JPS63183505U - - Google Patents
Info
- Publication number
- JPS63183505U JPS63183505U JP7566487U JP7566487U JPS63183505U JP S63183505 U JPS63183505 U JP S63183505U JP 7566487 U JP7566487 U JP 7566487U JP 7566487 U JP7566487 U JP 7566487U JP S63183505 U JPS63183505 U JP S63183505U
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- target object
- projects
- displacement
- distance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7566487U JPS63183505U (enExample) | 1987-05-19 | 1987-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7566487U JPS63183505U (enExample) | 1987-05-19 | 1987-05-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63183505U true JPS63183505U (enExample) | 1988-11-25 |
Family
ID=30922021
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7566487U Pending JPS63183505U (enExample) | 1987-05-19 | 1987-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63183505U (enExample) |
-
1987
- 1987-05-19 JP JP7566487U patent/JPS63183505U/ja active Pending
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