JPS6318313B2 - - Google Patents

Info

Publication number

JPS6318313B2

JPS6318313B2 JP10561884A JP10561884A JPS6318313B2 JP S6318313 B2 JPS6318313 B2 JP S6318313B2 JP 10561884 A JP10561884 A JP 10561884A JP 10561884 A JP10561884 A JP 10561884A JP S6318313 B2 JPS6318313 B2 JP S6318313B2

Authority

JP

Japan

Prior art keywords

electrode

heating resistor

ceramic heater

ceramic

resistor pattern

Prior art date

1984-05-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 239000000919 ceramic Substances 0.000 claims description 31
• 238000010438 heat treatment Methods 0.000 claims description 20
• 239000007788 liquid Substances 0.000 claims description 12
• 239000000758 substrate Substances 0.000 claims description 11
• 239000004020 conductor Substances 0.000 claims description 5
• 230000007797 corrosion Effects 0.000 claims description 5
• 238000005260 corrosion Methods 0.000 claims description 5
• BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 4
• WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
• 229910052721 tungsten Inorganic materials 0.000 claims description 4
• 239000010937 tungsten Substances 0.000 claims description 4
• 239000000463 material Substances 0.000 claims description 3
• 229910052697 platinum Inorganic materials 0.000 claims description 2
• 229910052703 rhodium Inorganic materials 0.000 claims description 2
• 239000010948 rhodium Substances 0.000 claims description 2
• MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 2
• 238000005245 sintering Methods 0.000 claims 1
• 238000001514 detection method Methods 0.000 description 7
• MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
• BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
• 238000001816 cooling Methods 0.000 description 2
• 238000010304 firing Methods 0.000 description 2
• 238000002347 injection Methods 0.000 description 2
• 239000007924 injection Substances 0.000 description 2
• 239000000843 powder Substances 0.000 description 2
• 238000003825 pressing Methods 0.000 description 2
• 229910052709 silver Inorganic materials 0.000 description 2
• 239000004332 silver Substances 0.000 description 2
• 239000000126 substance Substances 0.000 description 2
• 206010014357 Electric shock Diseases 0.000 description 1
• PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
• PCEXQRKSUSSDFT-UHFFFAOYSA-N [Mn].[Mo] Chemical compound [Mn].[Mo] PCEXQRKSUSSDFT-UHFFFAOYSA-N 0.000 description 1
• 238000004140 cleaning Methods 0.000 description 1
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1
• 230000008602 contraction Effects 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 239000003814 drug Substances 0.000 description 1
• 229940079593 drug Drugs 0.000 description 1
• 230000006355 external stress Effects 0.000 description 1
• WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 229910000679 solder Inorganic materials 0.000 description 1
• 230000035882 stress Effects 0.000 description 1