JPS63174444U - - Google Patents
Info
- Publication number
- JPS63174444U JPS63174444U JP16191586U JP16191586U JPS63174444U JP S63174444 U JPS63174444 U JP S63174444U JP 16191586 U JP16191586 U JP 16191586U JP 16191586 U JP16191586 U JP 16191586U JP S63174444 U JPS63174444 U JP S63174444U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- carrier
- shelf
- wafer carrier
- receiving plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 20
- 239000000969 carrier Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16191586U JPS63174444U (enExample) | 1986-10-22 | 1986-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16191586U JPS63174444U (enExample) | 1986-10-22 | 1986-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63174444U true JPS63174444U (enExample) | 1988-11-11 |
Family
ID=31088680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16191586U Pending JPS63174444U (enExample) | 1986-10-22 | 1986-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63174444U (enExample) |
-
1986
- 1986-10-22 JP JP16191586U patent/JPS63174444U/ja active Pending
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