JPS631779A - 真空排気制御装置 - Google Patents

真空排気制御装置

Info

Publication number
JPS631779A
JPS631779A JP14304186A JP14304186A JPS631779A JP S631779 A JPS631779 A JP S631779A JP 14304186 A JP14304186 A JP 14304186A JP 14304186 A JP14304186 A JP 14304186A JP S631779 A JPS631779 A JP S631779A
Authority
JP
Japan
Prior art keywords
contact
vacuum pump
relay
circuit
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14304186A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0525038B2 (enrdf_load_stackoverflow
Inventor
Tatsuo Moroi
師井　達夫
Naoyuki Tamura
直行 田村
Norio Kanai
金井　謙雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14304186A priority Critical patent/JPS631779A/ja
Publication of JPS631779A publication Critical patent/JPS631779A/ja
Publication of JPH0525038B2 publication Critical patent/JPH0525038B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Positive-Displacement Pumps (AREA)
JP14304186A 1986-06-20 1986-06-20 真空排気制御装置 Granted JPS631779A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14304186A JPS631779A (ja) 1986-06-20 1986-06-20 真空排気制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14304186A JPS631779A (ja) 1986-06-20 1986-06-20 真空排気制御装置

Publications (2)

Publication Number Publication Date
JPS631779A true JPS631779A (ja) 1988-01-06
JPH0525038B2 JPH0525038B2 (enrdf_load_stackoverflow) 1993-04-09

Family

ID=15329530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14304186A Granted JPS631779A (ja) 1986-06-20 1986-06-20 真空排気制御装置

Country Status (1)

Country Link
JP (1) JPS631779A (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5750701U (enrdf_load_stackoverflow) * 1980-09-05 1982-03-23
JPS60188117A (ja) * 1984-03-08 1985-09-25 株式会社東芝 炊飯器
JPS60191981A (ja) * 1984-03-13 1985-09-30 三菱電機株式会社 エレベ−タ制御装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5750701U (enrdf_load_stackoverflow) * 1980-09-05 1982-03-23
JPS60188117A (ja) * 1984-03-08 1985-09-25 株式会社東芝 炊飯器
JPS60191981A (ja) * 1984-03-13 1985-09-30 三菱電機株式会社 エレベ−タ制御装置

Also Published As

Publication number Publication date
JPH0525038B2 (enrdf_load_stackoverflow) 1993-04-09

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