JPS6318858B2 - - Google Patents

Info

Publication number
JPS6318858B2
JPS6318858B2 JP55177969A JP17796980A JPS6318858B2 JP S6318858 B2 JPS6318858 B2 JP S6318858B2 JP 55177969 A JP55177969 A JP 55177969A JP 17796980 A JP17796980 A JP 17796980A JP S6318858 B2 JPS6318858 B2 JP S6318858B2
Authority
JP
Japan
Prior art keywords
pattern
layer
patterned
sub
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55177969A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5698830A (en
Inventor
Dabitsudo Jon Binton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of JPS5698830A publication Critical patent/JPS5698830A/ja
Publication of JPS6318858B2 publication Critical patent/JPS6318858B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/167—X-ray
    • Y10S430/168—X-ray exposure process

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP17796980A 1979-12-18 1980-12-16 Method of manufacturing microminiature solidstate device Granted JPS5698830A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB7943449A GB2066487B (en) 1979-12-18 1979-12-18 Alignment of exposure masks

Publications (2)

Publication Number Publication Date
JPS5698830A JPS5698830A (en) 1981-08-08
JPS6318858B2 true JPS6318858B2 (show.php) 1988-04-20

Family

ID=10509905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17796980A Granted JPS5698830A (en) 1979-12-18 1980-12-16 Method of manufacturing microminiature solidstate device

Country Status (6)

Country Link
US (1) US4377627A (show.php)
JP (1) JPS5698830A (show.php)
DE (1) DE3046856A1 (show.php)
FR (1) FR2472213A1 (show.php)
GB (1) GB2066487B (show.php)
IE (1) IE50699B1 (show.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH045663U (show.php) * 1990-04-28 1992-01-20

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4407933A (en) * 1981-06-11 1983-10-04 Bell Telephone Laboratories, Incorporated Alignment marks for electron beam lithography
DE3235064A1 (de) * 1982-09-22 1984-03-22 Siemens AG, 1000 Berlin und 8000 München Tunnelkathodenmaske fuer die elektronenlithografie, verfahren zu ihrer herstellung und verfahren zu ihrem betrieb
JPS6010727A (ja) * 1983-06-30 1985-01-19 Toshiba Corp 位置合わせ方法
US4608112A (en) * 1984-05-16 1986-08-26 The United States Of America As Represented By The Secretary Of The Air Force Mask aligner for solar cell fabrication
US4547958A (en) * 1984-05-16 1985-10-22 The United States Of America As Represented By The Secretary Of The Air Force VMJ Solar cell fabrication process using mask aligner
US4690880A (en) * 1984-07-20 1987-09-01 Canon Kabushiki Kaisha Pattern forming method
GB2180669A (en) * 1985-09-20 1987-04-01 Phillips Electronic And Associ An electron emissive mask for an electron beam image projector, its manufacture, and the manufacture of a solid state device using such a mask
US4713315A (en) * 1986-12-09 1987-12-15 Smith David V Wire tag etching system
US4948706A (en) * 1987-12-30 1990-08-14 Hoya Corporation Process for producing transparent substrate having thereon transparent conductive pattern elements separated by light-shielding insulating film, and process for producing surface-colored material
JP2794793B2 (ja) * 1989-06-13 1998-09-10 ソニー株式会社 露光用マスクの製造方法
JPH0521310A (ja) * 1991-07-11 1993-01-29 Canon Inc 微細パタン形成方法
US5382483A (en) * 1992-01-13 1995-01-17 International Business Machines Corporation Self-aligned phase-shifting mask
JP3334911B2 (ja) * 1992-07-31 2002-10-15 キヤノン株式会社 パターン形成方法
WO1994017449A1 (en) * 1993-01-21 1994-08-04 Sematech, Inc. Phase shifting mask structure with multilayer optical coating for improved transmission
US5418095A (en) * 1993-01-21 1995-05-23 Sematech, Inc. Method of fabricating phase shifters with absorbing/attenuating sidewalls using an additive process
US5411824A (en) * 1993-01-21 1995-05-02 Sematech, Inc. Phase shifting mask structure with absorbing/attenuating sidewalls for improved imaging
US5733708A (en) * 1995-10-02 1998-03-31 Litel Instruments Multilayer e-beam lithography on nonconducting substrates

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3245794A (en) * 1962-10-29 1966-04-12 Ihilco Corp Sequential registration scheme
US3607267A (en) * 1967-10-09 1971-09-21 Motorola Inc Precision alignment of photographic masks
DE1614635A1 (de) * 1967-10-23 1970-03-26 Siemens Ag Verfahren zum Herstellen von Fotolackmasken fuer Halbleiterzwecke
US3742229A (en) * 1972-06-29 1973-06-26 Massachusetts Inst Technology Soft x-ray mask alignment system
CS159563B1 (show.php) * 1972-12-28 1975-01-31
GB1520925A (en) * 1975-10-06 1978-08-09 Mullard Ltd Semiconductor device manufacture
DE2600137A1 (de) * 1976-01-03 1977-07-07 Ernst Prof Dipl Phys Froeschle Elektronenstrahlbelichtungsverfahren fuer halbleiterbauelemente
GB1557064A (en) * 1976-09-09 1979-12-05 Mullard Ltd Masks suitable for use in electron image projectors
DE2642634A1 (de) * 1976-09-22 1978-03-23 Siemens Ag Verfahren zum justieren von belichtungsmasken relativ zu einer substratscheibe
DE2708674C3 (de) * 1977-02-28 1980-07-24 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Justieren einer Belichtungsmaske relativ zu einer Substratscheibe bei der Fotolithografie

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH045663U (show.php) * 1990-04-28 1992-01-20

Also Published As

Publication number Publication date
GB2066487A (en) 1981-07-08
IE802623L (en) 1981-06-18
GB2066487B (en) 1983-11-23
FR2472213B1 (show.php) 1983-10-07
DE3046856C2 (show.php) 1992-03-05
US4377627A (en) 1983-03-22
DE3046856A1 (de) 1981-09-03
FR2472213A1 (fr) 1981-06-26
IE50699B1 (en) 1986-06-25
JPS5698830A (en) 1981-08-08

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