JPS6317773B2 - - Google Patents

Info

Publication number
JPS6317773B2
JPS6317773B2 JP56009569A JP956981A JPS6317773B2 JP S6317773 B2 JPS6317773 B2 JP S6317773B2 JP 56009569 A JP56009569 A JP 56009569A JP 956981 A JP956981 A JP 956981A JP S6317773 B2 JPS6317773 B2 JP S6317773B2
Authority
JP
Japan
Prior art keywords
thin film
solution
bapb
hcl
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56009569A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57123826A (en
Inventor
Toshiaki Murakami
Minoru Suzuki
Yoichi Enomoto
Takashi Inukai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP56009569A priority Critical patent/JPS57123826A/ja
Publication of JPS57123826A publication Critical patent/JPS57123826A/ja
Publication of JPS6317773B2 publication Critical patent/JPS6317773B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
JP56009569A 1981-01-27 1981-01-27 Method for forming oxide thin film pattern Granted JPS57123826A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56009569A JPS57123826A (en) 1981-01-27 1981-01-27 Method for forming oxide thin film pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56009569A JPS57123826A (en) 1981-01-27 1981-01-27 Method for forming oxide thin film pattern

Publications (2)

Publication Number Publication Date
JPS57123826A JPS57123826A (en) 1982-08-02
JPS6317773B2 true JPS6317773B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-15

Family

ID=11723923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56009569A Granted JPS57123826A (en) 1981-01-27 1981-01-27 Method for forming oxide thin film pattern

Country Status (1)

Country Link
JP (1) JPS57123826A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5947783A (ja) * 1982-09-10 1984-03-17 Nippon Telegr & Teleph Corp <Ntt> 酸化物超伝導体パタ−ン形成法
US5646095A (en) * 1991-06-18 1997-07-08 International Business Machines Corporation Selective insulation etching for fabricating superconductor microcircuits
JP4902159B2 (ja) * 2005-09-12 2012-03-21 日本板硝子株式会社 セラミックス焼結体及びガラスの分離回収方法
EP1935519A1 (en) 2005-09-12 2008-06-25 Nippon Sheet Glass Company, Limited Aqueous solution and method for separation of dark sintered ceramic material

Also Published As

Publication number Publication date
JPS57123826A (en) 1982-08-02

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