JPH0436760U - - Google Patents
Info
- Publication number
- JPH0436760U JPH0436760U JP7807890U JP7807890U JPH0436760U JP H0436760 U JPH0436760 U JP H0436760U JP 7807890 U JP7807890 U JP 7807890U JP 7807890 U JP7807890 U JP 7807890U JP H0436760 U JPH0436760 U JP H0436760U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- gas introduction
- generation source
- beam generation
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims 8
- 239000011164 primary particle Substances 0.000 claims 2
- 230000000903 blocking effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7807890U JPH0436760U (enExample) | 1990-07-23 | 1990-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7807890U JPH0436760U (enExample) | 1990-07-23 | 1990-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0436760U true JPH0436760U (enExample) | 1992-03-27 |
Family
ID=31621039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7807890U Pending JPH0436760U (enExample) | 1990-07-23 | 1990-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0436760U (enExample) |
-
1990
- 1990-07-23 JP JP7807890U patent/JPH0436760U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6486435A (en) | Flood-gun device and method of neutralize charge on wafer | |
| JPH0436760U (enExample) | ||
| CA2011644A1 (en) | Vacuum switch apparatus | |
| JPS57191950A (en) | Charged-particle source | |
| JPH0675386B2 (ja) | 高真空装置及び該高真空装置を用いた真空ポンプ装置 | |
| JPS62193659U (enExample) | ||
| JPS5489685A (en) | Charged particle ray source apparatus for exciting of analytical apparatus | |
| JPH02118172U (enExample) | ||
| JPS5924358Y2 (ja) | イオン化装置 | |
| JPS6247781U (enExample) | ||
| JPH02129650U (enExample) | ||
| JP3280549B2 (ja) | イオンソース | |
| JPS5813581Y2 (ja) | 質量分析装置等用イオン源 | |
| JPH03103550U (enExample) | ||
| JPS58157959U (ja) | 質量分析装置における共用イオン源 | |
| JPH02304842A (ja) | イオン発生方法及びイオン発生装置 | |
| JPH01112554U (enExample) | ||
| JPH0439853A (ja) | 半導体製造装置 | |
| JPH0236150U (enExample) | ||
| JPH03116652U (enExample) | ||
| JPH025331A (ja) | デュオピガトロンイオン源 | |
| JPS54109753A (en) | Microwave tube | |
| JPS6251648U (enExample) | ||
| JPH0441465B2 (enExample) | ||
| JPS59163743A (ja) | イオン源 |