JPS63180921U - - Google Patents
Info
- Publication number
- JPS63180921U JPS63180921U JP7149587U JP7149587U JPS63180921U JP S63180921 U JPS63180921 U JP S63180921U JP 7149587 U JP7149587 U JP 7149587U JP 7149587 U JP7149587 U JP 7149587U JP S63180921 U JPS63180921 U JP S63180921U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- epitaxial growth
- disk
- taper
- frequency induction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006698 induction Effects 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
Description
第１図は本考案の実施例になるエピタキシヤル
成長用サセプターの使用状況及び第２図は従来の
エピタキシヤル成長用サセプターの使用状況を示
す断面図である。
符号の説明、１……高周波誘導コイル、２……
サセプター、３……石英ホルダー、４……ノズル
、５……テーパー、６……内周、７……つば部。
FIG. 1 is a sectional view showing how a susceptor for epitaxial growth according to an embodiment of the present invention is used, and FIG. 2 is a sectional view showing how a conventional susceptor for epitaxial growth is used. Explanation of symbols, 1... High frequency induction coil, 2...
Susceptor, 3...Quartz holder, 4...Nozzle, 5...Taper, 6...Inner circumference, 7...Brim portion.
Claims (1)
かつ高周波誘導により加熱されるサセプターであ
つて、石英ホルダーに当接する部分に円板の中心
に向かうに従い肉薄となるテーパーを設けてなる
エピタキシヤル成長用サセプター。 A susceptor for epitaxial growth that is disk-shaped and heated by high-frequency induction used in epitaxial growth equipment, and has a taper that becomes thinner toward the center of the disk in the part that contacts the quartz holder. Susceptor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7149587U JPS63180921U (en) | 1987-05-13 | 1987-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7149587U JPS63180921U (en) | 1987-05-13 | 1987-05-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63180921U true JPS63180921U (en) | 1988-11-22 |
Family
ID=30914102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7149587U Pending JPS63180921U (en) | 1987-05-13 | 1987-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63180921U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52136573A (en) * | 1976-05-10 | 1977-11-15 | Matsushita Electronics Corp | Cvd apparatus |
| JPS6058613A (en) * | 1983-09-12 | 1985-04-04 | Hitachi Ltd | Epitaxial apparatus |
-
1987
- 1987-05-13 JP JP7149587U patent/JPS63180921U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52136573A (en) * | 1976-05-10 | 1977-11-15 | Matsushita Electronics Corp | Cvd apparatus |
| JPS6058613A (en) * | 1983-09-12 | 1985-04-04 | Hitachi Ltd | Epitaxial apparatus |