JPS63175325A - 荷電粒子検出装置 - Google Patents

荷電粒子検出装置

Info

Publication number
JPS63175325A
JPS63175325A JP62007745A JP774587A JPS63175325A JP S63175325 A JPS63175325 A JP S63175325A JP 62007745 A JP62007745 A JP 62007745A JP 774587 A JP774587 A JP 774587A JP S63175325 A JPS63175325 A JP S63175325A
Authority
JP
Japan
Prior art keywords
charged particles
potential
sample
charged particle
mcp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62007745A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0546660B2 (enExample
Inventor
Ryuzo Aihara
相原　龍三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP62007745A priority Critical patent/JPS63175325A/ja
Publication of JPS63175325A publication Critical patent/JPS63175325A/ja
Publication of JPH0546660B2 publication Critical patent/JPH0546660B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
JP62007745A 1987-01-16 1987-01-16 荷電粒子検出装置 Granted JPS63175325A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62007745A JPS63175325A (ja) 1987-01-16 1987-01-16 荷電粒子検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62007745A JPS63175325A (ja) 1987-01-16 1987-01-16 荷電粒子検出装置

Publications (2)

Publication Number Publication Date
JPS63175325A true JPS63175325A (ja) 1988-07-19
JPH0546660B2 JPH0546660B2 (enExample) 1993-07-14

Family

ID=11674235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62007745A Granted JPS63175325A (ja) 1987-01-16 1987-01-16 荷電粒子検出装置

Country Status (1)

Country Link
JP (1) JPS63175325A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006009444A3 (en) * 2004-07-23 2006-04-06 Nschappelijk Onderzoek Tno Nl Method and apparatus for inspecting a specimen surface and use of fluorescent materials
US7095023B2 (en) 2003-10-23 2006-08-22 Kabushiki Kaisha Toshiba Charged particle beam apparatus, charged particle detection method, and method of manufacturing semiconductor device
JP2008140723A (ja) * 2006-12-05 2008-06-19 Horiba Ltd 分析装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7095023B2 (en) 2003-10-23 2006-08-22 Kabushiki Kaisha Toshiba Charged particle beam apparatus, charged particle detection method, and method of manufacturing semiconductor device
WO2006009444A3 (en) * 2004-07-23 2006-04-06 Nschappelijk Onderzoek Tno Nl Method and apparatus for inspecting a specimen surface and use of fluorescent materials
US7732762B2 (en) 2004-07-23 2010-06-08 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Method of inspecting a specimen surface, apparatus and use of fluorescent material
JP2008140723A (ja) * 2006-12-05 2008-06-19 Horiba Ltd 分析装置

Also Published As

Publication number Publication date
JPH0546660B2 (enExample) 1993-07-14

Similar Documents

Publication Publication Date Title
US4897545A (en) Electron detector for use in a gaseous environment
JP4176159B2 (ja) 改善された２次電子検出のための磁界を用いた環境制御型ｓｅｍ
US7504626B2 (en) Scanning electron microscope and apparatus for detecting defect
JP2002516647A (ja) 環境走査型電子顕微鏡用の気体後方散乱電子検出器
JPS62176959U (enExample)
AU748840B2 (en) Environmental SEM with multipole fields for improved secondary electron detection
JPS63175325A (ja) 荷電粒子検出装置
JPH08138611A (ja) 荷電粒子線装置
JP3244620B2 (ja) 走査電子顕微鏡
CN106373848A (zh) 采用等离子体中和的电子显微镜装置
JP3394120B2 (ja) 二次荷電粒子検出装置
JP2005135611A (ja) 複合型荷電粒子ビーム装置
JPH051584B2 (enExample)
JP2002117798A (ja) 正・負両イオンを同時検出し、それらの質量分析が可能な表面分析・観察装置
JPH03295141A (ja) 検出器
CN105826152B (zh) 扫描型电子显微镜
JP2003035735A (ja) 帯電量の測定方法、荷電ビームの変位量測定方法、帯電量の測定装置および荷電ビームの変位量測定装置
JP2707534B2 (ja) 荷電粒子線走査型試料観察装置
JPH0588502B2 (enExample)
JPH0236207Y2 (enExample)
JPH0236209Y2 (enExample)
JPH0218849A (ja) 荷電ビーム装置
JPH05135726A (ja) 電子線分析装置
JPWO1996036053A1 (ja) ２次粒子検出器付イオンビーム照射装置及び２次粒子検出方法
JPH02301949A (ja) 二次荷電粒子検出方法

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees