JPS63177955U - - Google Patents
Info
- Publication number
- JPS63177955U JPS63177955U JP6999887U JP6999887U JPS63177955U JP S63177955 U JPS63177955 U JP S63177955U JP 6999887 U JP6999887 U JP 6999887U JP 6999887 U JP6999887 U JP 6999887U JP S63177955 U JPS63177955 U JP S63177955U
- Authority
- JP
- Japan
- Prior art keywords
- carousel
- target electrode
- utility
- moving mechanism
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図ａ，ｂは本考案の一実施例におけるスパ
ツタリング装置のカルーセルの形状を示す上面図
及び断面図、第２図ａ，ｂは従来のスパツタリン
グ装置のカルーセル形状を示す上面図及び断面図
、第３図は従来の装置及び本考案の装置における
着膜時の基板位置と膜厚との関係を示す特性図で
ある。
１１……ターゲツト電極、１２……カルーセル
、１３……基板。
1A and 1B are a top view and a sectional view showing the carousel shape of a sputtering device according to an embodiment of the present invention; FIGS. 2A and 2B are a top view and a sectional view showing the carousel shape of a conventional sputtering device; FIG. 3 is a characteristic diagram showing the relationship between the substrate position and film thickness during film deposition in the conventional apparatus and the apparatus of the present invention. 11...Target electrode, 12...Carousel, 13...Substrate.
Claims (1)
し、かつカルーセルの上部及び下部がターゲツト
電極側に屈曲していることを特徴とするスパツタ
リング装置。 What is claimed is: 1. A sputtering apparatus comprising a carousel-type substrate moving mechanism in a vacuum container, the upper and lower parts of the carousel being bent toward a target electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6999887U JPS63177955U (en) | 1987-05-11 | 1987-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6999887U JPS63177955U (en) | 1987-05-11 | 1987-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63177955U true JPS63177955U (en) | 1988-11-17 |
Family
ID=30911231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6999887U Pending JPS63177955U (en) | 1987-05-11 | 1987-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63177955U (en) |
-
1987
- 1987-05-11 JP JP6999887U patent/JPS63177955U/ja active Pending