JPS6318762U - - Google Patents
Info
- Publication number
- JPS6318762U JPS6318762U JP11069986U JP11069986U JPS6318762U JP S6318762 U JPS6318762 U JP S6318762U JP 11069986 U JP11069986 U JP 11069986U JP 11069986 U JP11069986 U JP 11069986U JP S6318762 U JPS6318762 U JP S6318762U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- ion beam
- secondary ion
- active gas
- flow rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002347 injection Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 claims description 5
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 150000002500 ions Chemical group 0.000 claims 4
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000004949 mass spectrometry Methods 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000000605 extraction Methods 0.000 description 3
- 229910019589 Cr—Fe Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11069986U JPS6318762U (enExample) | 1986-07-21 | 1986-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11069986U JPS6318762U (enExample) | 1986-07-21 | 1986-07-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6318762U true JPS6318762U (enExample) | 1988-02-06 |
Family
ID=30989944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11069986U Pending JPS6318762U (enExample) | 1986-07-21 | 1986-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6318762U (enExample) |
-
1986
- 1986-07-21 JP JP11069986U patent/JPS6318762U/ja active Pending
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