JPS63192458U - - Google Patents

Info

Publication number
JPS63192458U
JPS63192458U JP8305187U JP8305187U JPS63192458U JP S63192458 U JPS63192458 U JP S63192458U JP 8305187 U JP8305187 U JP 8305187U JP 8305187 U JP8305187 U JP 8305187U JP S63192458 U JPS63192458 U JP S63192458U
Authority
JP
Japan
Prior art keywords
electron beam
electron
thermoelectrons
cover
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8305187U
Other languages
English (en)
Other versions
JPH0523565Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8305187U priority Critical patent/JPH0523565Y2/ja
Publication of JPS63192458U publication Critical patent/JPS63192458U/ja
Application granted granted Critical
Publication of JPH0523565Y2 publication Critical patent/JPH0523565Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図は本考案の電子銃の一実施例を示す概略
図、第２図はビーム通過孔を通過する電子ビーム
の電子密度分布状態を示す説明図、第３図は従来
の電子銃を示す概略図、第４図は従来の電子銃を
備えた薄膜生成装置を示す概略図である。 図中、１は電子銃、８は電子ビーム、１１は発
射口、１２はカバ、１３はビーム通過孔である。

Claims (1)

    【実用新案登録請求の範囲】
  1. フイラメントを加熱して熱電子を放出すると共
    に、高圧の加速電圧にて上記熱電子を加速して電
    子ビームを生成し、磁界を形成して該電子ビーム
    を偏向させて試料に照射する電子銃において、上
    記電子ビームの発射口を非磁性体のカバで覆うと
    共に、該カバの電子ビームが通過する部位にそれ
    自体のエネルギによつて開口されるビーム通過孔
    を形成したことを特徴とする電子銃。
JP8305187U 1987-05-29 1987-05-29 Expired - Lifetime JPH0523565Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8305187U JPH0523565Y2 (ja) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8305187U JPH0523565Y2 (ja) 1987-05-29 1987-05-29

Publications (2)

Publication Number Publication Date
JPS63192458U true JPS63192458U (ja) 1988-12-12
JPH0523565Y2 JPH0523565Y2 (ja) 1993-06-16

Family

ID=30936279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8305187U Expired - Lifetime JPH0523565Y2 (ja) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPH0523565Y2 (ja)

Also Published As

Publication number Publication date
JPH0523565Y2 (ja) 1993-06-16

Similar Documents

Publication Publication Date Title
JPS63192458U (ja)
JPH03118600U (ja)
JPH0214364U (ja)
JPS5912258U (ja) 電子線照射装置
JPH0186052U (ja)
JPS62157968U (ja)
JPS6423869U (ja)
JPH0282030U (ja)
JPS63137450U (ja)
JPS6073216U (ja) 磁性膜作製装置
JPS6220500U (ja)
JPH0427558U (ja)
JPS63172050U (ja)
JPH01155696U (ja)
JPS61174162U (ja)
JPS6169266U (ja)
JPS6419245U (ja)
JPH01152075U (ja)
JPH0214662U (ja)
JPS58188000U (ja) 荷電粒子加速器のイオン源コ−ン
JPS647754U (ja)
JPH02131650U (ja)
JPS63109321U (ja)
JPH01119052U (ja)
JPH0294250U (ja)