JPS63177960U - - Google Patents

Info

Publication number
JPS63177960U
JPS63177960U JP6763387U JP6763387U JPS63177960U JP S63177960 U JPS63177960 U JP S63177960U JP 6763387 U JP6763387 U JP 6763387U JP 6763387 U JP6763387 U JP 6763387U JP S63177960 U JPS63177960 U JP S63177960U
Authority
JP
Japan
Prior art keywords
crystal growth
epitaxial crystal
growth apparatus
cassette
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6763387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6763387U priority Critical patent/JPS63177960U/ja
Publication of JPS63177960U publication Critical patent/JPS63177960U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP6763387U 1987-05-06 1987-05-06 Pending JPS63177960U (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6763387U JPS63177960U (cg-RX-API-DMAC7.html) 1987-05-06 1987-05-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6763387U JPS63177960U (cg-RX-API-DMAC7.html) 1987-05-06 1987-05-06

Publications (1)

Publication Number Publication Date
JPS63177960U true JPS63177960U (cg-RX-API-DMAC7.html) 1988-11-17

Family

ID=30906717

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6763387U Pending JPS63177960U (cg-RX-API-DMAC7.html) 1987-05-06 1987-05-06

Country Status (1)

Country Link
JP (1) JPS63177960U (cg-RX-API-DMAC7.html)

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