JPS63176768A - Magnetic levitation type conveyor - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a magnetically levitated transfer device suitable for use in a clean or vacuum environment such as a semiconductor manufacturing factory.

(Prior Art) In factories that handle semiconductor wafers, etc., work is generally carried out in a clean environment called a clean room. For this reason, there is a demand for equipment for transporting semiconductor wafers and the like that does not generate fine dust during transport.

Conventionally, transportation devices for such semiconductor wafers, etc.
For example, the first prior art example (
There is a second conventional example (patent application filed on December 19, 1988).

These conventional magnetic levitation type transfer devices magnetically levitate a cart (m transport body) for transporting an object such as a wafer case containing a semiconductor wafer onto a guide member, and move the cart along the guide member. It is designed to be transported to a predetermined position. That is, since the wafer cases and the like are transported without contact between the cart and the guide member, there is no need to use lubricating oil, and the clean room can be maintained clean.

(Problems to be Solved by the Invention) However, in such a conventional magnetic levitation type conveyance device, the guide member is a mere cylindrical member with no unevenness on its circumferential surface in the axial direction; Since the carrier body is towed by the traction means along this smooth circumferential surface, there is a problem in that it is extremely difficult to reliably position the carrier body or to adjust its position.

(Means for Solving the Problems) Therefore, in order to solve the above-mentioned problems, the present invention includes a conveyor main body that supports an object to be transported, and a device that is inserted into the conveyor main body and moves the conveyor main body in a predetermined direction. A guide member for guiding;
A magnetic separating means is provided on the conveyance table main body so as to face the guide member and separates the conveyance table main body from the guide member by magnetic force so as to form a predetermined gap between the conveyance table main body and the guide member; a traction means for moving the member in a predetermined direction along the axis; and f! - a magnetically levitated conveyance device comprising: forming a screw thread on the kite member that faces the magnetic separation means as the traction means;
The configuration is such that the main body of the conveyance table is moved by rotating the guide member.

(Function) According to the magnetically levitated conveyance device having such a configuration, since the thread facing the magnetic separation means is formed on the guide member as the traction means, the screw thread formed on the tip end and the guide member is formed by the magnetic separation means. By forming a predetermined gap between the peaks, the main body of the conveyance table is floated at a distance from the guide member, and by rotating the guide member in the circumferential direction, the main body of the conveyance table is moved along the axis of the guide member. can be moved in a predetermined direction.

In this way, the conveyance table main body is pulled by the screw drive, so that the position of the conveyance table main body can be reliably performed, and the positioning vfl and adjustment can be easily performed.

(Example) Hereinafter, an example of the present invention will be described based on the drawings. Figure 1.2 shows the first magnetic levitation type conveyance device according to the present invention.
It is a figure showing an example.

First, to explain the structure, in FIG. 1, reference numeral 1 denotes a carrier main body that supports an object to be transported such as a semiconductor wafer on its upper surface, and inside the carrier main body 1 is a guide member 2 extending horizontally. is inserted through the guide member 2 to guide the carrier body 1 to move in a predetermined direction.

An end of the guide member 2 is rotatably supported by a frame 4, and an end of a sub-guide member 5 extending parallel to the guide member 2 is also supported by the frame 4.

A guide member 2 is provided outside the frame 4 of the kite member 2.
A motor (not shown) is provided for rotationally driving the .

The guide member 2 is formed with a thread 7 having a trapezoidal cross section, and on the side surface of the thread 7 are electromagnets 11 to 18 (magnetic separation means) provided obliquely in the axial direction inside the carrier main body 1. The tip n1 parts are arranged facing each other. Electromagnet 11~
14 and electromagnets 15 to 18 are respectively provided at both ends of the carrier main body 1, and as shown in FIG. 2, four electromagnets 6 are provided at intervals in the circumferential direction of the guide member 2.
Moreover, electromagnets 19 and 20 (magnetic separation means) are provided at the lower part of the conveyance table main body 1, with their tips facing the circumferential surface of the sub-guide member 5.

Next, the effect will be explained. When the electromagnets 11 to 18 are energized from a controller (control circuit not shown), a magnetic force is generated in them, and the screw threads are arranged so that a predetermined gap is formed between their tip surfaces and the side surface of the thread 7 of the guide member 2. By separating from the guide member 7, the carrier main body 1 is floated above the guide member 2.

In this state, when the guide member 2 is rotated in the circumferential direction by a motor, the screw thread 7 moves in the axial direction of the guide member 2. At this time, the electromagnets 11 to 18 try to maintain a predetermined gap between their tips and the side surfaces of the screw threads 7, and guide the carrier body 1 by moving in the same direction as the screw threads 7. It can be moved in a predetermined direction along the axis of the member 2.

In this way, the carrier main body 1 places (supports) objects to be transported, such as semiconductor wafers, on it and transports the semiconductor wafers, etc. to a predetermined position without contacting the guide member 2, thereby keeping the clean room clean. will be maintained.

Furthermore, when the electromagnets 19 and 20 are energized by the controller, a magnetic force is generated in them, and the end surfaces of these are moved from the circumferential surface of the sub-guide member 5 so that a predetermined gap is formed between them and the circumferential surface of the sub-guide member 5. By spacing, the conveyance table main body 1 is prevented from rotating around the guide member 2.

As described above, since the conveyance table main body 1 is pulled by the screw drive, the position of the conveyance table main body 1 can be reliably determined, and the positioning and adjustment can be easily performed.

In addition, in the first embodiment described above, the screw thread 7
Instead of having one thread, the thread 23 may have two threads as in the second embodiment shown in FIG. This second
According to the embodiment, the electromagnets 32, 34 facing each other can be arranged in the same vertical plane, and it is possible to prevent a moment from being applied to the carrier body.

Furthermore, in the first and second embodiments, the electromagnet was provided in such a direction that its tip was directed toward the outside of the carrier body 1, but the electromagnet was provided with its tip directed toward the inside of the carrier body 1. It may be provided in such a direction.

Further, in the first embodiment, the electromagnet is connected to the guide member 2.
4 in the circumferential direction, but the number may be three as in the third embodiment shown in FIG. 4, or any other number.

Further, in the first embodiment, the guide member 22 is arranged horizontally, but the guide member 22 may be arranged vertically as in the fourth embodiment shown in FIG. In this FIG.
1a is a support base on which the transported object is placed; 24 is a controller that controls the magnetic force of each electromagnet; 25 is a power source for the controller 24, that is, a battery; 26 is a charging terminal for the battery 25;
29 is a motor for rotationally driving the guide member 22, and three are sub guide members.

FIG. 6 shows a fifth embodiment of the present invention. In the embodiment described above, the electromagnets 11 to 18 were arranged diagonally with respect to the axial direction of the guide member 2, and their tips were provided to face the side surface of the screw thread 7.
The embodiment differs in that the electromagnets 27 and 28 (magnetic separation means) are arranged at right angles to the axial direction of the guide member 30, and their tips are provided to face the top surface of the thread 31. The electromagnets 27 and 28 are each provided so as to be offset by δ from the shoulder of the width of the thread 31 in opposite directions.

In this fifth embodiment, not only can the carriage main body 33 be magnetically levitated above the guide member 30, but also the carriage main body 33 can be pulled in the axial direction of the guide member 30 by rotating the guide member 30. be able to. Since the electromagnets 27 and 28 are offset from the thread 31 by the same amount δ in opposite directions, the electromagnets 27 and 28 are
The magnetic forces in the axial direction of the guide member 30 are balanced, so that the displacement of one is suppressed by the other. Therefore, the electromagnets 27 and 28 eventually follow the movement of the screw thread 31.

In addition, in FIG. 6, a support table 35 on which an object to be transported 36 is placed is formed to hang down below the main body 33 of the conveyor table. The transport table main body 33 can be restricted from rotating around the guide member 30.

Therefore, in this fifth embodiment, the sub kite member can be omitted, and the structure of the carrier main body and the assembly of the electromagnets are simpler than in the first embodiment, and almost the same effect can be obtained. can.

In this fifth embodiment, the carrier main body 33 is pulled by the balance of the magnetic forces of the two sets of electromagnets 27 and 28, but the seventh embodiment
In the sixth embodiment shown in the figure, a pair of electromagnets 37 and 38 are further added to sandwich both sides of the thread 31. According to this sixth embodiment, the electromagnets 27 and 28 are assigned only the function of magnetically levitating the carrier main body 33 above the guide member 30, and the electromagnets 37 and 38 have the function of magnetically levitating the carrier main body 33 together with the screw thread 31. By sharing the towing function, it is possible to position the carrier body 33 more reliably than in the fifth embodiment, and the positioning v1
Adjustments can also be made easily.

FIG. 8 shows a seventh embodiment of the present invention. In the previous embodiment, the guide member was threaded, but this seventh embodiment is different in that the sub-guide member is threaded. That is, the guide member 40 is formed of a simple cylinder, and around the guide member 40, four electromagnets 42 (magnetic separation means) are provided in two sets, front and rear, on the conveyance table main body 44 in the circumferential direction.

A screw thread 47 is formed on the sub-guide member 46 below the guide member 40, and a pair of electromagnets 50 (magnetic separation means) are attached to both sides of the sub-guide member 46 so that the distal end thereof is attached to the circumferential surface of the sub-guide member 46. A pair of electromagnets 52 and 53 (magnetic separating means) are provided on the carriage body 44 so as to face each other, and are disposed on the side surface of the screw thread 47 in opposite directions. 44.

The electromagnet 42 is energized by the controller and uses its magnetic force to levitate the carrier main body 44 above the guide member 40, and the electromagnet 50 uses its magnetic force to restrict the carrier main body 44 from rotating around the guide member 40. 52
．． 53 is adapted to pull the conveyance table main body 44 in the axial direction of the guide member 40 through a screw drive by a screw thread 47.

Therefore, in this seventh embodiment, a rotational drive motor (not shown) is provided on the auxiliary guide member 46 having the thread 47.

According to the seventh embodiment, variations in implementation can be increased accordingly, and the degree of freedom in layout can be increased.

In addition, in the above embodiment, the sub-guide member is arranged under the guide member, but the guide member may be arranged below the sub-guide member. In addition, in this regard, the object to be transported may be supported by being placed on the main body of the transport platform, supported by being stored inside the transport platform, or supported by being suspended from below. good.

Further, in the embodiments described above, the sub-guide member is formed of a cylindrical member, but except for the seventh embodiment, a plate-shaped member may be used.

Further, in the seventh embodiment, the guide member is formed of a cylindrical member, but a square prism or other polygonal prism may also be used.

Further, the magnetic force of the electromagnets may be either attracting or repelling, and it is a matter of balance between the magnetic forces of opposing electromagnets.

Furthermore, it goes without saying that the objects to be transported are not limited to semiconductor wafers and their wafer cases.

(Effects of the Invention) As explained above, according to the present invention, the conveyance table main body is pulled by the screw drive, so that the positioning of the conveyance table main body can be performed reliably, and the
Adjustments can also be made easily.

Further, according to the second embodiment, the electromagnets facing each other can be arranged in the same vertical plane, and it is possible to prevent a moment from being applied to the carrier body.

Further, according to the third embodiment, the number of electromagnets can be reduced by one, and the cost can be reduced accordingly.

Further, according to the fourth embodiment, there is no need to consider the difference in magnetic force of each electromagnet due to gravity, unlike the first embodiment.

Furthermore, according to the fifth embodiment, the sub-guide member can be omitted, and the structure of the carrier body and the assembly of the electromagnets are simpler than those of the first embodiment, and almost the same effects can be obtained.

Furthermore, according to the sixth embodiment-1, the positioning of the conveyance table main body 33 can be performed more reliably than in the fifth embodiment, and the g&adjustment of the positioning can be performed more easily.

Further, according to the seventh embodiment, variations in implementation can be increased accordingly, and the degree of freedom in layout can be increased.

[Brief explanation of the drawing]

FIG. 1.2 is a diagram showing a first embodiment of the magnetically levitated conveyance device according to the present invention, and FIG. 1 is a cross-sectional side view of the main part thereof;
Fig. 2 is a perspective front view of the main part, and Fig. 3 is the second part of the present invention.
FIG. 4 is a transparent perspective view of the main part showing the embodiment, and FIG.
FIG. 5 is a perspective view of main parts showing a fourth embodiment of the present invention, FIG. 6 is a perspective side view of main parts showing a fifth embodiment of the present invention, and FIG. FIG. 8 is a transparent perspective view of a main part showing a sixth embodiment of the invention, and FIG. 8 is a perspective view of a main part showing a seventh embodiment of the invention. 1.21.33.44...Transportation platform body 2.22.30
．． 40...Guide member 4...Frame 5.39.46...Sub-guide member 7.23.31.47...Screw threads 11-20.27.28.32.34.37.38. 4
2.50.52.53...Electromagnet (magnetic separation means) 21a, 35...Support stand 24...Controller 25...Battery 26...Charging terminal 29...Motor 36...・Conveyed object Patent applicant: Seiko Seiki Co., Ltd. Figure 3 Front view showing the third embodiment of the present invention Figure 4 Figure 5

Claims (1)

[Claims] A conveyance table main body that supports a conveyed object, a guide member that is inserted into the conveyance table main body and guides the conveyance table main body to move in a predetermined direction, and a guide member provided on the conveyance table main body so as to face the guide member. magnetic separating means for separating the conveyance table main body from the guide member by magnetic force so as to form a predetermined gap between the conveyance table main body and a traction means for moving the conveyance table main body in a predetermined direction along the axis of the guide member; In the magnetically levitated conveyance device, the guide member is provided with a screw thread facing the magnetic separation means as the traction means, and the conveyor main body is moved by rotating the guide member. A magnetic levitation type transport device.