JPS63194581A - Manufacture of piezoelectric actuator - Google Patents
Manufacture of piezoelectric actuatorInfo
- Publication number
- JPS63194581A JPS63194581A JP62027540A JP2754087A JPS63194581A JP S63194581 A JPS63194581 A JP S63194581A JP 62027540 A JP62027540 A JP 62027540A JP 2754087 A JP2754087 A JP 2754087A JP S63194581 A JPS63194581 A JP S63194581A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- conductive elastic
- plate
- electrode
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 238000000034 method Methods 0.000 claims abstract description 11
- 230000010287 polarization Effects 0.000 claims description 9
- 238000010030 laminating Methods 0.000 claims description 2
- 230000008602 contraction Effects 0.000 abstract description 7
- 230000010355 oscillation Effects 0.000 abstract 1
- 238000000926 separation method Methods 0.000 description 8
- 238000005520 cutting process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910003781 PbTiO3 Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
- H02N2/163—Motors with ring stator
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】 (産業上の利用分野〕 本発明は圧電アクチュエータの製造方向に係り。[Detailed description of the invention] (Industrial application field) The present invention relates to the manufacturing direction of piezoelectric actuators.
例えば圧電モータに好適する圧電アクチュエ〜りの製造
方向の改良に関する。For example, the present invention relates to improvements in the manufacturing direction of piezoelectric actuators suitable for piezoelectric motors.
近年、圧電アクチュエータを用いた圧電モータが提案さ
れているが、その圧電アクチュエータとしては、第11
図に示すように、偏平な圧電板1の片面に複数の分割電
極3を形成し5圧電板10対向面には分割電極3と重な
るように共通電極5を形成し、隣合う分割電極3の領域
毎に圧電板lに逆の厚み方向分極を交互に施し、金属製
の導電性弾性板7を分割電極3と接触させるようにして
圧電板Iに接着剤で固着させた構成を有していた。In recent years, piezoelectric motors using piezoelectric actuators have been proposed;
As shown in the figure, a plurality of divided electrodes 3 are formed on one side of a flat piezoelectric plate 1, a common electrode 5 is formed on the opposite surface of the piezoelectric plate 10 so as to overlap with the divided electrodes 3, and It has a structure in which the piezoelectric plate I is alternately polarized in the opposite thickness direction for each region, and the metal conductive elastic plate 7 is fixed to the piezoelectric plate I with adhesive so as to be in contact with the divided electrodes 3. Ta.
このような圧電アクチュエータでは、共通電極5と導電
性弾性板7間すなわち共通電極5と分割電極3間に所定
の交流電圧を印加すると、圧電板1が隣合う分割電極3
毎に交互に伸縮振動(第11図中矢符)を繰り返して圧
電板Iに固着された導電性弾性板7が屈曲振動し、第1
2図に示すように、導電性弾性板7の表面上には縦波と
横波の合成された進行波Aが形成され1時間とともにA
。In such a piezoelectric actuator, when a predetermined alternating current voltage is applied between the common electrode 5 and the conductive elastic plate 7, that is, between the common electrode 5 and the divided electrode 3, the piezoelectric plate 1 is connected to the adjacent divided electrode 3.
The conductive elastic plate 7 fixed to the piezoelectric plate I bends and vibrates by repeating the stretching vibration (arrows in Fig. 11) alternately every time.
As shown in Fig. 2, a traveling wave A, which is a combination of longitudinal waves and transverse waves, is formed on the surface of the conductive elastic plate 7, and the wave A increases over an hour.
.
のように進行する。第12図中符号ωは進行波の横掘幅
、符号Uは縦振幅であり、進行波はこれらの合成された
ものである。Proceed as follows. In FIG. 12, the symbol ω is the horizontal width of the traveling wave, and the symbol U is the vertical amplitude, and the traveling wave is a composite of these.
従って、この導電性弾性板7にスライダー9を載置すれ
ば、その進行波Aによってスライダーを進行波Aの進行
方向と反対方向へ移動させることが可能となる。Therefore, if the slider 9 is placed on the conductive elastic plate 7, the traveling wave A can move the slider in the direction opposite to the traveling direction of the traveling wave A.
そして、上述した圧電アクチュエータは、分割電極3毎
に逆の厚み方向分極を施す必要があるし。In the piezoelectric actuator described above, it is necessary to polarize each divided electrode 3 in the opposite thickness direction.
各分割電極3を正確な位置関係で配列しないと良好な進
行波が生じないので、従来は1枚の圧電板1に分割電極
3および共通電極5を形成し、その分割電極3を用いて
交合に逆の分極を施すとともに導電性弾性板7と貼合わ
せて製造していた。Since good traveling waves cannot be generated unless the divided electrodes 3 are arranged in an accurate positional relationship, conventionally the divided electrodes 3 and the common electrode 5 are formed on one piezoelectric plate 1, and the divided electrodes 3 are used to intersect. The conductive elastic plate 7 was manufactured by applying opposite polarization to the conductive elastic plate 7.
しかしながら、このような製法で作られた圧電アクチュ
エータは、1枚の圧電板1において交互に伸縮振動を生
じさせるから、伸縮振動の大きさが制限されて導電性弾
性板7を大きな変位で屈曲振動させることが困難であっ
た。However, since the piezoelectric actuator manufactured by such a manufacturing method alternately causes stretching vibrations in one piezoelectric plate 1, the magnitude of the stretching vibrations is limited, and the conductive elastic plate 7 is subjected to bending vibrations with a large displacement. It was difficult to do so.
導電性弾性板7を大きな変位で屈曲振動させるには9分
割電極3と共通電極5間に高い駆動電圧を印加すればよ
いが、あまり高い駆動電圧を印加して無理に大きな伸縮
振動を生じさせると、圧電板1に割れが生ずる心配があ
り1品質が低下する。In order to cause the conductive elastic plate 7 to bend and vibrate with a large displacement, it is sufficient to apply a high drive voltage between the 9-divided electrode 3 and the common electrode 5, but applying too high a drive voltage will cause unreasonably large stretching and contraction vibrations. If this happens, there is a risk that the piezoelectric plate 1 will crack, and the quality of the piezoelectric plate 1 will deteriorate.
さらに2分割電極3毎に複数の圧電板を形成して導電性
弾性板7に貼付ける考えもあるが、進行波を生じせるた
めに正確な位置関係で圧電板の伸縮振動領域を形成する
必要があり1個々の圧電板を所定の位置関係で導電性弾
性板7に正確に貼付けることは極めて面倒かつ困難で、
コストの急騰を招く欠点がある。Furthermore, there is an idea to form a plurality of piezoelectric plates for each two-part electrode 3 and attach them to the conductive elastic plate 7, but in order to generate traveling waves, it is necessary to form the expansion/contraction vibration area of the piezoelectric plate in an accurate positional relationship. However, it is extremely troublesome and difficult to accurately attach each piezoelectric plate to the conductive elastic plate 7 in a predetermined positional relationship.
It has the disadvantage of causing a sharp increase in costs.
本発明はこのような従来の欠点を解決するためになされ
たもので、製造が簡単で圧電板に割れを生じさせること
なく大きな伸縮振動を生じさせることが可能な信頼性の
高い圧電アクチュエータの得られる製法を提供するもの
である。The present invention was made to solve these conventional drawbacks, and provides a highly reliable piezoelectric actuator that is easy to manufacture and can generate large stretching vibrations without causing cracks in the piezoelectric plate. It provides a manufacturing method that can be used.
このような問題点を解決するために本発明は。 The present invention aims to solve these problems.
第1図および第2図のように、圧電板11を用意してそ
の圧電板11の片面に互いに間隔を置いて複数の第1の
電極13.17を配列形成し、その圧電板11の対向面
にその第1の電極13.17と対向する第2の電極21
.23を形成する。As shown in FIGS. 1 and 2, a piezoelectric plate 11 is prepared, and a plurality of first electrodes 13, 17 are arranged and formed on one side of the piezoelectric plate 11 at intervals. a second electrode 21 opposite the first electrode 13.17 on the surface;
.. form 23.
他方、金属等からなる導電性弾性体29を用意して(第
4図)、これを第1の電極13.17側もしくは第2の
電極21.23側でその圧電板11に貼合わせる(第5
図)。その圧電板11には導電性弾性体29の貼合わせ
の前もしくは後に。On the other hand, a conductive elastic body 29 made of metal or the like is prepared (FIG. 4), and is bonded to the piezoelectric plate 11 on the first electrode 13.17 side or the second electrode 21.23 side (Fig. 4). 5
figure). Before or after the conductive elastic body 29 is attached to the piezoelectric plate 11.
隣合う第1の電極13.17領域毎に交互に逆方向に分
極処理を施す(第3図)。Polarization treatment is performed alternately in opposite directions for each of the adjacent first electrode 13 and 17 regions (FIG. 3).
それら分極処理工程および貼合わせ工程終了後に、第6
図のように隣合う第1の電極13.17間においてその
圧電板11を分離して圧電アクチュエータを製造する。After the polarization process and bonding process, the sixth
As shown in the figure, the piezoelectric plate 11 is separated between adjacent first electrodes 13 and 17 to produce a piezoelectric actuator.
このような手段を備えた本発明は、一般に第1および第
2の電極13.1?、21.23が極めて正確な位置関
係で簡単に形成され、それら電極の形成された圧電板1
1を導電性弾性板29に貼合わせると、圧電板11の伸
縮振動領域が正確な位置関係で配列されるし、伸縮振動
領域毎に逆の分極処理も簡単にできる。The invention provided with such means generally comprises the first and second electrodes 13.1? , 21, 23 are easily formed with extremely accurate positional relationships, and the piezoelectric plate 1 with these electrodes formed thereon.
1 to the conductive elastic plate 29, the elastic vibration regions of the piezoelectric plate 11 are arranged in an accurate positional relationship, and reverse polarization processing can be easily performed for each elastic vibration region.
一方、導電性弾性扱29に貼合わせた圧電板11を第1
の電極13.17毎に分離しても、各伸縮振動領域の位
置関係も正確に保たれたまま各々の伸縮振動領域が連続
せずに略独立した状態となり、各々の伸縮振動が自由振
動可能となって大きな伸縮振動が生じ易く、大きな伸縮
振動が生じても圧電板11に割れが生じ難いし、同じ大
きさ伸縮振動を発生させるにも、従来よりも小さな駆動
電圧を印加するだけよい。On the other hand, the piezoelectric plate 11 bonded to the conductive elastic material 29 is
Even if the electrodes 13 and 17 are separated, the positional relationship of each elastic vibration area is maintained accurately, and each elastic vibration area is not continuous but becomes almost independent, allowing each elastic vibration to vibrate freely. Therefore, large stretching vibrations are likely to occur, and even if large stretching vibrations occur, the piezoelectric plate 11 is difficult to crack, and in order to generate stretching vibrations of the same magnitude, it is only necessary to apply a smaller drive voltage than in the past.
以下本発明の詳細な説明する。 The present invention will be explained in detail below.
第1図〜第6図は本発明の一実施例を示す工程図である
。1 to 6 are process diagrams showing one embodiment of the present invention.
まず、チタン酸バリウム(BaTi03)やチタン酸ジ
ルコン酸鉛(PbZr03−PbTiO3)等の強誘電
体材料を偏平なリング状に成形・焼成して第1図のよう
な圧電板11を作り、上面(第1図中では隠れる)およ
びこれに対向する下面を研麿する。First, a ferroelectric material such as barium titanate (BaTi03) or lead zirconate titanate (PbZr03-PbTiO3) is formed into a flat ring shape and fired to make a piezoelectric plate 11 as shown in FIG. (hidden in Figure 1) and the lower surface opposite to this are polished.
続いて、第2図Aのように、圧電板11の上面に、所定
の間隔を置いて周方向に配列した8個の分割電極13か
らなる第1の区間電極15と、同様に8個の分割電極1
7からなる第2の区間電極19とを(3/4) λの
間隔を置いて非対称に形成する。符号λは圧電アクチュ
エータの固有振動波長である。Next, as shown in FIG. 2A, a first section electrode 15 consisting of eight divided electrodes 13 arranged in the circumferential direction at predetermined intervals is placed on the top surface of the piezoelectric plate 11; Split electrode 1
7 are formed asymmetrically with an interval of (3/4) λ. The symbol λ is the natural vibration wavelength of the piezoelectric actuator.
圧電板11の下面には、第2図Bに示すように。On the lower surface of the piezoelectric plate 11, as shown in FIG. 2B.
2つの共通電極21.23を非対称に形成する。The two common electrodes 21, 23 are formed asymmetrically.
一方の共通電極21は第1の区間電極15と対向し、他
方の共通電極23は第2の区間電極19と対向している
。One common electrode 21 faces the first section electrode 15 , and the other common electrode 23 faces the second section electrode 19 .
これら分割電極13.17や共通電極21.23は9例
えば銀材料の如き導電性金属材料を圧電板11の上面お
よび下面に蒸着や印刷する等、従来公知の手法によって
形成する。These divided electrodes 13.17 and common electrodes 21.23 are formed by a conventionally known method, such as by vapor depositing or printing a conductive metal material such as silver on the upper and lower surfaces of the piezoelectric plate 11.
次に、圧電板11には1分割電極13および分割電極1
7の各々において、第3図に示すように。Next, the piezoelectric plate 11 is provided with a single divided electrode 13 and a divided electrode 1.
7, as shown in FIG.
交互に逆の厚み方向分極を施して圧電振動子25を形成
する。The piezoelectric vibrator 25 is formed by alternately applying opposite polarization in the thickness direction.
交互に逆の分極を施すには1分割電極13,17のうち
1個置きの分割電極13.17と共通電極21.23間
に高直流電圧を印加する一方9分割電極13.17の残
りの1個置きの電極と共通電極21.23間に逆極性の
高直流電圧を印加すればよい。To alternately apply opposite polarization, a high DC voltage is applied between every other divided electrode 13.17 of the 1 divided electrodes 13, 17 and the common electrode 21.23, while the remaining 9 divided electrodes 13.17 are A high DC voltage of opposite polarity may be applied between every other electrode and the common electrode 21, 23.
次いで2例えば銅合金をリング状に成形加工しかつ上部
に直径方向に沿った多数のスリット27を狭い間隔でく
し歯状に形成した導電性弾性板29を用意する(第4図
)。Next, a conductive elastic plate 29 is prepared by molding, for example, a copper alloy into a ring shape, and having a large number of diametrical slits 27 formed in the shape of a comb at narrow intervals in the upper part (FIG. 4).
そして1分割電極13.17と導電性弾性板29が接触
するようにして圧電振動子25と導電性弾性板29をエ
ポキシ系接着剤にて貼合わせ、第5図のような圧電アク
チュエータを作る。Then, the piezoelectric vibrator 25 and the conductive elastic plate 29 are bonded together using an epoxy adhesive so that the one-segment electrode 13.17 and the conductive elastic plate 29 are in contact with each other, thereby producing a piezoelectric actuator as shown in FIG.
さらに、第6図に示すように3分割電極15や17にあ
って隣合う電極間ギャップ領域31に相当する部分を、
共通電極21.23側がらカッター(図示せず)にて圧
電板11を切削して、各分割電極15.17毎に圧電板
11を分離する。切削する際の目安として、共通電極2
1.23には電極ギャップ領域31に相当する位置に目
印を形成しておくとよい。Furthermore, as shown in FIG.
The piezoelectric plate 11 is cut from the common electrode 21.23 side using a cutter (not shown) to separate the piezoelectric plate 11 into each divided electrode 15.17. As a guide when cutting, common electrode 2
1.23, it is preferable to form a mark at a position corresponding to the electrode gap region 31.
第6図中の符号33は分離溝である。また、切削時に導
電性弾性板29にも極浅い分離溝が形成される場合があ
るが、圧電アクチュエータの動作に支障はない。Reference numeral 33 in FIG. 6 is a separation groove. Furthermore, although an extremely shallow separation groove may be formed in the conductive elastic plate 29 during cutting, this does not impede the operation of the piezoelectric actuator.
こうして製造された圧電アクチュエータは9分割電極1
3.17が導電性弾性板29にて共通接触されており、
第7図に示すように、共通電極21と導電性弾性板29
間に圧電アクチュエータの固有振動数に等しい周波数の
交流電圧A(V(Isinωt)を加え、共通電極23
と導電性弾性板29間には圧電アクチュエータの固有振
動数に等しくかつ時間的位相が90°異なる交流電圧B
(VOcosωt)を印加することにより、圧電板11
が分割電極13.17毎に交互に周方向に伸縮振動する
。なお、共通電極21.23は各々分割されているから
、導線によって共通接続する。The piezoelectric actuator manufactured in this way has nine divided electrodes 1
3.17 are in common contact with the conductive elastic plate 29,
As shown in FIG. 7, the common electrode 21 and the conductive elastic plate 29
An alternating current voltage A (V (Isinωt)) with a frequency equal to the natural frequency of the piezoelectric actuator is applied between the common electrodes 23 and 23.
An alternating current voltage B that is equal to the natural frequency of the piezoelectric actuator and whose temporal phase differs by 90° is applied between the conductive elastic plate 29 and the conductive elastic plate 29.
By applying (VOcosωt), the piezoelectric plate 11
The divided electrodes 13 and 17 alternately expand and contract in the circumferential direction. Note that since the common electrodes 21 and 23 are each divided, they are commonly connected by conductive wires.
そのため、圧電振動子25に貼付けた導電性弾性板29
には異なる2つの定在波が生じ、それら双方の定在波が
干渉して周方向に進行する進行波が生じる(第12図参
照)。従って、導電性弾性板29に負荷を載置すれば、
この進行波によって負荷が移動する。Therefore, the conductive elastic plate 29 attached to the piezoelectric vibrator 25
Two different standing waves are generated, and these two standing waves interfere to generate a traveling wave that travels in the circumferential direction (see FIG. 12). Therefore, if a load is placed on the conductive elastic plate 29,
This traveling wave moves the load.
このように本発明では、圧電振動子25と導電性弾性板
29とを貼合わせた後に圧電板11を個々の分割電極1
3.17毎に切削分離するだけで。In this way, in the present invention, after the piezoelectric vibrator 25 and the conductive elastic plate 29 are pasted together, the piezoelectric plate 11 is attached to the individual divided electrodes 1.
3. Just cut and separate every 17 seconds.
所定の正確な位置関係で分割電極13.17が導電性弾
性板29に配列されるから、−々分割電極毎に形成した
圧電板を貼付けるという面倒な工程が不要で製造が簡単
となる。そして、正確な位置関係の振動領域によって良
好な進行波が得られる。Since the divided electrodes 13, 17 are arranged on the conductive elastic plate 29 in a predetermined and accurate positional relationship, there is no need for the troublesome process of attaching a piezoelectric plate formed for each divided electrode, thereby simplifying manufacturing. A good traveling wave can be obtained by vibrating regions with accurate positional relationships.
しかも5隣合う分割電極13.17間では分離溝33に
よって圧電板11が個々の分割電極13゜17毎に分割
されているから2分割電極13と共通電極21で挟まれ
た圧電板11部分や分割電極17と共通電極23で挟ま
れた圧電板11部分では各々の振動領域が独立し、隣合
う伸縮振動の影響を受けずに十分に伸縮振動が可能とな
り、導電性弾性板29には大きな屈曲振動が生じ、振幅
の大きな進行波が得られる。Moreover, between the five adjacent divided electrodes 13 and 17, the piezoelectric plate 11 is divided into individual divided electrodes 13 and 17 by the separation groove 33, so that the piezoelectric plate 11 sandwiched between the two divided electrodes 13 and the common electrode 21, In the portion of the piezoelectric plate 11 sandwiched between the divided electrode 17 and the common electrode 23, each vibration area is independent, and sufficient stretching vibration is possible without being affected by neighboring stretching vibrations. Bending vibration occurs and a traveling wave with a large amplitude is obtained.
また、共通電極21.23と分割電極13.17間に大
きな駆動電圧を印加して大きな伸縮振動が生じても圧電
板11が割れ難いし、従来と同じレベルの駆動電圧を印
加しても従来例において圧電板11に生じる大きさ以上
の伸縮振動を得ることが可能であるから、従来と同程度
の進行波を得るにはより小さい駆動電圧を印加すればよ
く、駆動電圧を出力する駆動回路の規模を小さくするこ
とが可能となり、駆動回路の消費電力が小さく信頼性が
向上する。In addition, even if a large driving voltage is applied between the common electrode 21.23 and the divided electrode 13.17 and a large expansion/contraction vibration occurs, the piezoelectric plate 11 will not easily break, and even if the same level of driving voltage is applied as before, the piezoelectric plate 11 will not break easily. In the example, since it is possible to obtain an expansion and contraction vibration larger than the magnitude that occurs in the piezoelectric plate 11, in order to obtain a traveling wave of the same degree as the conventional one, it is sufficient to apply a smaller drive voltage, and the drive circuit that outputs the drive voltage It becomes possible to reduce the scale of the drive circuit, thereby reducing the power consumption of the drive circuit and improving reliability.
第8図は本発明によって製造した圧電アクチュエータを
用いた圧電モータを示す図である。FIG. 8 is a diagram showing a piezoelectric motor using a piezoelectric actuator manufactured according to the present invention.
回転軸35を回転自在に支持したステータ基台37にク
ッションシート39を敷き、その上に圧電振動子25と
導電性弾性板29を貼合わせた圧電アクチュエータを取
付けてステータを形成し。A cushion sheet 39 is laid on a stator base 37 that rotatably supports a rotating shaft 35, and a piezoelectric actuator in which a piezoelectric vibrator 25 and a conductive elastic plate 29 are bonded together is attached thereon to form a stator.
導電性弾性板29上にリング状のスライダー41を重ね
るとともにこれを回転軸35に固定してロータを形成し
て圧電モータが構成されている。A piezoelectric motor is constructed by stacking a ring-shaped slider 41 on a conductive elastic plate 29 and fixing this to a rotating shaft 35 to form a rotor.
そして、圧電振動子25に駆動交流電圧を印加させると
、導電性弾性板29の上面に進行波が生じてスライダー
41が回転し1回転軸35から回転力が得られる。なお
、符号43はスプリングであってスライダー41の導電
性弾性板29への加圧力を調節するものである。When a driving AC voltage is applied to the piezoelectric vibrator 25, a traveling wave is generated on the upper surface of the conductive elastic plate 29, the slider 41 rotates, and rotational force is obtained from the one-rotation shaft 35. Note that reference numeral 43 is a spring that adjusts the pressing force of the slider 41 to the conductive elastic plate 29.
上述した第1図に示す実施例は、偏平なリング状の圧電
振動子25とリング状の導電性弾性板29を上下方向で
積層する構成であったが9本発明は筒型の圧電板の内外
面に電極を対向するように形成して圧電振動子を形成し
、その圧電振動子の内側もしくは外側に環状の導電性弾
性板を貼合わせた構成の圧電アクチュエータを製造する
際にも実施可能である。The embodiment shown in FIG. 1 described above has a configuration in which a flat ring-shaped piezoelectric vibrator 25 and a ring-shaped conductive elastic plate 29 are laminated in the vertical direction. It can also be carried out when manufacturing a piezoelectric actuator in which a piezoelectric vibrator is formed by forming electrodes on the inner and outer surfaces facing each other, and a ring-shaped conductive elastic plate is attached to the inside or outside of the piezoelectric vibrator. It is.
さらに1本発明は、第9図に示すように、長方形の圧電
板45の片面に分割電極(第9図中限れる)を所定の間
隔で直線状に配列形成する一方。Another aspect of the present invention is that, as shown in FIG. 9, split electrodes (limited to the middle of FIG. 9) are arranged linearly at predetermined intervals on one side of a rectangular piezoelectric plate 45.
裏面に共通電極47を形成し、各電極間ギャップ領域に
おいて共通電極47側から圧電板45を切削分離する製
造方法も可能である。符号49は分離溝であり、符号5
1は圧電板45と貼合わせる導電性弾性板である。A manufacturing method is also possible in which the common electrode 47 is formed on the back surface and the piezoelectric plate 45 is cut and separated from the common electrode 47 side in each inter-electrode gap region. Reference numeral 49 is a separation groove, and reference numeral 5 is a separation groove.
1 is a conductive elastic plate that is bonded to the piezoelectric plate 45.
このような構成の圧電アクチュエータでは、直線状に進
行する進行波が導電性弾性板51に生じるから、直線方
向に負荷を移動させることが可能となる。In the piezoelectric actuator having such a configuration, a linear traveling wave is generated in the conductive elastic plate 51, so that it is possible to move the load in a linear direction.
このように、圧電板111.45の切削分離方向は分割
電極13.17の配列伏態シこ応じて選定すればよく1
分割電極13.17の配列方向を横切る方向であればよ
く、さらに分離手法は切削に限定されない。In this way, the direction in which the piezoelectric plate 111.45 is cut and separated can be selected depending on the arrangement and layout of the divided electrodes 13.17.
Any direction may be used as long as it crosses the arrangement direction of the divided electrodes 13, 17, and the separation method is not limited to cutting.
また1本発明は、第10図に示すように、圧電板53の
片面に分割電極55を、対向面に共通電極57を形成し
、共通電極57を導電性弾性板59に接触させるように
して圧電板53と導電性弾性板59を貼合わせ2分割電
極55側から圧電板53を切削分離して分離溝61を形
成する手法も可能である。Further, in the present invention, as shown in FIG. 10, a divided electrode 55 is formed on one side of a piezoelectric plate 53 and a common electrode 57 is formed on the opposite side, and the common electrode 57 is brought into contact with a conductive elastic plate 59. It is also possible to form the separation groove 61 by laminating the piezoelectric plate 53 and the conductive elastic plate 59 and cutting and separating the piezoelectric plate 53 from the two-part electrode 55 side.
このように2分割電極55側から圧電板53を分離する
手法では3分離位置の目印を予め共通電極57に形成す
る必要はないし、圧電板53を導電性弾性板59に貼付
けた後に分極処理可能である。In this method of separating the piezoelectric plate 53 from the two-divided electrode 55 side, it is not necessary to form marks for the three separation positions on the common electrode 57 in advance, and polarization can be performed after the piezoelectric plate 53 is attached to the conductive elastic plate 59. It is.
本発明においては、圧電板11,45.53や導電性弾
性板29,51.59の形状は圧電アクチュエータを駆
動源として用いる機器に応じて変形可能であり1分離す
る位置も任意であって全ての分割電極13,17.55
間のギャップ領域に形成する必要はない。In the present invention, the shapes of the piezoelectric plates 11, 45, 53 and the conductive elastic plates 29, 51, 59 can be deformed depending on the device that uses the piezoelectric actuator as a drive source, and the positions separated by one can be arbitrary. divided electrode 13, 17.55
There is no need to form it in the gap region between.
以上説明したように本発明の圧電アクチュエータの製造
方法は、圧電板と導電性弾性体の貼付けの前もしくは後
に隣合う第1の電極領域毎に交互に逆方向にその圧電板
に分極処理を施し、その後に隣合う第1の電極間におい
てその圧電板を分離するから9分割電極毎に形成した圧
電板を貼付けることなく圧電板の伸縮振動領域が正確な
位置関係で導電性弾性板に形成されると同時に、極めて
簡単に伸縮振動領域が独立位置関係で配列される。As explained above, the piezoelectric actuator manufacturing method of the present invention involves polarizing the piezoelectric plate alternately in opposite directions for each adjacent first electrode region before or after pasting the piezoelectric plate and the conductive elastic body. Then, the piezoelectric plate is separated between the adjacent first electrodes, so that the piezoelectric plate formed for each 9-divided electrode is formed on the conductive elastic plate so that the expansion and contraction vibration regions of the piezoelectric plate are accurately positioned. At the same time, the expansion and contraction vibration regions can be arranged in an independent positional relationship very easily.
そのため、製造が簡単でコスト高を抑えることができる
し、振幅の大きな進行波を得ることが可能であるととも
に2品質が低下せず信頼性も向上する。Therefore, manufacturing is simple and costs can be suppressed, a traveling wave with a large amplitude can be obtained, and reliability is improved without degrading quality.
なお9本発明の圧電アクチュエータの応用例としては、
上述した圧電モータの他にも種々に応用可能である。9 Application examples of the piezoelectric actuator of the present invention include:
In addition to the piezoelectric motor described above, various other applications are possible.
第1図〜第6図は本発明に係る圧電アクチュエータの製
造方法の一実施例を示す工程図、第7図は第1図〜第6
図によって製造された圧電アクチュエータの動作を説明
する図、第8図は本発明によって製造された圧電アクチ
ュエータを用いた電子機器を圧電モータを例にして示す
斜視図(一部破断して示す)、第9図および第10図は
本発明の圧電アクチュエータの製造方法の他の例を示す
斜視図および要部断面図、第11図は従来の圧電アクチ
ュエータを示す部分断面図、第12図は圧電アクチュエ
ータの動作を説明する図である。
1.11,45.53・・・・圧電板
3.13,17.55・・・・第1の電極(分割電極)
5.21.23・47.57・第2の電極(共通電極)
7.29,51.59・・・・導電性弾性扱く導電性弾
性板)1 to 6 are process diagrams showing an embodiment of the piezoelectric actuator manufacturing method according to the present invention, and FIG.
FIG. 8 is a perspective view (partially cut away) showing an electronic device using a piezoelectric actuator manufactured according to the present invention using a piezoelectric motor as an example; 9 and 10 are perspective views and sectional views of essential parts showing other examples of the piezoelectric actuator manufacturing method of the present invention, FIG. 11 is a partial sectional view showing a conventional piezoelectric actuator, and FIG. 12 is a piezoelectric actuator. FIG. 1.11, 45.53... Piezoelectric plate 3.13, 17.55... First electrode (divided electrode) 5.21.23, 47.57, Second electrode (common electrode) 7.29, 51.59... conductive elastic plate treated with conductive elastic)
Claims (1)
を配列形成する一方,前記圧電板の対向面に前記第1の
電極と対向する第2の電極を形成する工程と, 隣合う前記第1の電極領域における前記圧電板に交互に
逆方向の分極処理を施す工程と, 前記第1もしくは第2の電極側で前記圧電板と導電性弾
性体を貼合わせる工程と, 前記分極処理工程および前記貼合わせ工程終了後に隣合
う前記第1の電極間において前記圧電板を分離する工程
と, を含むことを特徴とする圧電アクチュエータの製造方法
。[Scope of Claims] A plurality of first electrodes are arranged and formed at intervals on one side of a piezoelectric plate, and a second electrode facing the first electrode is formed on the opposite side of the piezoelectric plate. a step of alternately subjecting the piezoelectric plates in the adjacent first electrode regions to polarization treatment in opposite directions; and a step of laminating the piezoelectric plates and a conductive elastic body on the first or second electrode side. A method for manufacturing a piezoelectric actuator, comprising the steps of: separating the piezoelectric plate between the adjacent first electrodes after the polarization treatment step and the bonding step are completed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2754087A JPH0650949B2 (en) | 1987-02-09 | 1987-02-09 | Method for manufacturing piezoelectric actuator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2754087A JPH0650949B2 (en) | 1987-02-09 | 1987-02-09 | Method for manufacturing piezoelectric actuator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63194581A true JPS63194581A (en) | 1988-08-11 |
JPH0650949B2 JPH0650949B2 (en) | 1994-06-29 |
Family
ID=12223919
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2754087A Expired - Lifetime JPH0650949B2 (en) | 1987-02-09 | 1987-02-09 | Method for manufacturing piezoelectric actuator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0650949B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5654604A (en) * | 1993-02-02 | 1997-08-05 | Nikon Corporation | Vibration motor having improved adhesive layer between electromechanical conversion element and elastic body |
WO1997039520A3 (en) * | 1996-04-17 | 1997-11-20 | California Inst Of Techn | High torque ultrasonic motor system |
JP2018108001A (en) * | 2016-12-28 | 2018-07-05 | シンフォニアテクノロジー株式会社 | Work-piece transfer device |
TWI750249B (en) * | 2016-12-28 | 2021-12-21 | 日商昕芙旎雅股份有限公司 | Workpiece conveying device and method for adjusting the work piece conveying device |
-
1987
- 1987-02-09 JP JP2754087A patent/JPH0650949B2/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5654604A (en) * | 1993-02-02 | 1997-08-05 | Nikon Corporation | Vibration motor having improved adhesive layer between electromechanical conversion element and elastic body |
WO1997039520A3 (en) * | 1996-04-17 | 1997-11-20 | California Inst Of Techn | High torque ultrasonic motor system |
JP2018108001A (en) * | 2016-12-28 | 2018-07-05 | シンフォニアテクノロジー株式会社 | Work-piece transfer device |
TWI750249B (en) * | 2016-12-28 | 2021-12-21 | 日商昕芙旎雅股份有限公司 | Workpiece conveying device and method for adjusting the work piece conveying device |
Also Published As
Publication number | Publication date |
---|---|
JPH0650949B2 (en) | 1994-06-29 |
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