JPH0257964U - - Google Patents
Info
- Publication number
- JPH0257964U JPH0257964U JP13832288U JP13832288U JPH0257964U JP H0257964 U JPH0257964 U JP H0257964U JP 13832288 U JP13832288 U JP 13832288U JP 13832288 U JP13832288 U JP 13832288U JP H0257964 U JPH0257964 U JP H0257964U
- Authority
- JP
- Japan
- Prior art keywords
- growth
- substrate
- solution
- liquid phase
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000007791 liquid phase Substances 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図は本考案の化合物半導体液相成長治具の
一実施例を示すスライドボート横断面図である。
１：基板、２：基板ホルダー、３：溶液ホルダ
ー、４Ａ，４Ｂ，４Ｃ，４Ｄ：溶液、５Ａ，５Ｂ
：溶液溜、８：成長液ホルダー。
FIG. 1 is a cross-sectional view of a slide boat showing an embodiment of the compound semiconductor liquid phase growth jig of the present invention. 1: Substrate, 2: Substrate holder, 3: Solution holder, 4A, 4B, 4C, 4D: Solution, 5A, 5B
: Solution reservoir, 8: Growth solution holder.
Claims (1)
する成長液ホルダーとを有するスライドボートを
備え、前記基板に前記成長溶液を接触させて液相
エピタキシヤル成長を行わせる化合物半導体液相
成長治具において、前記成長液ホルダーに、前記
基板を対向して前記成長溶液を貯留する容積の異
なる複数個の溶液溜が設けてあることを特徴とす
る化合物半導体液相成長治具。 A compound semiconductor liquid phase growth jig comprising a slide boat having a substrate holder for holding a substrate and a growth solution holder for storing a growth solution, and for performing liquid phase epitaxial growth by bringing the growth solution into contact with the substrate, A compound semiconductor liquid phase growth jig, characterized in that the growth solution holder is provided with a plurality of solution reservoirs having different volumes that store the growth solution while facing the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13832288U JPH0257964U (en) | 1988-10-24 | 1988-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13832288U JPH0257964U (en) | 1988-10-24 | 1988-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0257964U true JPH0257964U (en) | 1990-04-26 |
Family
ID=31400552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13832288U Pending JPH0257964U (en) | 1988-10-24 | 1988-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0257964U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019208121A1 (en) * | 2018-04-24 | 2019-10-31 | 日本電産サンキョー株式会社 | Information reading device and method for controlling same |
-
1988
- 1988-10-24 JP JP13832288U patent/JPH0257964U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019208121A1 (en) * | 2018-04-24 | 2019-10-31 | 日本電産サンキョー株式会社 | Information reading device and method for controlling same |