JPS63201089A - Device for detaching and attaching chamber for silicon single crystal pulling up molding machine - Google Patents

Abstract

PURPOSE:To stably detach and attach a chamber by holding the tank of the chamber through the liftable guide shaft and arm provided to a trolley moving along the rail on a gate rack in the horizontal direction, and horizontally moving the tank. CONSTITUTION:The first and second trolleys 14 and 23 are arranged on a couple of rails 12 fixed onto the two gate racks 11 and 11. The guide shaft 16 fixed to the upper part 15 of the tank of the chamber is engaged with the first trolley 14, lifted by a first oil hydraulic cylinder 17, and moved to the left along the rail 12 by the driving of a moving motor 18. The second trolley 23 is then moved onto the chamber along the rail 12 by the driving of the moving motor 18 to hold the upper flange 28 at the lower part 27 of the tank through an arm 29 fixed to the tip of a rod 25 by the operation of a second oil hydraulic cylinder 24, and moved to the right. As a result, the chamber is stably detached and attached, and a pulled-up ingot in the chamber can be safely taken out.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical field to which the invention pertains] The present invention relates to a chamber attachment/detachment device for a silicon single crystal pull molding machine.

The purposes of chamber attachment and detachment in a silicon single crystal pulling machine are: (1) attachment of seeds, (2) removal of the pulled ingot, (3) removal of hot zone parts in the chamber, and (4) transfer to the crucible in the chamber. This is for filling polysilicon (5) and cleaning the inside of the chamber.

[Prior art] A conventional chamber attachment/detachment device has one or two wooden arms that are connected to a tank that forms a chamber, and is raised and lowered by hydraulic or electric screw shaft drive, and rotated around a guide shaft. It is. These methods include a method in which only the upper part of the tank is raised and lowered, a method in which the upper and lower parts of the tank are raised and lowered in the same direction using a single guide shaft, and a method in which the upper and lower parts of the tank are raised and lowered by their respective guide shafts.

However, in a silicon single crystal pulling machine, when pulling is performed by installing ancillary equipment for pulling around the chamber, the conventional guide shaft method described above requires that the ancillary equipment escape from the center of the chamber. It is necessary to stand the shaft upright in a remote position and connect it to the tank by protruding an arm from it. Therefore, the rigidity of the shaft must be increased and the way in which it is supported must be strengthened, which increases the cost and makes it difficult to replace the chamber. There was a drawback that it was difficult to return to the position with good reproducibility.

[Object of the invention] The present invention eliminates such drawbacks, and its object is to:
To provide a chamber attachment/detachment device for a silicon single crystal pulling molding machine, which enables stable attachment and detachment of the chamber even when the above-mentioned incidental equipment is installed around the chamber, and which can safely take out the pulled ingot in the chamber. There is a particular thing.

[Summary of the Invention] The chamber attachment/detachment device for a silicon single crystal pulling molding machine of the present invention includes a pair of rails fixed to the upper part of two circular frames, and a first movement mechanism that moves horizontally along the rails. a first hydraulic cylinder fixed to the first trolley to move the tank top of the chamber up and down;
A second arm that is moved horizontally by the moving mechanism and that grips the lower part of the tank of the chamber when necessary with an arm provided thereon.
It is characterized by consisting of a trolley and a second hydraulic cylinder that is fixed to the second trolley and moves the arm up and down.

[Embodiment of the Invention] The following describes an embodiment of the present invention with reference to FIGS. 1 to 3. 0 Two gate-shaped frames 11 installed on both sides
A pair of rails 12 is fixed to the upper part of the rail 12, and an LM guide 13 is placed on the rail 12. The first trolley 14 moves horizontally on the rail 12 via the LM guide 13, and a guide shaft 16 fixed to the tank upper part 15 of the chamber along the upper part is engaged to be movable up and down. The tank upper part 15 is moved up and down together with the guide shaft 16 by a first hydraulic cylinder 17 fixed to the first trolley 14 .

The first trolley 14 is as shown in FIG.

The first trolley 14 can be moved left and right in FIG. be done. The second trolley 23 that moves left and right on the rail 12 also has a moving motor 18 and a pinion 19, similar to the first moving mechanism described above.
A second moving mechanism composed of the rack 20 and the like is provided, and a rod 25 that moves up and down by a second hydraulic cylinder 24 is supported on the second trolley 23, and a frame 26 is attached to the lower end of the rod 25. An arm 29 is provided which grips the upper flange 28 of the attached tank lower part 27.

Next, the operation of the embodiment described above will be explained. 1st trolley 1
4, only the tank upper part 15 is raised by the first hydraulic cylinder 17, and the tank lower part 27 is placed on the frame 26 and moved to the position shown by the dashed line on the left by the first moving mechanism. When the first trolley 14 moves to the left, the second trolley 23 raises the arm 29 by the second hydraulic cylinder 24, moves to the left to the center position where the first trolley 14 was initially placed, and stops at this position. After that, the arm 29 is lowered and engaged with the upper flange 28 of the tank lower part 27. Subsequently, the tank lower part 27 is raised from above the frame 26 by the second hydraulic cylinder 24, and then returned to the old position on the right side.

When the cleaning of the chamber, etc. is completed in this state, the second trolley 23 moves to the left to the center position, places the tank lower part 27 on the frame 26 by the second hydraulic cylinder 24, and connects the upper frame 28 and the arm 2.9. Release the engagement and return to the right position.

Next, after moving the first trolley 14 to the left to the center position, the tank upper part 15 is lowered by the first hydraulic cylinder 17 and attached onto the tank lower part 27, thereby completing the series of operations. If the rotation speed of the moving motors of the first and second moving structures is adjusted by inverter control, the ingot in the chamber will not come into contact with the inner wall of the chamber during movement, or impact will not be applied to the thin seed portion. Very preferable.

[Effects of the Invention] As explained above, the chamber attachment/detachment device for a silicon single crystal pulling molding machine of the present invention first vertically connects the tank lower part and the tank upper part of the chamber by the first trolley and the second trolley, respectively. The chamber is then moved horizontally to remove it, and when it is installed, it is moved horizontally and then vertically, resulting in a simple structure that is not obstructed by incidental equipment and has a low cost. and stable operation. Furthermore, by controlling the moving motor using an inverter to adjust the moving speed during horizontal movement, the ingot does not come into contact with the inner wall of the chamber or receive impact from the thin seed portion.

[Brief explanation of the drawing]

The drawings show an embodiment of the present invention; FIG. 1 is a front view, FIG. 2 is a side view, and FIG. 3 is an enlarged view of the main part of FIG. 2. 11... Frame, 12... Rail, 13... LM guide. 14...First trolley, 15...Tank top, 16
...Guide shaft, 17...First hydraulic cylinder, 18.
...Movement motor, 19... Pinion, 20... Rack, 23... Second trolley, 24... Second hydraulic cylinder, 25... Rod, 26... Frame, 27...
・Bottom part of the tank. 28... Upper 7 lunges, 29... Arm.

Claims (1)

[Claims] A pair of rails fixed to the tops of two gate-shaped frames;
A first trolley that is moved horizontally along the rail by a first moving mechanism and that is attached to the upper part of the tank in the chamber so as to be able to move up and down; and a first hydraulic cylinder that is fixed to the first trolley and that moves the upper part of the tank up and down. a second trolley that is moved horizontally along the rail by a second moving mechanism and that grips the upper part of the tank of the chamber with an arm provided thereon when necessary; and a second trolley that is fixed to the second trolley and moves the arm up and down. A chamber attachment/detachment device for a silicon single crystal measuring and molding machine, comprising a second hydraulic cylinder for moving the chamber. 2) The chamber attachment/detachment device for a silicon single crystal pulling molding machine according to claim 1, wherein the moving motor of the moving mechanism is controlled by an inverter.