JPS63179643U - - Google Patents

Info

Publication number
JPS63179643U
JPS63179643U JP7048987U JP7048987U JPS63179643U JP S63179643 U JPS63179643 U JP S63179643U JP 7048987 U JP7048987 U JP 7048987U JP 7048987 U JP7048987 U JP 7048987U JP S63179643 U JPS63179643 U JP S63179643U
Authority
JP
Japan
Prior art keywords
rays
plasma
ray source
charged particle
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7048987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7048987U priority Critical patent/JPS63179643U/ja
Publication of JPS63179643U publication Critical patent/JPS63179643U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • X-Ray Techniques (AREA)
JP7048987U 1987-05-12 1987-05-12 Pending JPS63179643U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7048987U JPS63179643U (enrdf_load_stackoverflow) 1987-05-12 1987-05-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7048987U JPS63179643U (enrdf_load_stackoverflow) 1987-05-12 1987-05-12

Publications (1)

Publication Number Publication Date
JPS63179643U true JPS63179643U (enrdf_load_stackoverflow) 1988-11-21

Family

ID=30912172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7048987U Pending JPS63179643U (enrdf_load_stackoverflow) 1987-05-12 1987-05-12

Country Status (1)

Country Link
JP (1) JPS63179643U (enrdf_load_stackoverflow)

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