JPS6150761U - - Google Patents
Info
- Publication number
- JPS6150761U JPS6150761U JP13414884U JP13414884U JPS6150761U JP S6150761 U JPS6150761 U JP S6150761U JP 13414884 U JP13414884 U JP 13414884U JP 13414884 U JP13414884 U JP 13414884U JP S6150761 U JPS6150761 U JP S6150761U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- support
- processed
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図乃至第３図は本考案の一実施例を示すも
ので、第１図は気相成長用支持体を示す断面図、
第２図は気相成長用支持体を分解した状態を示す
断面図、第３図はその昇温過程における温度勾配
を示すグラフ図、第４図は従来例を示す概略的構
成図、第５図はその気相成長用支持体の昇温過程
における温度勾配を示すグラフ図である。
１４……ウエハ（被処理体）、１１……気相成
長用支持体、１２ａ，１３ａ……載置溝、１２…
…内周部側、１３……外周部側。
1 to 3 show an embodiment of the present invention, and FIG. 1 is a sectional view showing a support for vapor phase growth;
Fig. 2 is a cross-sectional view showing the disassembled state of the support for vapor phase growth, Fig. 3 is a graph showing the temperature gradient during the heating process, Fig. 4 is a schematic configuration diagram showing the conventional example, and Fig. 5 The figure is a graph showing the temperature gradient during the temperature raising process of the support for vapor phase growth. 14...Wafer (object to be processed), 11...Support for vapor phase growth, 12a, 13a...Mounting groove, 12...
...Inner circumference side, 13...Outer circumference side.
Claims (1)
支持する気相成長用支持体において、内周部側と
外周部側とに分割されたことを特徴とする気相成
長用支持体。 (2) 内周部側および外周部側にそれぞれ被処理
体を際置する載置溝を周方向に沿つて有したこと
を特徴とする実用新案登録請求の範囲第１項記載
の気相成長用支持体。[Claims for Utility Model Registration] (1) A support for vapor phase growth that is provided in a vertical vapor phase growth apparatus and supports an object to be processed is divided into an inner circumference side and an outer circumference side. Characteristic support for vapor phase growth. (2) The vapor phase growth according to claim 1 of the utility model registration claim, characterized in that the inner circumferential side and the outer circumferential side each have mounting grooves along the circumferential direction for placing the object to be processed. Support for.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13414884U JPS6150761U (en) | 1984-09-04 | 1984-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13414884U JPS6150761U (en) | 1984-09-04 | 1984-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6150761U true JPS6150761U (en) | 1986-04-05 |
Family
ID=30692668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13414884U Pending JPS6150761U (en) | 1984-09-04 | 1984-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6150761U (en) |
-
1984
- 1984-09-04 JP JP13414884U patent/JPS6150761U/ja active Pending