JPS63193588U - - Google Patents

Info

Publication number
JPS63193588U
JPS63193588U JP8092987U JP8092987U JPS63193588U JP S63193588 U JPS63193588 U JP S63193588U JP 8092987 U JP8092987 U JP 8092987U JP 8092987 U JP8092987 U JP 8092987U JP S63193588 U JPS63193588 U JP S63193588U
Authority
JP
Japan
Prior art keywords
solvent
tank
cleaning
device characterized
evaporation tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8092987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0529113Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8092987U priority Critical patent/JPH0529113Y2/ja
Publication of JPS63193588U publication Critical patent/JPS63193588U/ja
Application granted granted Critical
Publication of JPH0529113Y2 publication Critical patent/JPH0529113Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP8092987U 1987-05-29 1987-05-29 Expired - Lifetime JPH0529113Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8092987U JPH0529113Y2 (en:Method) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8092987U JPH0529113Y2 (en:Method) 1987-05-29 1987-05-29

Publications (2)

Publication Number Publication Date
JPS63193588U true JPS63193588U (en:Method) 1988-12-13
JPH0529113Y2 JPH0529113Y2 (en:Method) 1993-07-26

Family

ID=30932191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8092987U Expired - Lifetime JPH0529113Y2 (en:Method) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPH0529113Y2 (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05123658A (ja) * 1991-10-17 1993-05-21 Japan Field Kk 被洗浄物の洗浄方法およびその装置
DE19515566A1 (de) * 1995-03-16 1996-10-31 Chugai Ro Kogyo Kaisha Ltd Reinigungsgerät

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108325915A (zh) * 2018-03-28 2018-07-27 安徽尼古拉电子科技有限公司 一种电子元器件表面氧化膜清洗装置及方法
CN108687016A (zh) * 2018-03-28 2018-10-23 安徽尼古拉电子科技有限公司 一种微电子机械清洗装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05123658A (ja) * 1991-10-17 1993-05-21 Japan Field Kk 被洗浄物の洗浄方法およびその装置
DE19515566A1 (de) * 1995-03-16 1996-10-31 Chugai Ro Kogyo Kaisha Ltd Reinigungsgerät
DE19515566C2 (de) * 1995-03-16 1998-10-08 Chugai Ro Kogyo Kaisha Ltd Reinigungsgerät

Also Published As

Publication number Publication date
JPH0529113Y2 (en:Method) 1993-07-26

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