JPS63179060A - 薄膜形成装置 - Google Patents
薄膜形成装置Info
- Publication number
- JPS63179060A JPS63179060A JP903887A JP903887A JPS63179060A JP S63179060 A JPS63179060 A JP S63179060A JP 903887 A JP903887 A JP 903887A JP 903887 A JP903887 A JP 903887A JP S63179060 A JPS63179060 A JP S63179060A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- substrate
- electrode
- generation source
- ionization means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 33
- 238000009826 distribution Methods 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims abstract description 6
- 238000010894 electron beam technology Methods 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 26
- 238000010438 heat treatment Methods 0.000 claims description 14
- 238000007740 vapor deposition Methods 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 5
- 239000000284 extract Substances 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 2
- 230000005684 electric field Effects 0.000 abstract description 7
- 230000001133 acceleration Effects 0.000 abstract description 2
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 230000035515 penetration Effects 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 description 11
- 238000010586 diagram Methods 0.000 description 9
- 238000000605 extraction Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000007737 ion beam deposition Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP903887A JPS63179060A (ja) | 1987-01-20 | 1987-01-20 | 薄膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP903887A JPS63179060A (ja) | 1987-01-20 | 1987-01-20 | 薄膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63179060A true JPS63179060A (ja) | 1988-07-23 |
| JPH0543783B2 JPH0543783B2 (enrdf_load_stackoverflow) | 1993-07-02 |
Family
ID=11709479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP903887A Granted JPS63179060A (ja) | 1987-01-20 | 1987-01-20 | 薄膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63179060A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5100526A (en) * | 1990-06-18 | 1992-03-31 | Mitsubishi Denki Kabushiki Kaisha | Apparatus for forming thin film |
-
1987
- 1987-01-20 JP JP903887A patent/JPS63179060A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5100526A (en) * | 1990-06-18 | 1992-03-31 | Mitsubishi Denki Kabushiki Kaisha | Apparatus for forming thin film |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543783B2 (enrdf_load_stackoverflow) | 1993-07-02 |
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