JPS63201332U - - Google Patents
Info
- Publication number
- JPS63201332U JPS63201332U JP9242487U JP9242487U JPS63201332U JP S63201332 U JPS63201332 U JP S63201332U JP 9242487 U JP9242487 U JP 9242487U JP 9242487 U JP9242487 U JP 9242487U JP S63201332 U JPS63201332 U JP S63201332U
- Authority
- JP
- Japan
- Prior art keywords
- levitation
- magnetic
- wafer transfer
- magnet
- guide rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005339 levitation Methods 0.000 claims description 6
Landscapes
- Non-Mechanical Conveyors (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987092424U JPH0638427Y2 (ja) | 1987-06-16 | 1987-06-16 | 磁気浮上型ウエハ搬送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987092424U JPH0638427Y2 (ja) | 1987-06-16 | 1987-06-16 | 磁気浮上型ウエハ搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63201332U true JPS63201332U (no) | 1988-12-26 |
JPH0638427Y2 JPH0638427Y2 (ja) | 1994-10-05 |
Family
ID=30954118
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987092424U Expired - Lifetime JPH0638427Y2 (ja) | 1987-06-16 | 1987-06-16 | 磁気浮上型ウエハ搬送装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0638427Y2 (no) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05181530A (ja) * | 1992-01-07 | 1993-07-23 | Daifuku Co Ltd | 磁気浮上式搬送設備 |
JPH0616206A (ja) * | 1992-07-03 | 1994-01-25 | Shinko Electric Co Ltd | クリーンルーム内搬送システム |
JP2019532486A (ja) * | 2017-08-24 | 2019-11-07 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 真空処理システムにおけるデバイスの非接触搬送用の装置及び方法 |
WO2020241081A1 (ja) * | 2019-05-30 | 2020-12-03 | 日本金銭機械株式会社 | 紙葉類の搬送機構、及び空気流制御装置 |
JP2020196630A (ja) * | 2020-08-11 | 2020-12-10 | 日本金銭機械株式会社 | 空気流制御装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6026130A (ja) * | 1983-07-21 | 1985-02-09 | Sanshin Ind Co Ltd | 内燃機関の負圧制御配管 |
JPS60237848A (ja) * | 1984-05-09 | 1985-11-26 | Mitsubishi Electric Corp | リニアモ−タ搬送装置 |
JPS6293120A (ja) * | 1985-10-16 | 1987-04-28 | Daifuku Co Ltd | リニアモ−タ使用の荷搬送装置 |
-
1987
- 1987-06-16 JP JP1987092424U patent/JPH0638427Y2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6026130A (ja) * | 1983-07-21 | 1985-02-09 | Sanshin Ind Co Ltd | 内燃機関の負圧制御配管 |
JPS60237848A (ja) * | 1984-05-09 | 1985-11-26 | Mitsubishi Electric Corp | リニアモ−タ搬送装置 |
JPS6293120A (ja) * | 1985-10-16 | 1987-04-28 | Daifuku Co Ltd | リニアモ−タ使用の荷搬送装置 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05181530A (ja) * | 1992-01-07 | 1993-07-23 | Daifuku Co Ltd | 磁気浮上式搬送設備 |
JPH0616206A (ja) * | 1992-07-03 | 1994-01-25 | Shinko Electric Co Ltd | クリーンルーム内搬送システム |
JP2019532486A (ja) * | 2017-08-24 | 2019-11-07 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 真空処理システムにおけるデバイスの非接触搬送用の装置及び方法 |
WO2020241081A1 (ja) * | 2019-05-30 | 2020-12-03 | 日本金銭機械株式会社 | 紙葉類の搬送機構、及び空気流制御装置 |
JP2020192241A (ja) * | 2019-05-30 | 2020-12-03 | 日本金銭機械株式会社 | 紙葉類の搬送機構 |
JP2020196630A (ja) * | 2020-08-11 | 2020-12-10 | 日本金銭機械株式会社 | 空気流制御装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0638427Y2 (ja) | 1994-10-05 |