JPS63195734U - - Google Patents

Info

Publication number
JPS63195734U
JPS63195734U JP8737187U JP8737187U JPS63195734U JP S63195734 U JPS63195734 U JP S63195734U JP 8737187 U JP8737187 U JP 8737187U JP 8737187 U JP8737187 U JP 8737187U JP S63195734 U JPS63195734 U JP S63195734U
Authority
JP
Japan
Prior art keywords
wafer
transfer jig
wafer transfer
cassette
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8737187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8737187U priority Critical patent/JPS63195734U/ja
Publication of JPS63195734U publication Critical patent/JPS63195734U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
JP8737187U 1987-06-05 1987-06-05 Pending JPS63195734U (US07943777-20110517-C00090.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8737187U JPS63195734U (US07943777-20110517-C00090.png) 1987-06-05 1987-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8737187U JPS63195734U (US07943777-20110517-C00090.png) 1987-06-05 1987-06-05

Publications (1)

Publication Number Publication Date
JPS63195734U true JPS63195734U (US07943777-20110517-C00090.png) 1988-12-16

Family

ID=30944517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8737187U Pending JPS63195734U (US07943777-20110517-C00090.png) 1987-06-05 1987-06-05

Country Status (1)

Country Link
JP (1) JPS63195734U (US07943777-20110517-C00090.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014222700A (ja) * 2013-05-13 2014-11-27 三菱電機株式会社 ウエハの移し換え治具及びウエハの移し換え方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014222700A (ja) * 2013-05-13 2014-11-27 三菱電機株式会社 ウエハの移し換え治具及びウエハの移し換え方法

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