JPS6318073A - 多層被膜の製造方法 - Google Patents

多層被膜の製造方法

Info

Publication number
JPS6318073A
JPS6318073A JP15974886A JP15974886A JPS6318073A JP S6318073 A JPS6318073 A JP S6318073A JP 15974886 A JP15974886 A JP 15974886A JP 15974886 A JP15974886 A JP 15974886A JP S6318073 A JPS6318073 A JP S6318073A
Authority
JP
Japan
Prior art keywords
base material
containers
materials
partition plate
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15974886A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0553868B2 (cg-RX-API-DMAC7.html
Inventor
Hiroshi Kagechika
影近　博
Hiroshi Kibe
洋 木部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Engineering Corp
Original Assignee
NKK Corp
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NKK Corp, Nippon Kokan Ltd filed Critical NKK Corp
Priority to JP15974886A priority Critical patent/JPS6318073A/ja
Publication of JPS6318073A publication Critical patent/JPS6318073A/ja
Publication of JPH0553868B2 publication Critical patent/JPH0553868B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP15974886A 1986-07-09 1986-07-09 多層被膜の製造方法 Granted JPS6318073A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15974886A JPS6318073A (ja) 1986-07-09 1986-07-09 多層被膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15974886A JPS6318073A (ja) 1986-07-09 1986-07-09 多層被膜の製造方法

Publications (2)

Publication Number Publication Date
JPS6318073A true JPS6318073A (ja) 1988-01-25
JPH0553868B2 JPH0553868B2 (cg-RX-API-DMAC7.html) 1993-08-11

Family

ID=15700405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15974886A Granted JPS6318073A (ja) 1986-07-09 1986-07-09 多層被膜の製造方法

Country Status (1)

Country Link
JP (1) JPS6318073A (cg-RX-API-DMAC7.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63303054A (ja) * 1987-06-04 1988-12-09 Toyota Motor Corp 多層膜の形成方法
EP1096035A1 (fr) * 1999-10-26 2001-05-02 Usinor Tôle d'acier revêtue et procédé et appareil de fabrication de cette tôle
WO2007117294A3 (en) * 2005-12-23 2008-01-10 Gen Electric System and method for continuous deposition of graded coatings

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58133374A (ja) * 1982-02-04 1983-08-09 Ulvac Corp 真空蒸着多層膜形成装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58133374A (ja) * 1982-02-04 1983-08-09 Ulvac Corp 真空蒸着多層膜形成装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63303054A (ja) * 1987-06-04 1988-12-09 Toyota Motor Corp 多層膜の形成方法
EP1096035A1 (fr) * 1999-10-26 2001-05-02 Usinor Tôle d'acier revêtue et procédé et appareil de fabrication de cette tôle
WO2007117294A3 (en) * 2005-12-23 2008-01-10 Gen Electric System and method for continuous deposition of graded coatings

Also Published As

Publication number Publication date
JPH0553868B2 (cg-RX-API-DMAC7.html) 1993-08-11

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