JPS6319066B2 - - Google Patents

Info

Publication number

JPS6319066B2

JPS6319066B2 JP10303781A JP10303781A JPS6319066B2 JP S6319066 B2 JPS6319066 B2 JP S6319066B2 JP 10303781 A JP10303781 A JP 10303781A JP 10303781 A JP10303781 A JP 10303781A JP S6319066 B2 JPS6319066 B2 JP S6319066B2

Authority

JP

Japan

Prior art keywords

metal foil

temperature

top surface

temperature detection

insulating

Prior art date

1981-06-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 229910052751 metal Inorganic materials 0.000 claims description 24
• 239000002184 metal Substances 0.000 claims description 24
• 239000011888 foil Substances 0.000 claims description 22
• 238000010438 heat treatment Methods 0.000 claims description 20
• 238000001514 detection method Methods 0.000 claims description 16
• 238000000034 method Methods 0.000 claims description 10
• 239000004065 semiconductor Substances 0.000 claims description 10
• 239000003973 paint Substances 0.000 claims description 9
• 238000004519 manufacturing process Methods 0.000 claims description 7
• 239000000126 substance Substances 0.000 claims description 2
• 239000011248 coating agent Substances 0.000 claims 2
• 238000000576 coating method Methods 0.000 claims 2
• 238000005530 etching Methods 0.000 description 8
• 238000009413 insulation Methods 0.000 description 6
• 230000020169 heat generation Effects 0.000 description 5
• HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
• 229910052782 aluminium Inorganic materials 0.000 description 3
• 238000010586 diagram Methods 0.000 description 3
• 239000004677 Nylon Substances 0.000 description 2
• 239000004698 Polyethylene Substances 0.000 description 2
• 229910052802 copper Inorganic materials 0.000 description 2
• 150000002739 metals Chemical class 0.000 description 2
• 229920001778 nylon Polymers 0.000 description 2
• -1 polyethylene Polymers 0.000 description 2
• 229920000573 polyethylene Polymers 0.000 description 2
• 239000004593 Epoxy Substances 0.000 description 1
• 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
• BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• 238000002474 experimental method Methods 0.000 description 1
• RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
• 239000007788 liquid Substances 0.000 description 1
• 230000007257 malfunction Effects 0.000 description 1
• 229910001120 nichrome Inorganic materials 0.000 description 1
• 230000002265 prevention Effects 0.000 description 1
• 238000003672 processing method Methods 0.000 description 1
• 235000011121 sodium hydroxide Nutrition 0.000 description 1
• 239000002904 solvent Substances 0.000 description 1