JPS63175318A - ガスフエ−ズイオン源 - Google Patents

ガスフエ−ズイオン源

Info

Publication number
JPS63175318A
JPS63175318A JP793487A JP793487A JPS63175318A JP S63175318 A JPS63175318 A JP S63175318A JP 793487 A JP793487 A JP 793487A JP 793487 A JP793487 A JP 793487A JP S63175318 A JPS63175318 A JP S63175318A
Authority
JP
Japan
Prior art keywords
gas
ionization chamber
ion source
helium
cooled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP793487A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0421297B2 (enrdf_load_stackoverflow
Inventor
Ryuzo Aihara
相原　龍三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP793487A priority Critical patent/JPS63175318A/ja
Publication of JPS63175318A publication Critical patent/JPS63175318A/ja
Publication of JPH0421297B2 publication Critical patent/JPH0421297B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0807—Gas field ion sources [GFIS]

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP793487A 1987-01-16 1987-01-16 ガスフエ−ズイオン源 Granted JPS63175318A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP793487A JPS63175318A (ja) 1987-01-16 1987-01-16 ガスフエ−ズイオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP793487A JPS63175318A (ja) 1987-01-16 1987-01-16 ガスフエ−ズイオン源

Publications (2)

Publication Number Publication Date
JPS63175318A true JPS63175318A (ja) 1988-07-19
JPH0421297B2 JPH0421297B2 (enrdf_load_stackoverflow) 1992-04-09

Family

ID=11679344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP793487A Granted JPS63175318A (ja) 1987-01-16 1987-01-16 ガスフエ−ズイオン源

Country Status (1)

Country Link
JP (1) JPS63175318A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007117850A (ja) * 2005-10-26 2007-05-17 Bruker Daltonics Kk 質量分析用試料スプレー装置
EP2012341A1 (en) * 2007-07-06 2009-01-07 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh Modular gas ion source
WO2010132265A3 (en) * 2009-05-12 2011-01-20 Carl Zeiss Nts, Llc. Gas delivery in an ion microscope system
WO2010147872A3 (en) * 2009-06-18 2011-10-20 Carl Zeiss Nts, Llc Cooled charged particle systems and methods

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007117850A (ja) * 2005-10-26 2007-05-17 Bruker Daltonics Kk 質量分析用試料スプレー装置
EP2012341A1 (en) * 2007-07-06 2009-01-07 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh Modular gas ion source
US8101922B2 (en) 2007-07-06 2012-01-24 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Modular gas ion source
WO2010132265A3 (en) * 2009-05-12 2011-01-20 Carl Zeiss Nts, Llc. Gas delivery in an ion microscope system
US8558192B2 (en) 2009-05-12 2013-10-15 Carl Zeiss Microscopy, Llc Gas delivery system with voltage gradient for an ion microscope
WO2010147872A3 (en) * 2009-06-18 2011-10-20 Carl Zeiss Nts, Llc Cooled charged particle systems and methods
EP2610888A3 (en) * 2009-06-18 2014-12-17 Carl Zeiss Microscopy, LLC Cooled charged particle systems and methods

Also Published As

Publication number Publication date
JPH0421297B2 (enrdf_load_stackoverflow) 1992-04-09

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