JPS63195550U - - Google Patents

Info

Publication number
JPS63195550U
JPS63195550U JP8602987U JP8602987U JPS63195550U JP S63195550 U JPS63195550 U JP S63195550U JP 8602987 U JP8602987 U JP 8602987U JP 8602987 U JP8602987 U JP 8602987U JP S63195550 U JPS63195550 U JP S63195550U
Authority
JP
Japan
Prior art keywords
exhaust
flow path
reaction vessel
optical fiber
gas supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8602987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0454190Y2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8602987U priority Critical patent/JPH0454190Y2/ja
Publication of JPS63195550U publication Critical patent/JPS63195550U/ja
Application granted granted Critical
Publication of JPH0454190Y2 publication Critical patent/JPH0454190Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
JP8602987U 1987-06-02 1987-06-02 Expired JPH0454190Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8602987U JPH0454190Y2 (de) 1987-06-02 1987-06-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8602987U JPH0454190Y2 (de) 1987-06-02 1987-06-02

Publications (2)

Publication Number Publication Date
JPS63195550U true JPS63195550U (de) 1988-12-15
JPH0454190Y2 JPH0454190Y2 (de) 1992-12-18

Family

ID=30941967

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8602987U Expired JPH0454190Y2 (de) 1987-06-02 1987-06-02

Country Status (1)

Country Link
JP (1) JPH0454190Y2 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06235829A (ja) * 1993-02-10 1994-08-23 Sumitomo Electric Ind Ltd 光ファイバ用ガラス母材の製造方法および装置
JP2008137871A (ja) * 2006-12-05 2008-06-19 Covalent Materials Tokuyama Corp 合成シリカガラス製造装置、合成シリカガラス製造方法
JP2009132549A (ja) * 2007-11-29 2009-06-18 Covalent Materials Tokuyama Corp 合成石英ガラスの製造装置
JP2009132551A (ja) * 2007-11-29 2009-06-18 Covalent Materials Corp 合成シリカガラスの製造装置
JP2012158516A (ja) * 2012-03-28 2012-08-23 Covalent Materials Corp 合成シリカガラスの製造装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06235829A (ja) * 1993-02-10 1994-08-23 Sumitomo Electric Ind Ltd 光ファイバ用ガラス母材の製造方法および装置
JP2008137871A (ja) * 2006-12-05 2008-06-19 Covalent Materials Tokuyama Corp 合成シリカガラス製造装置、合成シリカガラス製造方法
JP4668890B2 (ja) * 2006-12-05 2011-04-13 コバレントマテリアル徳山株式会社 合成シリカガラス製造装置、合成シリカガラス製造方法
JP2009132549A (ja) * 2007-11-29 2009-06-18 Covalent Materials Tokuyama Corp 合成石英ガラスの製造装置
JP2009132551A (ja) * 2007-11-29 2009-06-18 Covalent Materials Corp 合成シリカガラスの製造装置
JP2012158516A (ja) * 2012-03-28 2012-08-23 Covalent Materials Corp 合成シリカガラスの製造装置

Also Published As

Publication number Publication date
JPH0454190Y2 (de) 1992-12-18

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