JPS63188947U - - Google Patents
Info
- Publication number
- JPS63188947U JPS63188947U JP8059587U JP8059587U JPS63188947U JP S63188947 U JPS63188947 U JP S63188947U JP 8059587 U JP8059587 U JP 8059587U JP 8059587 U JP8059587 U JP 8059587U JP S63188947 U JPS63188947 U JP S63188947U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- wafer
- take
- stored
- machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 5
- 210000000078 claw Anatomy 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Pile Receivers (AREA)
Description
第１図と第２図は本考案に係るウエーハ立替機
の一実施例を示す概略側面図と概略平面図、第３
図は第１図及び第２図に示すウエーハ立替機に含
まれるホルダーの要部側面図、第４図は第３図の
ホルダーに含まれるローラーの側面図、第５図は
第４図の要部拡大側面図、第６図乃至第９図は本
考案に係るウエーハ立替作業を順に示す各平面図
、第１０図は第１図に含まれるボートに傾斜して
整列・収納されたウエーハの概略側面図、第１１
図は裏面同士、密着して整列・収納させたウエー
ハの部分側面図、第１２図はＢａｃｋ ｔｏ Ｂ
ａｃｋ方式により熱処理装置の一具体例を示す概
略平面図である。
１，１３…半導体ウエーハ、５…第１のウエー
ハ収納器［キヤリア］、６…第２のウエーハ収納
器［ボート］、９…ホルダー、１０…第１の保持
爪、７…第１の取り出し機［プツシヤー］、８…
第２の取り出し機［プシヤー］、１１…第２の保
持爪、１２…ローラー、１２ａ…テーパ状溝。
1 and 2 are a schematic side view and a schematic plan view showing one embodiment of a wafer reloading machine according to the present invention, and FIG.
The figure is a side view of the main part of the holder included in the wafer tipping machine shown in Figures 1 and 2, Figure 4 is a side view of the roller included in the holder in Figure 3, and Figure 5 is the main part of the holder in Figure 4. FIGS. 6 to 9 are plan views sequentially showing the wafer stand-up work according to the present invention, and FIG. 10 is a schematic diagram of the wafers arranged and stored at an angle in the boat included in FIG. 1. Side view, 11th
The figure is a partial side view of wafers aligned and stored in close contact with each other, and Figure 12 is Back to B.
FIG. 2 is a schematic plan view showing a specific example of a heat treatment apparatus using the ack method. DESCRIPTION OF SYMBOLS 1, 13... Semiconductor wafer, 5... First wafer storage [carrier], 6... Second wafer storage [boat], 9... Holder, 10... First holding claw, 7... First take-out machine [Putshya], 8...
Second take-out machine [pusher], 11... second holding claw, 12... roller, 12a... tapered groove.
Claims (1)
ハ収納器より半導体ウエーハを取り出し機により
取り出して、上記収納器の上方に離隔したホルダ
ーへ一担収容保持した後、ホルダー下方に離隔し
た、第２のウエーハ収納器へ、半導体ウエーハを
収納するものにおいて、 上記第１のウエーハ収納器より半導体ウエーハ
を取り出す取り出し機を回転可能に設定したこと
を特徴とするウエーハ交替機。[Claim for Utility Model Registration] Semiconductor wafers are taken out by a take-out machine from a first wafer storage device in which semiconductor wafers are arranged and stored, and after being stored and held in a holder spaced apart above the storage device, A wafer changing machine for storing semiconductor wafers in a second wafer storage container spaced apart from each other, characterized in that a take-out machine for taking out the semiconductor wafers from the first wafer storage container is rotatably set.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8059587U JPS63188947U (en) | 1987-05-26 | 1987-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8059587U JPS63188947U (en) | 1987-05-26 | 1987-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63188947U true JPS63188947U (en) | 1988-12-05 |
Family
ID=30931542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8059587U Pending JPS63188947U (en) | 1987-05-26 | 1987-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63188947U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6384043A (en) * | 1986-09-26 | 1988-04-14 | Koyo Rindobaagu Kk | Shifter for wafer |
-
1987
- 1987-05-26 JP JP8059587U patent/JPS63188947U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6384043A (en) * | 1986-09-26 | 1988-04-14 | Koyo Rindobaagu Kk | Shifter for wafer |
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