JPS63200958A - Lapping device - Google Patents

Lapping device

Info

Publication number
JPS63200958A
JPS63200958A JP3054387A JP3054387A JPS63200958A JP S63200958 A JPS63200958 A JP S63200958A JP 3054387 A JP3054387 A JP 3054387A JP 3054387 A JP3054387 A JP 3054387A JP S63200958 A JPS63200958 A JP S63200958A
Authority
JP
Japan
Prior art keywords
tape
work
workpiece
wrapping
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3054387A
Other languages
Japanese (ja)
Other versions
JPH07100294B2 (en
Inventor
Nobukazu Hosogai
信和 細貝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SANSHIN SHOKO KK
Original Assignee
SANSHIN SHOKO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SANSHIN SHOKO KK filed Critical SANSHIN SHOKO KK
Priority to JP62030543A priority Critical patent/JPH07100294B2/en
Publication of JPS63200958A publication Critical patent/JPS63200958A/en
Publication of JPH07100294B2 publication Critical patent/JPH07100294B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To lap a workpiece with a combined action of tape travel and vibration, by vibrating a tape holding part in a direction to be crossed with the scanning direction of a lapping tape by a vibrating mechanism, in the case of a lapping device for the thin disc work or the like. CONSTITUTION:A thin disc work W is mounted on a rotary plate 4 and rotated, while a lapping tape T is traveled at low speed to the underside of a pressing body 34 via a guide roller 35, making a mount 19 go down with a lifting cylinder 21, and the tape T is pressed to the work W by the pressing body 34. Simultaneously, when a slide block 8 is vibrated in a direction to be crossed with a traveling direction of the tape T by rotation of a vibro-motor 40 of a vibrating mechanism 39, the work W is efficiently lapped by a combined action of travel of the tape T and its vibration. Thus, a finished surface of the work is made so better, while the working property is improved and, what is more, a mechanical structure is made simplifiable.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はCD用スタンパ、ハードディスク用スタンパ等
の薄円板状のワーク等をラッピングし得るラッピング装
置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a wrapping device capable of wrapping thin disc-shaped works such as CD stampers and hard disk stampers.

〔従来の技術〕[Conventional technology]

従来この種のラッピング装置としてはラップ剤によるい
わゆるラップ盤やパフ研摩機等が知られている。
Conventionally, as this type of lapping device, a so-called lapping machine using a lapping agent, a puff polishing machine, etc. are known.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかしながら上記従来構造の場合充分満足し得るワーク
の仕上面状態を得ることができないことがあり、かつ装
置及び維持コストや作業性の面で不都合が生じている。
However, with the conventional structure described above, it may not be possible to obtain a fully satisfactory finished surface condition of the workpiece, and there are disadvantages in terms of equipment and maintenance costs and workability.

〔問題点を解決するための手段〕[Means for solving problems]

本発明はこれらの不都合を解消することを目的とするも
ので、その要旨は、板状のワークを載置可能な回転板を
もつワーク駆動部と、走行するラッピングテープをリー
クに押圧可能な押圧体をもつテープ保持部と、該テープ
保持部をラブピングテープの走行方向と交差する方向に
振動させる振動機構とから成り、板状のワークをラッピ
ングテープによりラッピングすることを特徴とするラッ
ピング装置にある。
The present invention aims to eliminate these inconveniences, and its gist is to provide a workpiece drive unit having a rotary plate on which a plate-shaped workpiece can be placed, and a pressurizer capable of pressing the running wrapping tape against leakage. A wrapping device comprising a tape holding part having a body and a vibration mechanism that vibrates the tape holding part in a direction crossing the running direction of the rubbing tape, and wrapping a plate-shaped work with a wrapping tape. be.

〔作用〕[Effect]

ワーク駆e部の回転板に板状のワークを載置し、テープ
保持部の押圧体により走行するラッピングテープをワー
クに押圧し、振動機構によりテープ保持部をラッピング
テープの走行方向と交差する方向に振動させると、ワー
クはワークの回転、ラッピングテープの走行及び振動の
複合作用でラッピングされる。
A plate-shaped workpiece is placed on the rotating plate of the workpiece drive section, the pressing body of the tape holding section presses the running wrapping tape against the workpiece, and the vibration mechanism moves the tape holding section in a direction that intersects with the running direction of the wrapping tape. When the workpiece is vibrated, the workpiece is wrapped by the combined effect of the rotation of the workpiece, the running of the wrapping tape, and the vibration.

〔実施例〕〔Example〕

第1図乃至第6図は本発明の実施例を示し、1はワーク
駆動部であって、機台2の中央部に回転軸3を設け、回
転軸3に板状のワークW1この場合薄円板状のスタンパ
を載置可能な回転板4を取付け、回転軸3を回転させる
回転機構(図示省略)を設けたものである。
1 to 6 show an embodiment of the present invention. Reference numeral 1 denotes a work drive unit, in which a rotating shaft 3 is provided in the center of a machine stand 2, and a plate-shaped workpiece W1 in this case is mounted on the rotating shaft 3. A rotating plate 4 on which a disc-shaped stamper can be placed is attached, and a rotating mechanism (not shown) for rotating a rotating shaft 3 is provided.

5はテープ保持部であって、機台2にブラケット6によ
りガイド軸7を上下2段に回転板4の半径方向に横設し
、ガイド軸7にスライド台8をベアリング9により摺動
可能に設け、かつガイド軸7に連結金工Oを図外のベア
リングにより摺動可能に設け、機台2にブラケット11
により移動用シリンダ氏を取付け、移動用シリンダ丘の
ロッドをブラケット13を介して連結台10に連結し、
前記スライド台8に取付部材14を支点軸巧により装着
し、取付部材14を調節長穴16、調節ボルト17及び
ナツト毘により前後傾動可能に設け、取付部材14に取
付台19をガイド軸20により」−下動可能に設け、取
付台19を上下動させる上下動シリンダ21を設け、取
付台19にガイド軸nにより保持台nを上下動可能に設
け、ガイド軸nに保持台nの下限用バネUを設け、かつ
取付台19に調節ねじ部5を設け、保持台器の中央部に
クッションバネ那を設け、クッションバネ%の上方にプ
ランジャ棒刀を設け、プランジャ棒刀に調節ねじ部5の
調節押圧杆Zを当接し、保持台Bの前部に保持軸四をキ
ー(資)により回り止め状態でかつナツト31により上
下方向に調節可能に設け、保持軸四に保持枠32を固定
し、保持枠囲に中央部にはゴム等の弾性材※を被覆した
ローラ状の押圧体計、両側部には案内ローラあを設け、
保持台器に取付ベース詔を取付け、取付ベース圀の両側
位置にラブピングチーブTを巻付けた供給リール訂及び
巻取リール田を設け、ラッピングテープTを供給リール
訂、案内ローラゐ、押圧体U、案内ローラあ及び巻取り
−ルあに掛渡し、ラブピングチーブTを低速走行可能に
構成したものである。
Reference numeral 5 denotes a tape holding section, in which a guide shaft 7 is horizontally installed in the radial direction of the rotary plate 4 in two stages, upper and lower, on the machine base 2 using a bracket 6, and a slide base 8 is slidable on the guide shaft 7 using a bearing 9. At the same time, a connecting metalwork O is provided on the guide shaft 7 so as to be slidable by a bearing (not shown), and a bracket 11 is attached to the machine base 2.
Attach the moving cylinder and connect the rod of the moving cylinder to the connecting base 10 via the bracket 13.
The mounting member 14 is mounted on the slide base 8 by means of a fulcrum shaft, and the mounting member 14 is provided so as to be tiltable back and forth by means of an adjustment elongated hole 16, an adjustment bolt 17 and a nut. - A vertical movement cylinder 21 is provided to move the mounting base 19 up and down, and a holding base n is provided on the mounting base 19 so as to be movable up and down by a guide shaft n.The lower limit of the holding base n is provided on the guide shaft n. A spring U is provided, an adjustment screw portion 5 is provided on the mounting base 19, a cushion spring is provided in the center of the holding device, a plunger rod is provided above the cushion spring, and the adjustment screw portion 5 is provided on the plunger rod. A holding shaft 4 is provided in the front part of the holding base B so that it can be prevented from rotating with a key and can be adjusted in the vertical direction with a nut 31, and a holding frame 32 is fixed on the holding shaft 4. The holding frame is surrounded by a roller-shaped pressing body covered with an elastic material such as rubber* in the center, and guide rollers on both sides.
Attach the mounting base plate to the holder, install a supply reel and a take-up reel with wrapping tape T wrapped around it on both sides of the mounting base, and attach the wrapping tape T to the supply reel, guide roller, and pressing body. U, the guide roller and the winding-lure are wrapped around each other, and the rubbing tip T is configured to be able to run at low speed.

39は振動機構であって、スライド台8に振動用モータ
40を取付け、振動用モータ40の主軸41に連結片4
2を取付け、連結片42に主軸41の軸線に対し偏心す
るカムローラ43を取付け、前記連結台10にカムロー
ラ43に係合する凹溝必を有するガイド片朽を取付けて
構成したものである。
39 is a vibration mechanism, in which a vibration motor 40 is attached to the slide table 8, and a connecting piece 4 is attached to the main shaft 41 of the vibration motor 40.
2, a cam roller 43 eccentric to the axis of the main shaft 41 is attached to the connecting piece 42, and a guide piece having a groove that engages with the cam roller 43 is attached to the connecting base 10.

46は他のラッピング装置であって、上記実施例とほぼ
同様に構成されており、ラッピングテープTの幅及び粗
さ等の種類を異ならせたものである。
Reference numeral 46 denotes another wrapping device, which is constructed in substantially the same manner as in the above embodiment, except that the width and roughness of the wrapping tape T are different.

この実施例は上記構成であるから、薄円板状のワークW
を回転板4上に人為的又は自動的に載置し、回転板4を
図外の回転機構により回転し、ラッピングテープTを低
速走行し、移動用シリンダツにより連結台10、ガイド
片柘及びカムローラ43、振動用モータ40を経る力に
よりスライド台8を萌進し、テープ保持部5の上下用シ
リング21により取付台19を下降し、押圧体あにより
ラッピングテープTを7−クWに押圧し、振動機構39
の振動用モータ40により連結片42を回転し、カムロ
ーラ43と凹溝材との偏心係合作用によりスライド台8
を振動し、取付部材14を介してラブピングチーブTを
走行方向と交差する方向に振動すると、ワークWはワー
クWの回転、ラブピングテープTの走行及び振動の複合
作用でラッピングされる。
Since this embodiment has the above configuration, the thin disk-shaped workpiece W
is manually or automatically placed on the rotary plate 4, the rotary plate 4 is rotated by a rotating mechanism (not shown), the wrapping tape T is run at low speed, and the connecting table 10, guide plate and cam roller are moved by a moving cylinder. 43. The slide table 8 is advanced by the force passed through the vibration motor 40, the mounting table 19 is lowered by the vertical sill 21 of the tape holding part 5, and the wrapping tape T is pressed to 7-ku W by the pressing body. , vibration mechanism 39
The connecting piece 42 is rotated by the vibration motor 40, and the sliding base 8 is rotated by the eccentric engagement between the cam roller 43 and the grooved material.
When the rubbing tape T is vibrated in a direction crossing the running direction through the mounting member 14, the workpiece W is lapped by the combined effect of the rotation of the workpiece W, the running of the rubbing tape T, and the vibration.

このラッピングが終わると上下用シリンダ21及び移動
用シリンダ戊の作動により原位置に復帰する。
When this wrapping is completed, the vertical cylinder 21 and the moving cylinder 21 are operated to return to the original position.

この場合次いで他のラッピング装置46によりラッピン
グされる。
In this case, it is then wrapped by another wrapping device 46.

このためワークWの仕上面を良好にできるとともに構造
の簡素化により装置コスト及び維持コストを低減でき、
かつ作業性を向上できる。
Therefore, the finished surface of the workpiece W can be improved, and the equipment cost and maintenance cost can be reduced by simplifying the structure.
It also improves work efficiency.

この場合取付部材14は前後傾動可能なため、ラブピン
グテープTとワークWとの傾き圧接状態を適正にできる
In this case, since the mounting member 14 can be tilted back and forth, the rubbing tape T and the workpiece W can be brought into proper inclined pressure contact.

〔発明の効果〕〔Effect of the invention〕

本発明は上述の如く、ワークをワークの回転、ラッピン
グテープの走行及び振動の複合作用でラッピングでき、
ワークの仕上面を良好にできるとともに構造の簡素化に
より装置コスト及び維持コストを低減でき、かつ作業性
を向上できる。
As described above, the present invention can wrap a workpiece by the combined action of rotation of the workpiece, running of the wrapping tape, and vibration.
Not only can the finished surface of the workpiece be improved, but also the equipment cost and maintenance cost can be reduced by simplifying the structure, and workability can be improved.

以上、所期の目的を充分達成することができる。As described above, the intended purpose can be fully achieved.

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本発明の一実施例を示すもので、第1図は全体平
面図、第2図はその側面図、第3図はその要部の側面図
、第4図はその平断面図、第5図はその正面図、第6図
はその部分断面図である。 W・・ワーク、T・・ラッピングテープ、1・・ワーク
駆動部、4・・回転板、5・・テープ保持部、U・・押
圧体、39・・振動機構。 昭和62年2月12日 出願人  株式会社  三信商エ フ1凋 7Zり
The drawings show one embodiment of the present invention; FIG. 1 is an overall plan view, FIG. 2 is a side view thereof, FIG. 3 is a side view of the main parts thereof, FIG. 4 is a plan sectional view thereof, and FIG. FIG. 5 is a front view thereof, and FIG. 6 is a partial sectional view thereof. W: Work, T: Wrapping tape, 1: Work drive unit, 4: Rotating plate, 5: Tape holding unit, U: Pressing body, 39: Vibration mechanism. February 12, 1985 Applicant: Sanshinsho F1 Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 板状のワークを載置可能な回転板をもつワーク駆動部と
、走行するラッピングテープをワークに押圧可能な押圧
体をもつテープ保持部と、該テープ保持部をラッピング
テープの走行方向と交差する方向に振動させる振動機構
とから成り、板状のワークをラッピングテープによりラ
ッピングすることを特徴とするラッピング装置。
a work drive unit having a rotary plate on which a plate-shaped work can be placed; a tape holding unit having a pressing body capable of pressing a running wrapping tape against the work; and a tape holding unit that intersects the running direction of the wrapping tape. A wrapping device is characterized in that it consists of a vibration mechanism that vibrates in a direction, and wraps a plate-shaped workpiece with a wrapping tape.
JP62030543A 1987-02-12 1987-02-12 Wrapping device Expired - Lifetime JPH07100294B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62030543A JPH07100294B2 (en) 1987-02-12 1987-02-12 Wrapping device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62030543A JPH07100294B2 (en) 1987-02-12 1987-02-12 Wrapping device

Publications (2)

Publication Number Publication Date
JPS63200958A true JPS63200958A (en) 1988-08-19
JPH07100294B2 JPH07100294B2 (en) 1995-11-01

Family

ID=12306706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62030543A Expired - Lifetime JPH07100294B2 (en) 1987-02-12 1987-02-12 Wrapping device

Country Status (1)

Country Link
JP (1) JPH07100294B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01164055U (en) * 1988-04-30 1989-11-15
JPH06155270A (en) * 1992-11-11 1994-06-03 Mitsubishi Kasei Corp Texture device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7351871B2 (en) * 2021-05-06 2023-09-27 本田技研工業株式会社 polishing equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5362296A (en) * 1976-11-13 1978-06-03 Kondo Gizaburou Super finishing machine
JPS61146465A (en) * 1984-12-21 1986-07-04 Y A Shii Kk Floppy disk grinding attachment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5362296A (en) * 1976-11-13 1978-06-03 Kondo Gizaburou Super finishing machine
JPS61146465A (en) * 1984-12-21 1986-07-04 Y A Shii Kk Floppy disk grinding attachment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01164055U (en) * 1988-04-30 1989-11-15
JPH06155270A (en) * 1992-11-11 1994-06-03 Mitsubishi Kasei Corp Texture device

Also Published As

Publication number Publication date
JPH07100294B2 (en) 1995-11-01

Similar Documents

Publication Publication Date Title
JPS63200958A (en) Lapping device
JPH05329759A (en) Wafer material edge face polishing device
JP3368497B2 (en) Multi-axis horizontal polishing machine
JPH0283160A (en) Grinding device for belt stock
JPH0641092B2 (en) Polishing method for convex spherical end face of optical connector core
JP3404579B2 (en) Polishing device for both shafts
JPS6014669B2 (en) Finishing method and device for metal disc
JP2009004579A (en) Polishing apparatus for semiconductor wafer notch end face, and polishing head used for the same
JP3012789B2 (en) Wrapping equipment
KR101273938B1 (en) Polishing method using pad tool with a lower position
JPH0911110A (en) Small contact wheel type polishing machine
JP2600394Y2 (en) Sander for processing narrow concave parts
JP2630033B2 (en) Double-side polishing machine
JPH10128646A (en) Both surface grinding device for thin plate disk-shaped workpiece
JP3094355B2 (en) Wet polishing method and apparatus therefor
JPH06170729A (en) Double side polishing device
JP2547484B2 (en) Polishing equipment
JPS62125538A (en) Lapping head for magnetic disk
JPH0417321Y2 (en)
JPH048468A (en) Work polisher
JPH04146072A (en) Mirror-surface polishing apparatus and method for stainless coil
JPH06254757A (en) Sander for machining narrow recessed part
JP2890772B2 (en) Polishing method and apparatus for plate-like body
JPH081489A (en) Both corner edge chamfering method for plate material and its device
JPH03256660A (en) Work polishing machine