574A JP S63201574 A JPS63201574 A JP S63201574A JP 62034783 A JP62034783 A JP 62034783A JP 3478387 A JP3478387 A JP 3478387A JP S63201574 A JPS63201574 A JP S63201574A
Authority
JP
Japan
Prior art keywords
lead terminal
strip line
ultra
coaxial connector
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62034783A
Other languages
Japanese (ja)
Other versions
JPH0746118B2 (en
Inventor
Masaru Takahashi
勝 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62034783A priority Critical patent/JPH0746118B2/en
Publication of JPS63201574A publication Critical patent/JPS63201574A/en
Publication of JPH0746118B2 publication Critical patent/JPH0746118B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To easily connect a strip line with the lead terminal of a body to be inspected without breaking the lead terminal part nor spoiling its outer appearance by connecting them with gas pressure. CONSTITUTION:A fitting part 2 where a body 10 to be inspected and a dielectric substrate 3 are provided to a pedestal 1. The strip line 4 is provided on the dielectric substrate 3, one end is connected to a coaxial connector 5, and specific characteristics impedance equal to that of this coaxial connector 5 is obtained. This nozzle 6 presses and connects the lead terminal 10L of the body 10 to be inspected which is mounted on the fitting part 2 to the other terminal of the strip line 4. Consequently, the lead terminal 10L need not be soldered, so the fitting and connection are easily performed without spoiling the outer appearance, and no extra force is applied, so the lead terminal 10L does not break.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は超高周波帯回路素子用検査治具に関し、特に超
高周波帯におけるフィルタ、アイソレータ等の受動回路
素子、あるいは集積回路、トランジスタ増幅器等の能動
回路素子等を検査、測定するための超高周波帯回路素子
用検査治具に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an inspection jig for ultra-high frequency band circuit elements, and particularly for inspection of passive circuit elements such as filters and isolators in ultra-high frequency bands, integrated circuits, transistor amplifiers, etc. The present invention relates to an ultra-high frequency band circuit element inspection jig for inspecting and measuring active circuit elements and the like.

〔従来の技術〕[Conventional technology]

従来、この種の超高周波帯回路素子用検査治具は、第3
図及び第4図に示すように、被検査物10を搭載するた
めの取付部2を設けた台座1と、この台座1上に設けら
れた誘電体基板3と、台座1に設けられた入出力信号等
の外部接続用の同軸コネクタ5と、誘電体基板3上に設
けられこの同軸コネクタ5と被検査物10のリード端子
Lotとを接続し同軸コネクタ5と等しい所定の特性イ
ンピーダンスをもつストリップライン4とを備え、被検
査物10のリード端子10Lとストリップライン4との
接続は、はんだ8付けするか絶縁体のおさえ棒9により
圧着する構成となっていた。
Conventionally, this type of inspection jig for ultra-high frequency band circuit elements has been
As shown in the figure and FIG. A coaxial connector 5 for external connection of output signals, etc., and a strip provided on the dielectric substrate 3 to connect the coaxial connector 5 and the lead terminal Lot of the object to be inspected 10 and having a predetermined characteristic impedance equal to that of the coaxial connector 5. The strip line 4 is connected to the lead terminal 10L of the object to be inspected 10 by soldering 8 or by crimping with an insulating holding rod 9.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上述した従来の超高周波帯回路素子用検査治具は、リー
ド端子10Lとストリップライン4との接続をはんだ付
けするが絶縁体のおさえ棒9で圧着する構成となってい
るので、はんだ付けする場合は、リード端子10Lには
んだが乗ることにより製品の外観がそこなわれる、はん
だゴテのリーク電流によって回路素子が破壊されること
がある、はんだをするのに人手と時間ががかりコスト高
になる等の欠点がある。
In the above-mentioned conventional inspection jig for ultra-high frequency band circuit elements, the connection between the lead terminal 10L and the strip line 4 is soldered, but the connection is crimped with an insulating holding rod 9. The appearance of the product may be damaged due to solder getting on the lead terminal 10L, the circuit elements may be destroyed due to leakage current from the soldering iron, and the cost increases as it takes time and labor to solder. There are drawbacks.

また、絶縁体のおさえ棒9による場合は、上記のはんだ
付けによる欠点は除かれるものの、おさえ棒9は誘電体
であるのでストリップライン4の上を誘電体が覆った状
態と等価となり、ストリップライン4の特性インピーダ
ンスが変化してしまう、すなわち、所定の特性インピー
ダンスを有する測定系において、その特性インピーダン
スが乱れた部分が存在することになり、測定の精度が低
下する、上からおさえる力によってはリード端子10L
に張力がかかり被検査物1oがリード端子10t、の接
続部で破壊することがある等の欠点がある。
In addition, in the case of using an insulating holding rod 9, the drawbacks due to soldering mentioned above are eliminated, but since the holding rod 9 is a dielectric, it is equivalent to a dielectric covering the strip line 4, and the strip line 4. The characteristic impedance changes. In other words, in a measurement system with a predetermined characteristic impedance, there will be a part where the characteristic impedance is disturbed, reducing measurement accuracy. Terminal 10L
There are drawbacks such as tension being applied to the test object 1o and the test object 1o being broken at the connection portion of the lead terminal 10t.

本発明の目的は、リード端子部分の破損や外観がそこな
われることなく容易にリード端子とストリップラインと
を接続することができ、測定精度を上げることができる
超高周波帯回路素子用検査治具を提供することにある。
An object of the present invention is to provide an inspection jig for ultra-high frequency band circuit elements that can easily connect a lead terminal and a strip line without damaging the lead terminal part or deteriorating its appearance, and that can improve measurement accuracy. Our goal is to provide the following.

〔問題点を解決するための手段〕[Means for solving problems]

本発明の超高周波帯回路素子用検査治具は、被検査物を
搭載する取付部を設けた台座と、この台座上に設けられ
た誘電体基板と、前記台座に設けられた外部接続用の同
軸コネクタと、前記誘電体基板上に設けられ一端が前記
同軸コネクタと接続し所定の特性インピーダンスをもつ
ストリップラインと、前記取付部に搭載された被検査物
のリード端子を気体圧力により前記ストリップラインの
他端に圧着接続する手段とを有している。
The inspection jig for ultra-high frequency band circuit elements of the present invention includes a pedestal provided with a mounting portion for mounting an object to be inspected, a dielectric substrate provided on the pedestal, and a dielectric substrate provided on the pedestal for external connection. A coaxial connector, a strip line provided on the dielectric substrate and having one end connected to the coaxial connector and having a predetermined characteristic impedance, and a lead terminal of the object to be inspected mounted on the mounting section by gas pressure to connect the strip line to the strip line. and means for crimp connection to the other end.

〔実施例〕〔Example〕

次に、本発明の実施例について図面を参照して説明する
Next, embodiments of the present invention will be described with reference to the drawings.

第1図(a)、(b)はそれぞれ本発明の第1の実施例
を示す一部断面平面図及び一部断面側面図である。
FIGS. 1(a) and 1(b) are a partially sectional plan view and a partially sectional side view, respectively, showing a first embodiment of the present invention.

この実施例は、被検査物1oを搭載する取付部2を設け
た台座1と、この台座1上に設けられた誘電体基板3と
、台座1に設けられた入出力信号等の外部接続用の同軸
コネクタ5と、誘電体基板3上に設けられ、一端が同軸
コネクタ5と接続し、この同軸コネクタ5と等しい所定
の特性インピーダンスをもつストリップライン4と、噴
出する気体の圧力によって、取付部2に搭載された被検
査物10のリード端子10tとストリップライン4の他
端とを圧着接続するノズル6とを有する構成となってい
る。
This embodiment includes a pedestal 1 provided with a mounting part 2 for mounting an object to be inspected 1o, a dielectric substrate 3 provided on this pedestal 1, and an external connection for input/output signals etc. provided on the pedestal 1. A coaxial connector 5 is provided on the dielectric substrate 3, one end is connected to the coaxial connector 5, and the strip line 4 has a predetermined characteristic impedance equal to that of the coaxial connector 5. The nozzle 6 connects the lead terminal 10t of the test object 10 mounted on the strip line 2 and the other end of the strip line 4 by crimping.

なお、ストリップライン4の特性インピーダンスは、そ
の幅、誘電体基板3の厚さ及び誘電率等により調整され
る。
Note that the characteristic impedance of the strip line 4 is adjusted by its width, the thickness of the dielectric substrate 3, the dielectric constant, etc.

第2図は本発明の第2の実施例を示す一部断面側面図で
ある。
FIG. 2 is a partially sectional side view showing a second embodiment of the invention.

この実施例が第1の実施例と相違する点は、リード端子
10Lをストリップライン4の他端に圧着接続する手段
として、ストリップライン4のリード端子10Lが配置
される部分から台座1底面に抜ける排気孔7と、この排
気孔7につながる排気管7.とを設けて排気し、リード
端子10Lを吸着してストリップライン4に圧着接続し
た点にある。
The difference between this embodiment and the first embodiment is that as a means for crimping and connecting the lead terminal 10L to the other end of the stripline 4, the lead terminal 10L of the stripline 4 is inserted into the bottom surface of the pedestal 1 from the part where the lead terminal 10L is arranged. An exhaust hole 7 and an exhaust pipe 7 connected to the exhaust hole 7. The lead terminal 10L is attracted and connected to the strip line 4 by crimping.

従って、これら実施例は、リード端子10t、をはんだ
付けする必要がないので外観をそこなわずに容易に取付
は接続することができ、余分な力が加わらないのでリー
ド端子Lot部分の破損もなく、ストリップライン4を
誘電体で覆うこともないので特性インピーダンスが変化
することがなく測定精度を上げることができる。
Therefore, in these embodiments, there is no need to solder the lead terminal 10t, so it can be easily installed and connected without damaging the appearance, and since no extra force is applied, there is no damage to the lead terminal Lot part. Since the strip line 4 is not covered with a dielectric material, the characteristic impedance does not change and measurement accuracy can be improved.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明は、ストリップラインと被検
査物のリード端子との接続を気体圧力により行う構成と
することにより、リード端子部分の破損や外観がそこな
われることなく容易に接続することができ、ストリップ
ラインの特性インピーダンスが乱れないので測定精度を
上げることができる効果がある。
As explained above, the present invention has a configuration in which the connection between the strip line and the lead terminal of the object to be inspected is performed using gas pressure, thereby making it possible to easily connect the strip line and the lead terminal without damaging the lead terminal portion or deteriorating its appearance. This has the effect of increasing measurement accuracy since the characteristic impedance of the strip line is not disturbed.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a)、(b)はそれぞれ本発明の第1の実施例
を示す一部断面平面図及び一部所面側面図、第2図は本
発明の第2の実施例を示す一部断面側面図、第3図は従
来の超高周波帯回路素子用検査治具の第1の例を示す平
面図、第4図(a)、(b)はそれぞれ従来の超高周波
帯回路素子用検査治具の第2の例を示す一部断面平面図
及び側面図である。 1.1.・・・台座、2・・・取付部、3・・・誘電体
基板、4・・・ストリップライン、5・・・同軸コネク
タ、6・・・ノズル、7・・・排気孔、7.・・・排気
管、8・・・はんだ、9・・・おさえ棒、10・・・被
検査物、10t、・・・リード端子。
1(a) and (b) are a partially sectional plan view and a partially side view showing a first embodiment of the present invention, respectively, and FIG. 2 is a partially sectional side view showing a second embodiment of the present invention. FIG. 3 is a plan view showing a first example of a conventional inspection jig for ultra-high frequency band circuit elements, and FIGS. 4 (a) and (b) are respectively cross-sectional side views of conventional inspection tools for ultra-high frequency band circuit elements. FIG. 7 is a partially sectional plan view and a side view showing a second example of the inspection jig. 1.1. . . . Pedestal, 2. Mounting portion, 3. Dielectric substrate, 4. Strip line, 5. Coaxial connector, 6. Nozzle, 7. Exhaust hole, 7. ...Exhaust pipe, 8...Solder, 9...Press rod, 10...Object to be inspected, 10t,...Lead terminal.

Claims (1)

【特許請求の範囲】[Claims]  被検査物を搭載する取付部を設けた台座と、この台座
上に設けられた誘電体基板と、前記台座に設けられた外
部接続用の同軸コネクタと、前記誘電体基板上に設けら
れ一端が前記同軸コネクタと接続し所定の特性インピー
ダンスをもつストリップラインと、前記取付部に搭載さ
れた被検査物のリード端子を気体圧力により前記ストリ
ップラインの他端に圧着接続する手段とを有することを
特徴とする超高周波帯回路素子用検査治具。
A pedestal provided with a mounting portion for mounting an object to be inspected, a dielectric substrate provided on the pedestal, a coaxial connector for external connection provided on the pedestal, and a coaxial connector provided on the dielectric substrate with one end A strip line connected to the coaxial connector and having a predetermined characteristic impedance, and means for crimping and connecting a lead terminal of the object to be inspected mounted on the mounting portion to the other end of the strip line using gas pressure. Inspection jig for ultra-high frequency band circuit elements.
JP62034783A 1987-02-17 1987-02-17 Inspection jig for ultra high frequency band circuit element Expired - Lifetime JPH0746118B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62034783A JPH0746118B2 (en) 1987-02-17 1987-02-17 Inspection jig for ultra high frequency band circuit element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62034783A JPH0746118B2 (en) 1987-02-17 1987-02-17 Inspection jig for ultra high frequency band circuit element

Publications (2)

Publication Number Publication Date
JPS63201574A true JPS63201574A (en) 1988-08-19
JPH0746118B2 JPH0746118B2 (en) 1995-05-17

Family

ID=12423877

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62034783A Expired - Lifetime JPH0746118B2 (en) 1987-02-17 1987-02-17 Inspection jig for ultra high frequency band circuit element

Country Status (1)

Country Link
JP (1) JPH0746118B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05109844A (en) * 1991-10-15 1993-04-30 Nec Yamagata Ltd Measuring jig for semiconductor device
JPH05196686A (en) * 1992-01-20 1993-08-06 Nec Yamagata Ltd Semiconductor measuring jig
JP2009168471A (en) * 2008-01-10 2009-07-30 Tamagawa Electronics Co Ltd Semiconductor device test apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5373869U (en) * 1976-11-22 1978-06-20
JPS61223668A (en) * 1985-03-29 1986-10-04 Nec Corp Output measuring method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5373869U (en) * 1976-11-22 1978-06-20
JPS61223668A (en) * 1985-03-29 1986-10-04 Nec Corp Output measuring method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05109844A (en) * 1991-10-15 1993-04-30 Nec Yamagata Ltd Measuring jig for semiconductor device
JPH05196686A (en) * 1992-01-20 1993-08-06 Nec Yamagata Ltd Semiconductor measuring jig
JP2009168471A (en) * 2008-01-10 2009-07-30 Tamagawa Electronics Co Ltd Semiconductor device test apparatus

Also Published As

Publication number Publication date
JPH0746118B2 (en) 1995-05-17

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